Fung; Miguel S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fung; Miguel S..The latest application filed is for "method of forming film stacks with reduced defects".
- Fung; Miguel S. - Sunnyvale CA
| Patent | Date |
|---|---|
| Method of forming film stacks with reduced defects Grant 11,145,504 - Jiang , et al. October 12, 2 | 2021-10-12 |
| Method Of Forming Film Stacks With Reduced Defects App 20200227258 - JIANG; Zhijun ; et al. | 2020-07-16 |
| Low Temperature Conformal Deposition Of Silicon Nitride On High Aspect Ratio Structures App 20170084448 - BARMAN; Soumendra Narayan ; et al. | 2017-03-23 |
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