Funakubo; Takao
Patent Applications and Registrations
Patent applications and USPTO patent grants for Funakubo; Takao.The latest application filed is for "film forming method and film forming apparatus".
- Funakubo; Takao - Kurokawa-gun Miyagi
- Funakubo; Takao - Miyagi JP
| Patent | Date |
|---|---|
| Film Forming Method And Film Forming Apparatus App 20210140044 - Nagaike; Hiroshi ; et al. | 2021-05-13 |
| Film Forming Apparatus And Film Forming Method App 20210130955 - NAGAIKE; Hiroshi ; et al. | 2021-05-06 |
| Plasma processing method Grant 10,923,332 - Asako , et al. February 16, 2 | 2021-02-16 |
| Method for etching organic region Grant 10,903,085 - Asako , et al. January 26, 2 | 2021-01-26 |
| Plasma processing apparatus and plasma processing method Grant 10,861,675 - Funakubo , et al. December 8, 2 | 2020-12-08 |
| Method for cleaning components of plasma processing apparatus Grant 10,734,204 - Funakubo , et al. | 2020-08-04 |
| Method for cleaning components of plasma processing apparatus Grant 10,626,497 - Funakubo , et al. | 2020-04-21 |
| Plasma Processing Method App 20190326104 - ASAKO; Ryuichi ; et al. | 2019-10-24 |
| Method For Etching Organic Region App 20190326106 - ASAKO; Ryuichi ; et al. | 2019-10-24 |
| Method For Cleaning Components Of Plasma Processing Apparatus App 20190221406 - FUNAKUBO; Takao ; et al. | 2019-07-18 |
| Method For Cleaning Components Of Plasma Processing Apparatus App 20190218663 - FUNAKUBO; Takao ; et al. | 2019-07-18 |
| Plasma Processing Apparatus And Plasma Processing Method App 20190139744 - FUNAKUBO; Takao ; et al. | 2019-05-09 |
| Plasma processing apparatus and plasma processing method Grant 10,204,763 - Funakubo , et al. Feb | 2019-02-12 |
| Plasma etching method Grant 9,779,962 - Funakubo , et al. October 3, 2 | 2017-10-03 |
| Plasma Processing Method App 20170221684 - NISHINO; Masaru ; et al. | 2017-08-03 |
| Plasma processing method and plasma processing apparatus Grant 9,653,317 - Nishino , et al. May 16, 2 | 2017-05-16 |
| Plasma Etching Method App 20160163554 - FUNAKUBO; Takao ; et al. | 2016-06-09 |
| Plasma Processing Apparatus And Plasma Processing Method App 20150380282 - FUNAKUBO; Takao ; et al. | 2015-12-31 |
| Plasma Processing Method And Plasma Processing Apparatus App 20150118859 - NISHINO; Masaru ; et al. | 2015-04-30 |
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