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Interconnect structures with fully aligned vias Grant 10,607,933 - Edelstein , et al. | 2020-03-31 |
Enhanced via fill material and processing for dual damscene integration Grant 10,340,182 - Doyle , et al. | 2019-07-02 |
Interconnect Structures With Fully Aligned Vias App 20190157201 - Edelstein; Daniel C. ;   et al. | 2019-05-23 |
Interconnect structures with fully aligned vias Grant 10,204,856 - Edelstein , et al. Feb | 2019-02-12 |
Enhanced Via Fill Material And Processing For Dual Damascene Integration App 20180138084 - Doyle; James P. ;   et al. | 2018-05-17 |
Interconnect Structures With Fully Aligned Vias App 20180102317 - Edelstein; Daniel C. ;   et al. | 2018-04-12 |
Interconnect structures with fully aligned vias Grant 9,911,690 - Edelstein , et al. March 6, 2 | 2018-03-06 |
Dynamic resource allocation in MapReduce Grant 9,886,310 - Fuller , et al. February 6, 2 | 2018-02-06 |
Enabling dynamic job configuration in mapreduce Grant 9,766,940 - Fuller , et al. September 19, 2 | 2017-09-19 |
Enhanced Via Fill Material And Processing For Dual Damscene Integration App 20170154812 - DOYLE; James P. ;   et al. | 2017-06-01 |
Dynamic tuning of memory in MapReduce systems Grant 9,582,189 - Fuller , et al. February 28, 2 | 2017-02-28 |
Interconnect Structures With Fully Aligned Vias App 20160163640 - Edelstein; Daniel C. ;   et al. | 2016-06-09 |
Interconnect structures with fully aligned vias Grant 9,324,650 - Edelstein , et al. April 26, 2 | 2016-04-26 |
Interconnect Structures With Fully Aligned Vias App 20160049364 - Edelstein; Daniel C. ;   et al. | 2016-02-18 |
Dynamic Tuning of Memory in MapReduce Systems App 20150309731 - Fuller; Nicholas C. ;   et al. | 2015-10-29 |
Cost Optimization for Bundled Licenses App 20150248690 - Fan; Li Ya ;   et al. | 2015-09-03 |
Dynamic Resource Allocation in Mapreduce App 20150227393 - Fuller; Nicholas C. ;   et al. | 2015-08-13 |
Enabling Dynamic Job Configuration in Mapreduce App 20150227392 - Fuller; Nicholas C. ;   et al. | 2015-08-13 |
Methodology for fabricating isotropically recessed source and drain regions of CMOS transistors Grant 9,006,108 - Fuller , et al. April 14, 2 | 2015-04-14 |
Methodology For Fabricating Isotropically Recessed Source Regions Of Cmos Transistors App 20140231809 - Fuller; Nicholas C. ;   et al. | 2014-08-21 |
Self-aligned borderless contacts for high density electronic and memory device integration Grant 8,754,530 - Babich , et al. June 17, 2 | 2014-06-17 |
Methodology for fabricating isotropically recessed source and drain regions of CMOS transistors Grant 8,716,798 - Fuller , et al. May 6, 2 | 2014-05-06 |
Optimized License Procurement App 20140122160 - Fuller; Nicholas C. ;   et al. | 2014-05-01 |
Optimized License Procurement App 20140122348 - Fuller; Nicholas C. ;   et al. | 2014-05-01 |
Methodology For Fabricating Isotropically Recessed Drain Regions Of Cmos Transistors App 20130146965 - Fuller; Nicholas C. ;   et al. | 2013-06-13 |
Methodology for fabricating isotropically recessed drain regions of CMOS transistors Grant 8,431,995 - Fuller , et al. April 30, 2 | 2013-04-30 |
Methodology For Fabricating Isotropically Recessed Source And Drain Regions Of Cmos Transistors App 20130012026 - Fuller; Nicholas C. ;   et al. | 2013-01-10 |
Mixed lithography with dual resist and a single pattern transfer Grant 8,334,090 - Fuller , et al. December 18, 2 | 2012-12-18 |
Methodology For Fabricating Isotropically Recessed Source Regions Of Cmos Transistors App 20120305928 - Fuller; Nicholas C. ;   et al. | 2012-12-06 |
Adopting feature of buried electrically conductive layer in dielectrics for electrical anti-fuse application Grant 8,159,042 - Yang , et al. April 17, 2 | 2012-04-17 |
Trilayer resist scheme for gate etching applications Grant 8,084,825 - Fuller , et al. December 27, 2 | 2011-12-27 |
Methodology For Fabricating Isotropically Recessed Drain Regions Of Cmos Transistors App 20110278672 - Fuller; Nicholas C. ;   et al. | 2011-11-17 |
Methodology For Fabricating Isotropically Source Regions Of Cmos Transistors App 20110278580 - Fuller; Nicholas C. ;   et al. | 2011-11-17 |
Methodology For Fabricating Isotropically Recessed Source And Drain Regions Of Cmos Transistors App 20110278673 - Fuller; Nicholas C. ;   et al. | 2011-11-17 |
System and method for plasma induced modification and improvement of critical dimension uniformity Grant 8,049,335 - Dalton , et al. November 1, 2 | 2011-11-01 |
Mixed Lithography With Dual Resist And A Single Pattern Transfer App 20110123779 - Fuller; Nicholas C. ;   et al. | 2011-05-26 |
Adopting feature of buried electrically conductive layer in dielectrics for electrical anti-fuse application Grant 7,927,995 - Yang , et al. April 19, 2 | 2011-04-19 |
Mixed lithography with dual resist and a single pattern transfer Grant 7,914,970 - Fuller , et al. March 29, 2 | 2011-03-29 |
Self-aligned Borderless Contacts For High Density Electronic And Memory Device Integration App 20100038723 - Babich; Katherina E. ;   et al. | 2010-02-18 |
Adopting Feature Of Buried Electrically Conductive Layer In Dielectrics For Electrical Anti-fuse Application App 20090305493 - Yang; Chih-Chao ;   et al. | 2009-12-10 |
Interconnect Structures With Partially Self Aligned Vias And Methods To Produce Same App 20090200683 - Colburn; Matthew Earl ;   et al. | 2009-08-13 |
Plasma Curing Of Patterning Materials For Aggressively Scaled Features App 20090174036 - Fuller; Nicholas C. ;   et al. | 2009-07-09 |
Trilayer Resist Scheme For Gate Etching Applications App 20090101985 - Fuller; Nicholas C. ;   et al. | 2009-04-23 |
Mixed Lithography With Dual Resist And A Single Pattern Transfer App 20090092799 - Fuller; Nicholas C. ;   et al. | 2009-04-09 |
Dual Damascene Process Flow Enabling Minimal Ulk Film Modification And Enhanced Stack Integrity App 20090014880 - Dalton; Timothy J. ;   et al. | 2009-01-15 |
Adopting Feature Of Buried Electrically Conductive Layer In Dielectrics For Electrical Anti-fuse Application App 20080283964 - Yang; Chih-Chao ;   et al. | 2008-11-20 |
Trilayer resist scheme for gate etching applications Grant 7,435,671 - Fuller , et al. October 14, 2 | 2008-10-14 |
Dual damascene process flow enabling minimal ULK film modification and enhanced stack integrity Grant 7,435,676 - Dalton , et al. October 14, 2 | 2008-10-14 |
Adopting feature of buried electrically conductive layer in dielectrics for electrical anti-fuse application Grant 7,402,463 - Yang , et al. July 22, 2 | 2008-07-22 |
Trilayer resist scheme for gate etching applications App 20080045011 - Fuller; Nicholas C. ;   et al. | 2008-02-21 |
De-fluorination after via etch to preserve passivation Grant 7,282,441 - Fuller , et al. October 16, 2 | 2007-10-16 |
Dual damascene process flow enabling minimal ULK film modification and enhanced stack integrity App 20070161226 - Dalton; Timothy J. ;   et al. | 2007-07-12 |
System And Method For Plasma Induced Modification And Improvement Of Critical Dimension Uniformity App 20070143721 - Dalton; Timothy J. ;   et al. | 2007-06-21 |
System and method for plasma induced modification and improvement of critical dimension uniformity Grant 7,196,014 - Dalton , et al. March 27, 2 | 2007-03-27 |
Adopting feature of buried electrically conductive layer in dielectrics for electrical anti-fuse application App 20070040276 - Yang; Chih-Chao ;   et al. | 2007-02-22 |
System and method for plasma induced modification and improvement of critical dimension uniformity App 20060099816 - Dalton; Timothy J. ;   et al. | 2006-05-11 |