Fuller; Gene E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fuller; Gene E..The latest application filed is for "two-exposure phase shift photolithography with improved inter-feature separation".
- Fuller; Gene E. - Richardson TX
| Patent | Date |
|---|---|
| Two-exposure phase shift photolithography with improved inter-feature separation Grant 6,686,102 - Randall , et al. February 3, 2 | 2004-02-03 |
| Two-exposure phase shift photolithography with improved inter-feature separation App 20030077526 - Randall, John N. ; et al. | 2003-04-24 |
| Two-exposure phase shift photolithography with improved inter-feature separation App 20020094492 - Randall, John N. ; et al. | 2002-07-18 |
| Resist process using anti-reflective coating Grant 4,557,797 - Fuller , et al. December 10, 1 | 1985-12-10 |
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