Fukushima; Yoshimasa
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fukushima; Yoshimasa.The latest application filed is for "charged particle beam apparatus and vibration damper for charged particle beam apparatus".
- Fukushima; Yoshimasa - Tokyo JP
- Fukushima; Yoshimasa - Hitachinaka N/A JP
- Fukushima; Yoshimasa - Hikari JP
| Patent | Date |
|---|---|
| Charged particle beam apparatus and vibration damper for charged particle beam apparatus Grant 10,056,226 - Takahashi , et al. August 21, 2 | 2018-08-21 |
| Charged Particle Beam Apparatus And Vibration Damper For Charged Particle Beam Apparatus App 20170250054 - TAKAHASHI; Motohiro ; et al. | 2017-08-31 |
| Stage device Grant 8,823,309 - Ogawa , et al. September 2, 2 | 2014-09-02 |
| Stage Device App 20120145920 - Ogawa; Hironori ; et al. | 2012-06-14 |
| System and method for electron-beam lithography Grant 7,276,709 - Fukushima , et al. October 2, 2 | 2007-10-02 |
| System and method for electron-beam lithography App 20050230637 - Fukushima, Yoshimasa ; et al. | 2005-10-20 |
| Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device App 20050002012 - Sakino, Shigeo ; et al. | 2005-01-06 |
| Sample-setting moving stage, manufacturing apparatus for circuit pattern, and inspection apparatus for circuit pattern App 20040250776 - Mizuochi, Masaki ; et al. | 2004-12-16 |
| Electron beam drawing apparatus Grant 6,794,665 - Kurihara , et al. September 21, 2 | 2004-09-21 |
| Evacuation use sample chamber and circuit pattern forming apparatus using the same Grant 6,744,054 - Mizuochi , et al. June 1, 2 | 2004-06-01 |
| Electron beam lithography apparatus Grant 6,730,916 - Tsuji , et al. May 4, 2 | 2004-05-04 |
| Travelling worktable apparatus Grant 6,659,441 - Mizuochi , et al. December 9, 2 | 2003-12-09 |
| Electron beam drawing apparatus App 20030197134 - Kurihara, Masaki ; et al. | 2003-10-23 |
| Travelling worktable apparatus App 20030020225 - Mizuochi, Masaki ; et al. | 2003-01-30 |
| Travelling worktable apparatus App 20020185799 - Mizuochi, Masaki ; et al. | 2002-12-12 |
| Evacuation use sample chamber and circuit pattern forming apparatus using the same App 20020070345 - Mizuochi, Masaki ; et al. | 2002-06-13 |
| Travelling worktable apparatus App 20010024008 - Mizuochi, Masaki ; et al. | 2001-09-27 |
| Vacuum processing unit and apparatus Grant 4,824,309 - Kakehi , et al. April 25, 1 | 1989-04-25 |
| Method and apparatus for controlling sample temperature Grant 4,565,601 - Kakehi , et al. January 21, 1 | 1986-01-21 |
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