Fukunaga; Fumihiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fukunaga; Fumihiko.The latest application filed is for "electron microscope device and inclined hole measurement method using same".

Company Profile

6.13.14

Fukunaga; Fumihiko - Tokyo JP
FUKUNAGA; Fumihiko - Minato-ku Tokyo
Fukunaga; Fumihiko - Mito N/A JP
Fukunaga; Fumihiko - Hitachinaka JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Measurement device, method and display device Grant 10,996,569 - Takagi , et al. May 4, 2	2021-05-04
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI Grant 10,783,625 - Harada , et al. Sept	2020-09-22
Electron microscope device and inclined hole measurement method using same Grant 10,720,307 - Takagi , et al.	2020-07-21
Overlay error measurement device and computer program Grant 10,712,152 - Fukunaga	2020-07-14
Electron Microscope Device And Inclined Hole Measurement Method Using Same App 20190362933 - TAKAGI; Yuji ; et al.	2019-11-28
Measurement Device, Method And Display Device App 20190033728 - TAKAGI; Yuji ; et al.	2019-01-31
Overlay Error Measurement Device and Computer Program App 20190017817 - FUKUNAGA; Fumihiko	2019-01-17
Overlay measurement method, device, and display device Grant 10,094,658 - Takagi , et al. October 9, 2	2018-10-09
Method For Measuring Overlay And Measuring Apparatus, Scanning Electron Microscope, And Gui App 20180025482 - HARADA; Minoru ; et al.	2018-01-25
Pattern inspecting and measuring device and program Grant 9,858,659 - Minakawa , et al. January 2, 2	2018-01-02
Overlay Measurement Method, Device, And Display Device App 20170322021 - TAKAGI; Yuji ; et al.	2017-11-09
Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI Grant 9,799,112 - Harada , et al. October 24, 2	2017-10-24
Superposition measuring apparatus, superposition measuring method, and superposition measuring system Grant 9,390,885 - Yamamoto , et al. July 12, 2	2016-07-12
Charged particle beam apparatus Grant 9,342,878 - Yamaguchi , et al. May 17, 2	2016-05-17
Superposition Measuring Apparatus, Superposition Measuring Method, and Superposition Measuring System App 20160056014 - YAMAMOTO; Takuma ; et al.	2016-02-25
Defect inspection method and defect inspection device Grant 9,165,356 - Harada , et al. October 20, 2	2015-10-20
Pattern Inspecting and Measuring Device and Program App 20150228063 - Minakawa; Tsuyoshi ; et al.	2015-08-13
Method For Measuring Overlay And Measuring Apparatus, Scanning Electron Microscope, And Gui App 20140375793 - Harada; Minoru ; et al.	2014-12-25
Defect Inspection Method and Defect Inspection Device App 20140169657 - Harada; Minoru ; et al.	2014-06-19
Charged Particle Beam Apparatus App 20130265408 - Yamaguchi; Kohei ; et al.	2013-10-10
Method and apparatus for inspecting defects of circuit patterns Grant 8,111,902 - Hiroi , et al. February 7, 2	2012-02-07
Method and apparatus for inspecting defects of circuit patterns App 20070047800 - Hiroi; Takashi ; et al.	2007-03-01
Focus correction method for inspection of circuit patterns App 20060284088 - Fukunaga; Fumihiko ; et al.	2006-12-21

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