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Substrate treating apparatus and substrate treating system including pin lift mechanism below cooling base and heat plate Grant 11,387,121 - Tsuji , et al. July 12, 2 | 2022-07-12 |
Apparatus and method for automated analysis Grant 11,175,302 - Asakura , et al. November 16, 2 | 2021-11-16 |
Substrate treating method and apparatus used therefor Grant 11,143,964 - Fukumoto , et al. October 12, 2 | 2021-10-12 |
Substrate treating method Grant 11,107,698 - Nakayama , et al. August 31, 2 | 2021-08-31 |
Substrate Treating Method And Apparatus Used Therefor App 20210134605 - NAKAYAMA; Chisayo ;   et al. | 2021-05-06 |
Exposure device, substrate processing apparatus, exposure method and substrate processing method Grant 10,955,745 - Nakayama , et al. March 23, 2 | 2021-03-23 |
Substrate treating method Grant 10,941,492 - Tanaka , et al. March 9, 2 | 2021-03-09 |
Substrate treating method Grant 10,915,025 - Fukumoto , et al. February 9, 2 | 2021-02-09 |
Substrate treating method and apparatus used therefor Grant 10,900,126 - Tanaka , et al. January 26, 2 | 2021-01-26 |
Automated Analyzer and Method of Controlling Automated Analyzer App 20200378996 - Kojima; Kazushige ;   et al. | 2020-12-03 |
Substrate Treating Method And Apparatus Used Therefor App 20200272055 - FUKUMOTO; Yasuhiro ;   et al. | 2020-08-27 |
Substrate treating apparatus Grant 10,651,062 - Fukumoto , et al. | 2020-05-12 |
Thermal processing apparatus and thermal processing method Grant 10,629,463 - Momma , et al. | 2020-04-21 |
Apparatus and Method for Automated Analysis App 20190331706 - Asakura; Makoto ;   et al. | 2019-10-31 |
Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method Grant 10,444,636 - Matsuo , et al. Oc | 2019-10-15 |
Substrate Treating Apparatus And Substrate Treating System App 20190273005 - TSUJI; Tatsuhisa ;   et al. | 2019-09-05 |
Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method Grant 10,401,736 - Matsuo , et al. Sep | 2019-09-03 |
Exposure Device, Substrate Processing Apparatus, Exposure Method And Substrate Processing Method App 20190086808 - NAKAYAMA; Chisayo ;   et al. | 2019-03-21 |
Substrate treating apparatus and treatment gas supplying nozzle Grant 10,214,814 - Fukumoto , et al. Feb | 2019-02-26 |
Substrate Treating Apparatus App 20180269084 - FUKUMOTO; Yasuhiro ;   et al. | 2018-09-20 |
Exposure Device, Substrate Processing Apparatus, Exposure Method Of Substrate And Substrate Processing Method App 20180253012 - MATSUO; Tomohiro ;   et al. | 2018-09-06 |
Exposure Device, Substrate Processing Apparatus, Exposure Method Of Substrate And Substrate Processing Method App 20180253011 - MATSUO; Tomohiro ;   et al. | 2018-09-06 |
Substrate Treating Method App 20180231895 - FUKUMOTO; Yasuhiro ;   et al. | 2018-08-16 |
Substrate Treating Method And Apparatus Used Therefor App 20180231894 - FUKUMOTO; Yasuhiro ;   et al. | 2018-08-16 |
Substrate Treating Method And Apparatus Used Therefor App 20180230598 - TANAKA; Yuji ;   et al. | 2018-08-16 |
Substrate Treating Method App 20180230599 - TANAKA; Yuji ;   et al. | 2018-08-16 |
Thermal Processing Apparatus And Thermal Processing Method App 20180033660 - MOMMA; Toru ;   et al. | 2018-02-01 |
Apparatus and method for automated analysis Grant 9,746,398 - Tamagawa , et al. August 29, 2 | 2017-08-29 |
Substrate Treating Apparatus And Treatment Gas Supplying Nozzle App 20160281235 - FUKUMOTO; Yasuhiro ;   et al. | 2016-09-29 |
Silicone rubber sponge and rubber-covered roller Grant 9,260,606 - Nakajima , et al. February 16, 2 | 2016-02-16 |
Heat-shrinkable resin tube and rotary member for image forming apparatus Grant 9,201,333 - Fukumoto , et al. December 1, 2 | 2015-12-01 |
Apparatus and Method for Automated Analysis App 20150309060 - Tamagawa; Takashi ;   et al. | 2015-10-29 |
Method for producing fluororesin-coated roller or belt Grant 8,911,576 - Kamimura , et al. December 16, 2 | 2014-12-16 |
Fluororesin tube and rotary member for fixing device Grant 8,828,514 - Fukumoto , et al. September 9, 2 | 2014-09-09 |
Method for producing fixing-unit member and fixing-unit member Grant 8,801,883 - Fukumoto , et al. August 12, 2 | 2014-08-12 |
Silicone Rubber Sponge And Rubber-covered Roller App 20130178348 - Nakajima; Shingo ;   et al. | 2013-07-11 |
Fluororesin Tube And Rotary Member For Fixing Device App 20120315068 - Fukumoto; Yasuhiro ;   et al. | 2012-12-13 |
Heat-shrinkable Tube, And Production Method And Production Apparatus Thereof App 20120298250 - Fukumoto; Yasuhiro ;   et al. | 2012-11-29 |
Method For Producing Fluororesin-coated Roller Or Belt App 20120222796 - Kamimura; Hiromi ;   et al. | 2012-09-06 |
Heat-shrinkable Resin Tube And Rotary Member For Image Forming Apparatus App 20120225232 - FUKUMOTO; Yasuhiro ;   et al. | 2012-09-06 |
Method For Producing Fixing-unit Member And Fixing-unit Member App 20110236691 - FUKUMOTO; Yasuhiro ;   et al. | 2011-09-29 |
Substrate support structure, heat treatment apparatus using same, first sheet-like object for use in the substrate support structure, method of manufacturing the substrate support structure, heat treatment apparatus, and substrate sucking method Grant 7,927,096 - Fukumoto , et al. April 19, 2 | 2011-04-19 |
Thermal processing apparatus, thermal processing method, and substrate processing apparatus Grant 7,522,823 - Fukumoto , et al. April 21, 2 | 2009-04-21 |
Substrate Support Structure, Heat Treatment Apparatus Using Same, First Sheet-like Object For Use In The Substrate Support Structure, Method Of Manufacturing The Substrate Support Structure, Heat Treatment Apparatus, And Substrate Sucking Method App 20070222131 - Fukumoto; Yasuhiro ;   et al. | 2007-09-27 |
Casting method and casting apparatus Grant 7,225,854 - Fukumoto , et al. June 5, 2 | 2007-06-05 |
Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus Grant 7,139,638 - Nakajima , et al. November 21, 2 | 2006-11-21 |
Casting method and casting apparatus App 20050217821 - Fukumoto, Yasuhiro ;   et al. | 2005-10-06 |
Method for producing light-alloy casting App 20050103407 - Masuda, Tsutomu ;   et al. | 2005-05-19 |
Substrate processing unit, method for detecting the position of a substrate and substrate processing apparatus App 20050065634 - Nakajima, Toshihiro ;   et al. | 2005-03-24 |
Thermal processing apparatus, thermal processing method, and substrate processing apparatus App 20050058440 - Fukumoto, Yasuhiro ;   et al. | 2005-03-17 |
Toner sealing material Grant 5,274,425 - Fukumoto , et al. December 28, 1 | 1993-12-28 |