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Method of adjusting optical imaging system, positional deviation detecting mark, method of detecting positional deviation, method of detecting position, position detecting device and mark identifying device Grant 7,528,954 - Fukui May 5, 2 | 2009-05-05 |
Projection Optical System, Exposure Apparatus, Exposure Method, Display Manufacturing Method, Mask, And Mask Manufacturing Method App 20090021712 - KUMAZAWA; Masato ;   et al. | 2009-01-22 |
Mark position detection apparatus Grant 7,456,967 - Fukui , et al. November 25, 2 | 2008-11-25 |
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Optical resonator and laser oscillator Grant 7,212,559 - Hayashibe , et al. May 1, 2 | 2007-05-01 |
Mark position detecting apparatus and mark position detecting method Grant 7,197,176 - Fukui , et al. March 27, 2 | 2007-03-27 |
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