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Patent applications and USPTO patent grants for Fukuda; Takahide.The latest application filed is for "method of substrate processing to form a film on multiple target objects".
Patent | Date |
---|---|
Method of substrate processing to form a film on multiple target objects Grant 6,054,181 - Nanbu , et al. April 25, 2 | 2000-04-25 |
Double-sided substrate cleaning apparatus and cleaning method using the same Grant 5,964,954 - Matsukawa , et al. October 12, 1 | 1999-10-12 |
Apparatus for supplying a treatment material Grant 5,733,375 - Fukuda , et al. March 31, 1 | 1998-03-31 |
Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections Grant 5,725,664 - Nanbu , et al. March 10, 1 | 1998-03-10 |
Resist treating method Grant 5,686,143 - Matsukawa , et al. November 11, 1 | 1997-11-11 |
Double-sided substrate cleaning apparatus Grant 5,518,542 - Matsukawa , et al. May 21, 1 | 1996-05-21 |
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