| Patent | Date |
|---|
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
Grant 11,453,943 - Fukazawa , et al. September 27, 2 | 2022-09-27 |
Silicon Precursors For Silicon Nitride Deposition
App 20220181148 - Dezelah; Charles ; et al. | 2022-06-09 |
Methods And Aparatuses For Flowable Gap-fill
App 20220119944 - Yoshimoto; Shinya ; et al. | 2022-04-21 |
Methods for forming doped silicon oxide thin films
Grant 11,302,527 - Takamure , et al. April 12, 2 | 2022-04-12 |
Method And Apparatus For Filling A Gap
App 20210313167 - PORE; Viljami ; et al. | 2021-10-07 |
Si precursors for deposition of SiN at low temperatures
Grant 11,069,522 - Niskanen , et al. July 20, 2 | 2021-07-20 |
Method Of Forming A Structure Including Silicon Oxide
App 20210143003 - Fukuda; Hideaki ; et al. | 2021-05-13 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20210082684 - Niskanen; Antti J. ; et al. | 2021-03-18 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200388487 - Takamure; Noboru ; et al. | 2020-12-10 |
Wafer-supporting device and method for producing same
Grant 10,854,498 - Shoji , et al. December 1, 2 | 2020-12-01 |
Methods for forming doped silicon oxide thin films
Grant 10,784,105 - Takamure , et al. Sept | 2020-09-22 |
Method for manufacturing electrode material
Grant 10,766,069 - Hayashi , et al. Sep | 2020-09-08 |
Computer system, communication device, and storage control method with DMA transfer of data
Grant 10,733,118 - Takizawa , et al. | 2020-08-04 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200185218 - Takamure; Noboru ; et al. | 2020-06-11 |
Method for depositing oxide film by thermal ALD and PEALD
Grant 10,655,221 - Fukazawa , et al. | 2020-05-19 |
Method for manufacturing electrode material and electrode material
Grant 10,614,969 - Ishikawa , et al. | 2020-04-07 |
Methods for forming doped silicon oxide thin films
Grant 10,510,530 - Takamure , et al. Dec | 2019-12-17 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20190371594 - Niskanen; Antti J. ; et al. | 2019-12-05 |
Method For Manufacturing Electrode Material And Electrode Material
App 20190362910 - ISHIKAWA; Keita ; et al. | 2019-11-28 |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
Grant 10,435,790 - Fukazawa , et al. O | 2019-10-08 |
Method For Manufacturing Electrode Material
App 20190299285 - HAYASHI; Shota ; et al. | 2019-10-03 |
Si precursors for deposition of SiN at low temperatures
Grant 10,395,917 - Niskanen , et al. A | 2019-08-27 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20190172708 - Takamure; Noboru ; et al. | 2019-06-06 |
Computer System, Communication Device, And Storage Control Method
App 20190012279 - TAKIZAWA; Sho ; et al. | 2019-01-10 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20180366314 - Niskanen; Antti J. ; et al. | 2018-12-20 |
Methods for forming doped silicon oxide thin films
Grant 10,147,600 - Takamure , et al. De | 2018-12-04 |
Method For Depositing Oxide Film By Thermal Ald And Peald
App 20180223429 - Fukazawa; Atsuki ; et al. | 2018-08-09 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20180211834 - Takamure; Noboru ; et al. | 2018-07-26 |
Method Of Subatmospheric Plasma-enhanced Ald Using Capacitively Coupled Electrodes With Narrow Gap
App 20180119283 - Fukazawa; Atsuki ; et al. | 2018-05-03 |
Si precursors for deposition of SiN at low temperatures
Grant 9,905,416 - Niskanen , et al. February 27, 2 | 2018-02-27 |
Methods for forming doped silicon oxide thin films
Grant 9,875,893 - Takamure , et al. January 23, 2 | 2018-01-23 |
Method For Forming Carbon-containing Silicon/metal Oxide Or Nitride Film By Ald Using Silicon Precursor And Hydrocarbon Precursor
App 20170342559 - Fukazawa; Atsuki ; et al. | 2017-11-30 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20170338111 - Takamure; Noboru ; et al. | 2017-11-23 |
Method and apparatus for filling a gap
Grant 9,812,320 - Pore , et al. November 7, 2 | 2017-11-07 |
Method for forming film filled in trench without seam or void
Grant 9,812,319 - Fukazawa , et al. November 7, 2 | 2017-11-07 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20170133216 - Niskanen; Antti J. ; et al. | 2017-05-11 |
Continuous process incorporating atomic layer etching
Grant 9,627,221 - Zaitsu , et al. April 18, 2 | 2017-04-18 |
Method For Forming Sin Or Sicn Film In Trenches By Peald
App 20170051405 - Fukazawa; Atsuki ; et al. | 2017-02-23 |
Deposition of boron and carbon containing materials
Grant 9,576,790 - Pore , et al. February 21, 2 | 2017-02-21 |
Si precursors for deposition of SiN at low temperatures
Grant 9,564,309 - Niskanen , et al. February 7, 2 | 2017-02-07 |
Methods for forming doped silicon oxide thin films
Grant 9,564,314 - Takamure , et al. February 7, 2 | 2017-02-07 |
Method for forming dielectric film in trenches by PEALD using H-containing gas
Grant 9,455,138 - Fukazawa , et al. September 27, 2 | 2016-09-27 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20160196970 - Takamure; Noboru ; et al. | 2016-07-07 |
Method For Depositing Metal-containing Film Using Particle-reduction Step
App 20160168699 - Fukazawa; Atsuki ; et al. | 2016-06-16 |
Methods for forming doped silicon oxide thin films
Grant 9,368,352 - Takamure , et al. June 14, 2 | 2016-06-14 |
Method for forming multi-element thin film constituted by at least five elements by PEALD
Grant 9,343,297 - Fukazawa , et al. May 17, 2 | 2016-05-17 |
Method of forming metal oxide hardmask
Grant 9,171,716 - Fukuda October 27, 2 | 2015-10-27 |
Deposition Of Boron And Carbon Containing Materials
App 20150287591 - Pore; Viljami J. ; et al. | 2015-10-08 |
Methods for forming doped silicon oxide thin films
Grant 9,153,441 - Takamure , et al. October 6, 2 | 2015-10-06 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150147875 - Takamure; Noboru ; et al. | 2015-05-28 |
Method of Forming Metal Oxide Hardmask
App 20150056540 - Fukuda; Hideaki | 2015-02-26 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150017794 - Takamure; Noboru ; et al. | 2015-01-15 |
Storage system and data transfer control method
Grant 08924606 - | 2014-12-30 |
Storage system and data transfer control method
Grant 8,924,606 - Akiyama , et al. December 30, 2 | 2014-12-30 |
Method of forming metal oxide hardmask
Grant 8,901,016 - Ha , et al. December 2, 2 | 2014-12-02 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20140273477 - Niskanen; Antti J. ; et al. | 2014-09-18 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20140273531 - Niskanen; Antti J. ; et al. | 2014-09-18 |
Method for forming aluminum oxide film using Al compound containing alkyl group and alkoxy or alkylamine group
Grant 8,784,950 - Fukazawa , et al. July 22, 2 | 2014-07-22 |
Method for Forming Insulation Film Using Non-Halide Precursor Having Four or More Silicons
App 20140141625 - Fukazawa; Atsuki ; et al. | 2014-05-22 |
Inter-memory Data Transfer Control Unit
App 20140104967 - ARAI; Masahiro ; et al. | 2014-04-17 |
Methods for forming doped silicon oxide thin films
Grant 8,679,958 - Takamure , et al. March 25, 2 | 2014-03-25 |
Method of tailoring conformality of Si-containing film
Grant 8,669,185 - Onizawa , et al. March 11, 2 | 2014-03-11 |
Method for Forming Aluminum Oxide Film Using Al Compound Containing Alkyl Group and Alkoxy or Alkylamine Group
App 20140017414 - Fukazawa; Atsuki ; et al. | 2014-01-16 |
Data transfer device with confirmation of write completion and method of controlling the same
Grant 8,572,342 - Arai , et al. October 29, 2 | 2013-10-29 |
Storage System And Data Transfer Control Method
App 20130232284 - Akiyama; Koji ; et al. | 2013-09-05 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20130115763 - Takamure; Noboru ; et al. | 2013-05-09 |
Wafer-Supporting Device and Method for Producing Same
App 20130014896 - Shoji; Fumitaka ; et al. | 2013-01-17 |
Storage subsystem
Grant 8,340,087 - Nakamura , et al. December 25, 2 | 2012-12-25 |
Storage system with multiple controllers and multiple processing paths
Grant 8,321,622 - Nakamura , et al. November 27, 2 | 2012-11-27 |
Storage subsystem and its control method
Grant 8,219,760 - Fukuda , et al. July 10, 2 | 2012-07-10 |
Method of Forming Metal Oxide Hardmask
App 20120164846 - Ha; Jeongseok ; et al. | 2012-06-28 |
METHOD OF TAILORING CONFORMALITY OF Si-CONTAINING FILM
App 20120028469 - Onizawa; Shigeyuki ; et al. | 2012-02-02 |
Storage Apparatus And Control Method Thereof
App 20120023287 - Fukuda; Hideaki | 2012-01-26 |
Storage system and data storage method
Grant 8,103,939 - Torigoe , et al. January 24, 2 | 2012-01-24 |
Storage device and access instruction sending method
Grant 8,099,563 - Ohno , et al. January 17, 2 | 2012-01-17 |
Storage Subsystem And Its Control Method
App 20110296117 - Fukuda; Hideaki ; et al. | 2011-12-01 |
Data Transfer Device And Method Of Controlling The Same
App 20110296129 - Arai; Masahiro ; et al. | 2011-12-01 |
Storage System With Multiple Controllers
App 20110246720 - Nakamura; Shuji ; et al. | 2011-10-06 |
Storage Subsystem
App 20110013625 - NAKAMURA; Shuji ; et al. | 2011-01-20 |
Liquid material vaporization apparatus for semiconductor processing apparatus
Grant 7,833,353 - Furukawahara , et al. November 16, 2 | 2010-11-16 |
Storage subsystem
Grant 7,817,626 - Nakamura , et al. October 19, 2 | 2010-10-19 |
Shower plate having projections and plasma CVD apparatus using same
Grant 7,799,134 - Tsuji , et al. September 21, 2 | 2010-09-21 |
Method of cleaning UV irradiation chamber
Grant 7,789,965 - Matsushita , et al. September 7, 2 | 2010-09-07 |
Storage apparatus, controller and control method
Grant 7,697,311 - Fukuda , et al. April 13, 2 | 2010-04-13 |
Storage system and data storage method
App 20090249173 - Torigoe; Osamu ; et al. | 2009-10-01 |
Storage device and access instruction sending method
App 20090216965 - Ohno; Masatomo ; et al. | 2009-08-27 |
Storage Subsystem
App 20090168784 - NAKAMURA; Shuji ; et al. | 2009-07-02 |
Tandem Type Semiconductor-processing Apparatus
App 20090162170 - Yamagishi; Takayuki ; et al. | 2009-06-25 |
Shower Plate Electrode For Plasma Cvd Reactor
App 20090155488 - Nakano; Ryu ; et al. | 2009-06-18 |
Method For Forming Ultra-thin Boron-containing Nitride Films And Related Apparatus
App 20090098741 - Tanaka; Rei ; et al. | 2009-04-16 |
Storage apparatus and control method thereof
App 20090077302 - Fukuda; Hideaki | 2009-03-19 |
Storage Apparatus, Controller And Control Method
App 20090059674 - FUKUDA; Hideaki ; et al. | 2009-03-05 |
Plasma pre-treating surfaces for atomic layer deposition
Grant 7,498,242 - Kumar , et al. March 3, 2 | 2009-03-03 |
Single-wafer-processing type CVD apparatus
Grant 7,462,245 - Shimizu , et al. December 9, 2 | 2008-12-09 |
Storage apparatus, controller and control method
Grant 7,460,383 - Fukuda , et al. December 2, 2 | 2008-12-02 |
Liquid Material Vaporization Apparatus For Semiconductor Processing Apparatus
App 20080173240 - FURUKAWAHARA; Kazunori ; et al. | 2008-07-24 |
Storage Apparatus, Controller And Control Method
App 20080086585 - Fukuda; Hideaki ; et al. | 2008-04-10 |
Method Of Cleaning Uv Irradiation Chamber
App 20080066778 - Matsushita; Kiyohiro ; et al. | 2008-03-20 |
Semiconductor Processing With A Remote Plasma Source For Self-cleaning
App 20070227554 - Satoh; Kiyoshi ; et al. | 2007-10-04 |
Semiconductor-processing apparatus provided with susceptor and placing block
Grant 7,276,123 - Shimizu , et al. October 2, 2 | 2007-10-02 |
Method of cleaning CVD equipment processing chamber
Grant 7,234,476 - Arai , et al. June 26, 2 | 2007-06-26 |
Plasma pre-treating surfaces for atomic layer deposition
App 20060216932 - Kumar; Devendra ; et al. | 2006-09-28 |
Self-cleaning method for plasma CVD apparatus
App 20050242061 - Fukuda, Hideaki | 2005-11-03 |
Shower plate having projections and plasma CVD apparatus using same
App 20050183666 - Tsuji, Naoto ; et al. | 2005-08-25 |
Method of film deposition using single-wafer-processing type CVD
Grant 6,921,556 - Shimizu , et al. July 26, 2 | 2005-07-26 |
Thin-film forming apparatus having an automatic cleaning function for cleaning the inside
App 20050139578 - Fukuda, Hideaki ; et al. | 2005-06-30 |
Apparatus for single-wafer-processing type CVD
App 20050098111 - Shimizu, Akira ; et al. | 2005-05-12 |
Semiconductor-processing apparatus provided with susceptor and placing block
App 20050022737 - Shimizu, Akira ; et al. | 2005-02-03 |
Motion vector detecting method and image processing appparatus using the same
App 20040240553 - Kurihara, Yuichiro ; et al. | 2004-12-02 |
Processor system
App 20040243780 - Fukuda, Hideaki ; et al. | 2004-12-02 |
Semiconductor processing device provided with a remote plasma source for self-cleaning
App 20040144489 - Satoh, Kiyoshi ; et al. | 2004-07-29 |
Semiconductor processing with a remote plasma source for self-cleaning
App 20040144400 - Satoh, Kiyoshi ; et al. | 2004-07-29 |
Apparatus and method for single-wafer-processing type CVD
App 20040071874 - Shimizu, Akira ; et al. | 2004-04-15 |
Electric commerce credit processing method and electric commerce system
App 20040068465 - Nagamine, Shigeru ; et al. | 2004-04-08 |
Single-wafer-processing type CVD apparatus
App 20040011292 - Shimizu, Akira ; et al. | 2004-01-22 |
Method of cleaning CVD equipment processing chamber
App 20030170402 - Arai, Hirofumi ; et al. | 2003-09-11 |
Plasma CVD apparatus conducting self-cleaning and method of self-cleaning
App 20030097987 - Fukuda, Hideaki | 2003-05-29 |
Method of forming thin film onto semiconductor substrate
Grant 6,524,955 - Fukuda , et al. February 25, 2 | 2003-02-25 |
Method for producing silicon nitride series film
Grant 6,413,887 - Fukuda , et al. July 2, 2 | 2002-07-02 |
Semiconductor-processing device provided with a remote plasma source for self-cleaning
App 20020011210 - Satoh, Kiyoshi ; et al. | 2002-01-31 |
Method of forming thin film onto semiconductor substrate
App 20010037769 - Fukuda, Hideaki ; et al. | 2001-11-08 |
Ceramic heater device and film forming device using the same
App 20010029895 - Hanamachi, Toshihiko ; et al. | 2001-10-18 |
Plasma Processing Apparatus For Semiconductors
App 20010008171 - FUKUDA, HIDEAKI ; et al. | 2001-07-19 |
Method of forming film on semiconductor substrate in film-forming apparatus
Grant 6,187,691 - Fukuda , et al. February 13, 2 | 2001-02-13 |
Redundant binary code converting circuit and multiplication circuit using same
Grant 5,986,587 - Fukuda November 16, 1 | 1999-11-16 |
Method for manufacturing SiOF films
Grant 5,935,649 - Koizumi , et al. August 10, 1 | 1999-08-10 |
Low bit rate coding system for high speed compression of speech data
Grant 5,890,105 - Ishihara , et al. March 30, 1 | 1999-03-30 |
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