loadpatents
Patent applications and USPTO patent grants for Fukaya; Souichi.The latest application filed is for "photomask blank".
Patent | Date |
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Halftone phase shift photomask blank Grant 10,747,098 - Inazuki , et al. A | 2020-08-18 |
Photomask blank Grant 10,712,654 - Fukaya , et al. | 2020-07-14 |
Method of manufacturing photomask blank and photomask blank Grant 10,120,274 - Fukaya , et al. November 6, 2 | 2018-11-06 |
Halftone Phase Shift Photomask Blank App 20180259842 - INAZUKI; Yukio ;   et al. | 2018-09-13 |
Photomask Blank App 20180259843 - FUKAYA; Souichi ;   et al. | 2018-09-13 |
Blank for mold production and method for manufacturing mold Grant 10,040,220 - Fukaya , et al. August 7, 2 | 2018-08-07 |
Photomask blank, making method, and photomask Grant 9,952,501 - Fukaya , et al. April 24, 2 | 2018-04-24 |
Photomask blank and method for preparing photomask Grant 9,880,459 - Sasamoto , et al. January 30, 2 | 2018-01-30 |
Inorganic material film, photomask blank, and method for manufacturing photomask Grant 9,851,633 - Fukaya , et al. December 26, 2 | 2017-12-26 |
Designing of photomask blank and photomask blank Grant 9,798,229 - Sasamoto , et al. October 24, 2 | 2017-10-24 |
Photomask blank Grant 9,798,230 - Fukaya , et al. October 24, 2 | 2017-10-24 |
Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method Grant 9,689,066 - Yoshikawa , et al. June 27, 2 | 2017-06-27 |
Method Of Manufacturing Photomask Blank And Photomask Blank App 20170123306 - FUKAYA; Souichi ;   et al. | 2017-05-04 |
Photomask blank Grant 9,618,838 - Fukaya , et al. April 11, 2 | 2017-04-11 |
Photomask Blank, Making Method, And Photomask App 20170082917 - FUKAYA; Souichi ;   et al. | 2017-03-23 |
Method of manufacturing photomask blank and photomask blank Grant 9,581,892 - Fukaya , et al. February 28, 2 | 2017-02-28 |
Photomask Blank And Method For Preparing Photomask App 20170031237 - SASAMOTO; Kouhei ;   et al. | 2017-02-02 |
Photomask blank Grant 9,541,823 - Sasamoto , et al. January 10, 2 | 2017-01-10 |
Inorganic Material Film, Photomask Blank, And Method For Manufacturing Photomask App 20170003584 - FUKAYA; Souichi ;   et al. | 2017-01-05 |
Blank For Mold Production And Method For Manufacturing Mold App 20160346960 - FUKAYA; Souichi ;   et al. | 2016-12-01 |
Photomask blank, process for production of photomask, and chromium-containing material film Grant 9,488,907 - Yoshikawa , et al. November 8, 2 | 2016-11-08 |
Blank for mold production and method for manufacturing mold Grant 9,440,375 - Fukaya , et al. September 13, 2 | 2016-09-13 |
Photomask Blank App 20160077425 - FUKAYA; Souichi ;   et al. | 2016-03-17 |
Photomask Blank App 20160077424 - FUKAYA; Souichi ;   et al. | 2016-03-17 |
Photomask blank and method for manufacturing photomask Grant 9,268,212 - Fukaya , et al. February 23, 2 | 2016-02-23 |
Designing Of Photomask Blank And Photomask Blank App 20160033859 - SASAMOTO; Kouhei ;   et al. | 2016-02-04 |
Photomask blank, method for manufacturing photomask, and method for manufacturing phase shift mask Grant 9,188,852 - Fukaya , et al. November 17, 2 | 2015-11-17 |
Half-tone phase shift mask blank and method for manufacturing half-tone phase shift mask Grant 9,158,192 - Fukaya , et al. October 13, 2 | 2015-10-13 |
Photomask Blank, Process For Production Of Photomask, And Chromium-containing Material Film App 20150192849 - YOSHIKAWA; Hiroki ;   et al. | 2015-07-09 |
Photomask blank and manufacturing method thereof Grant 9,063,427 - Fukaya June 23, 2 | 2015-06-23 |
Photomask Blank App 20150160549 - SASAMOTO; Kouhei ;   et al. | 2015-06-11 |
Sputter Deposition Method, Sputtering System, Manufacture Of Photomask Blank, And Photomask Blank App 20150159264 - SASAMOTO; Kouhei ;   et al. | 2015-06-11 |
Photomask blank, process for production of photomask, and chromium-containing material film Grant 8,968,972 - Yoshikawa , et al. March 3, 2 | 2015-03-03 |
Method Of Manufacturing Photomask Blank And Photomask Blank App 20150010853 - Fukaya; Souichi ;   et al. | 2015-01-08 |
Photomask Blank And Manufacturing Method Thereof App 20140120460 - FUKAYA; Souichi | 2014-05-01 |
Half-tone Phase Shift Mask Blank And Method For Manufacturing Half-tone Phase Shift Mask App 20130309598 - FUKAYA; Souichi ;   et al. | 2013-11-21 |
Blank For Mold Production And Method For Manufacturing Mold App 20130306596 - FUKAYA; Souichi ;   et al. | 2013-11-21 |
Photomask Blank Manufacturing Method, Photomask Blank, Photomask, And Pattern Transfer Method App 20130309599 - YOSHIKAWA; Hiroki ;   et al. | 2013-11-21 |
Photomask Blank, Method For Manufacturing Photomask, And Method For Manufacturing Phase Shift Mask App 20130309601 - Fukaya; Souichi ;   et al. | 2013-11-21 |
Photomask Blank And Method For Manufacturing Photomask App 20130309600 - FUKAYA; Souichi ;   et al. | 2013-11-21 |
Photomask Blank And Manufacturing Method Thereof App 20130288163 - FUKAYA; Souichi | 2013-10-31 |
Photomask Blank, Process For Production Of Photomask, And Chromium-containing Material Film App 20130230796 - Yoshikawa; Hiroki ;   et al. | 2013-09-05 |
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