loadpatents
Patent applications and USPTO patent grants for Fukasawa; Yasushi.The latest application filed is for "uv irradiation apparatus with cleaning mechanism and method for cleaning uv irradiation apparatus".
Patent | Date |
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UV Irradiation Apparatus with Cleaning Mechanism and Method for Cleaning UV Irradiation Apparatus App 20140116335 - Tsuji; Naoto ;   et al. | 2014-05-01 |
Method of plasma treatment using amplitude-modulated RF power Grant 8,021,723 - Fukasawa , et al. September 20, 2 | 2011-09-20 |
Gas-introducing system and plasma CVD apparatus Grant 7,718,004 - Satoh , et al. May 18, 2 | 2010-05-18 |
Method Of Plasma Treatment Using Amplitude-modulated Rf Power App 20090136683 - Fukasawa; Yasushi ;   et al. | 2009-05-28 |
Method And Apparatus For Monitoring Plasma-induced Damage Using Dc Floating Potential Of Substrate App 20090056627 - SHUTO; Mitsutoshi ;   et al. | 2009-03-05 |
Plasma Cvd Apparatus Equipped With Plasma Blocking Insulation Plate App 20070266945 - Shuto; Mitsutoshi ;   et al. | 2007-11-22 |
Gas-introducing system and plasma CVD apparatus App 20060090700 - Satoh; Kiyoshi ;   et al. | 2006-05-04 |
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