Patent | Date |
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Etching Method For Oxide Semiconductor Film App 20220122852 - HIRATA; Akiko ;   et al. | 2022-04-21 |
Semiconductor Device App 20210296384 - FUKASAWA; MASANAGA ;   et al. | 2021-09-23 |
Etching Method Of Oxide Semiconductor Film, Oxide Semiconductor Workpiece, And Electronic Device App 20210249273 - HIRATA; AKIKO ;   et al. | 2021-08-12 |
Solid-state Imaging Device And Method For Manufacturing The Same App 20210167106 - FUKASAWA; MASANAGA | 2021-06-03 |
Etching method and etching processing apparatus Grant 11,017,987 - Fukasawa May 25, 2 | 2021-05-25 |
Etching Method And Etching Processing Apparatus App 20200373135 - FUKASAWA; MASANAGA | 2020-11-26 |
Semiconductor device and solid-state imaging device Grant 10,804,313 - Kagawa , et al. October 13, 2 | 2020-10-13 |
Semiconductor device and manufacturing method of the same Grant 10,504,839 - Fukasawa Dec | 2019-12-10 |
Semiconductor Device And Manufacturing Method Of The Same App 20190080997 - Fukasawa; Masanaga | 2019-03-14 |
Semiconductor device and manufacturing method of the same Grant 10,157,837 - Fukasawa Dec | 2018-12-18 |
Semiconductor Device And Solid-state Imaging Device App 20180286911 - KAGAWA; Yoshihisa ;   et al. | 2018-10-04 |
Semiconductor device and solid-state imaging device Grant 10,026,769 - Kagawa , et al. July 17, 2 | 2018-07-17 |
Semiconductor Device And Manufacturing Method Of The Same App 20180076126 - Fukasawa; Masanaga | 2018-03-15 |
Semiconductor device and manufacturing method of the same Grant 9,859,214 - Fukasawa January 2, 2 | 2018-01-02 |
Semiconductor Device And Manufacturing Method Of The Same App 20170207163 - Fukasawa; Masanaga | 2017-07-20 |
Semiconductor device and manufacturing method of the same Grant 9,627,359 - Fukasawa April 18, 2 | 2017-04-18 |
Semiconductor Device And Manufacturing Method Of The Same App 20160307877 - Fukasawa; Masanaga | 2016-10-20 |
Semiconductor device and manufacturing method of the same Grant 9,425,142 - Fukasawa August 23, 2 | 2016-08-23 |
Semiconductor Device And Solid-state Imaging Device App 20160233264 - KAGAWA; Yoshihisa ;   et al. | 2016-08-11 |
Semiconductor device and manufacturing method of the same Grant 9,293,411 - Fukasawa March 22, 2 | 2016-03-22 |
Predicting ultraviolet ray damage with visible wavelength spectroscopy during a semiconductor manufacturing process Grant 9,287,097 - Kuboi , et al. March 15, 2 | 2016-03-15 |
Semiconductor Device And Manufacturing Method Of The Same App 20150357313 - Fukasawa; Masanaga | 2015-12-10 |
Semiconductor Device And Manufacturing Method Of The Same App 20150008591 - Fukasawa; Masanaga | 2015-01-08 |
Semiconductor device and manufacturing method of the same Grant 8,871,633 - Fukasawa October 28, 2 | 2014-10-28 |
Integrated circuit chip stack employing carbon nanotube interconnects Grant 8,586,468 - Nogami , et al. November 19, 2 | 2013-11-19 |
Simulation Method, Simulation Program, And Semiconductor Manufacturing Apparatus App 20130133832 - Kuboi; Nobuyuki ;   et al. | 2013-05-30 |
Semiconductor Device And Manufacturing Method Of The Same App 20130082401 - Fukasawa; Masanaga | 2013-04-04 |
Method Of Manufacturing Semiconductor Device App 20090047793 - Fukasawa; Masanaga | 2009-02-19 |
Damascene interconnection having porous low k layer with a hard mask reduced in thickness Grant 7,300,868 - Fukasawa , et al. November 27, 2 | 2007-11-27 |
Damascene interconnection having porous low k layer with a hard mask reduced in thickness App 20070231993 - Fukasawa; Masanaga ;   et al. | 2007-10-04 |
Damage recovery method for low K layer in a damascene interconnection App 20070232047 - Fukasawa; Masanaga ;   et al. | 2007-10-04 |
Single or dual damascene structure reducing or eliminating the formation of micro-trenches arising from lithographic misalignment App 20070222076 - Fukasawa; Masanaga ;   et al. | 2007-09-27 |
Integrated circuit chip stack employing carbon nanotube interconnects App 20070045762 - Nogami; Takeshi ;   et al. | 2007-03-01 |
Method of etching insulating film and method of forming interconnection layer Grant 6,943,104 - Fukasawa , et al. September 13, 2 | 2005-09-13 |
Method of etching insulating film and method of forming interconnection layer App 20040043597 - Fukasawa, Masanaga ;   et al. | 2004-03-04 |
Method of etching insulating film and method of forming interconnection layer Grant 6,638,848 - Fukasawa , et al. October 28, 2 | 2003-10-28 |
Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers Grant 6,407,011 - Ikeda , et al. June 18, 2 | 2002-06-18 |