| Patent | Date |
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Semiconductor chip designing method, non-transitory storage medium storing semiconductor chip designing program, semiconductor device production method, and arithmetic device
Grant 10,810,340 - Fukagawa October 20, 2 | 2020-10-20 |
Semiconductor Chip Designing Method, Semiconductor Chip Designing Program, Semiconductor Device Production Method, And Arithmeti
App 20200175218 - FUKAGAWA; Youzou | 2020-06-04 |
Imprint Apparatus, Imprint Method, And Article Manufacturing Method
App 20160354969 - Baba; Norikazu ; et al. | 2016-12-08 |
Exposure apparatus, method of obtaining amount of regulation of object to be regulated, program, and method of manufacturing article
Grant 9,310,695 - Fukagawa , et al. April 12, 2 | 2016-04-12 |
Exposure Apparatus, Method Of Obtaining Amount Of Regulation Of Object To Be Regulated, Program, And Method Of Manufacturing Article
App 20140313499 - Fukagawa; Youzou ; et al. | 2014-10-23 |
Method, apparatus and medium for determining the intensity distribution formed on a pupil plane of an illumination optical system
Grant 8,811,714 - Gyoda , et al. August 19, 2 | 2014-08-19 |
Scanning exposure apparatus, control apparatus and method of manufacturing device
Grant 8,493,551 - Fukagawa , et al. July 23, 2 | 2013-07-23 |
Determination method, exposure method and storage medium
Grant 8,450,031 - Gyoda , et al. May 28, 2 | 2013-05-28 |
Determination Method, Exposure Method, And Storage Medium
App 20120051622 - GYODA; Yuichi ; et al. | 2012-03-01 |
Determination Method, Exposure Method And Storage Medium
App 20120052448 - GYODA; Yuichi ; et al. | 2012-03-01 |
Scanning Exposure Apparatus, Control Apparatus And Method Of Manufacturing Device
App 20110090475 - Fukagawa; Youzou ; et al. | 2011-04-21 |
Exposure apparatus and method, and device manufacturing method
Grant 7,894,039 - Miyashiro , et al. February 22, 2 | 2011-02-22 |
Scanning Exposure Apparatus, Exposure Method, And Device Manufacturing Method
App 20100002212 - Harayama; Tomohiro ; et al. | 2010-01-07 |
Method and apparatus for determining chip arrangement position on substrate
Grant 7,346,886 - Fukagawa , et al. March 18, 2 | 2008-03-18 |
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
Grant 7,301,615 - Fukagawa , et al. November 27, 2 | 2007-11-27 |
Exposure Apparatus And Method, And Device Manufacturing Method
App 20070268472 - Miyashiro; Ryuhei ; et al. | 2007-11-22 |
Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method
Grant 7,230,692 - Fukagawa , et al. June 12, 2 | 2007-06-12 |
Optical Apparatus, Method Of Determining Position Of Optical Element In Optical System, And Device Manufacturing Method
App 20070115458 - Fukagawa; Youzou ; et al. | 2007-05-24 |
Scanning exposure technique
Grant 7,084,957 - Fukagawa August 1, 2 | 2006-08-01 |
Method and apparatus for determining chip arrangement position on substrate
App 20050253215 - Fukagawa, Youzou ; et al. | 2005-11-17 |
Distortion measurement method and exposure apparatus
Grant 6,947,119 - Fukagawa September 20, 2 | 2005-09-20 |
Scanning exposure technique
App 20050036124 - Fukagawa, Youzou | 2005-02-17 |
Chip arrangement determining apparatus and method
Grant 6,854,105 - Fukagawa February 8, 2 | 2005-02-08 |
Distortion measurement method and exposure apparatus
App 20040119956 - Fukagawa, Youzou | 2004-06-24 |
Chip arrangement determining apparatus and method
App 20030172365 - Fukagawa, Youzou | 2003-09-11 |
Stage system in projection exposure apparatus
App 20010006422 - Fukagawa, Youzou ; et al. | 2001-07-05 |
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