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Pressure sensor and method for manufacturing the same
Grant 8,028,584 - Otsuka , et al. October 4, 2 | 2011-10-04 |
Semiconductor sensor having heater on insulation film and manufacturing method of the same
Grant 8,006,553 - Abe , et al. August 30, 2 | 2011-08-30 |
Semiconductor sensor having heater on insulation film and manufacturing method of the same
App 20100005877 - Abe; Ryuichirou ; et al. | 2010-01-14 |
Pressure sensor and method for manufacturing the same
App 20090049921 - Otsuka; Kiyoshi ; et al. | 2009-02-26 |
Semiconductor sensor
Grant 7,298,022 - Fujii , et al. November 20, 2 | 2007-11-20 |
Method for manufacturing movable portion of semiconductor device
Grant 7,214,625 - Asami , et al. May 8, 2 | 2007-05-08 |
Business transaction processing system
App 20050216361 - Fukada, Tsuyoshi | 2005-09-29 |
Semiconductor sensor
App 20050156309 - Fujii, Tetsuo ; et al. | 2005-07-21 |
Method of manufacturing semiconductor device capable of sensing dynamic quantity
Grant 6,906,394 - Muto , et al. June 14, 2 | 2005-06-14 |
Method for manufacturing movable portion of semiconductor device
App 20050054153 - Asami, Kazushi ; et al. | 2005-03-10 |
Semiconductor device having a moveable member therein and a protective member disposed thereon
Grant 6,787,866 - Fujii , et al. September 7, 2 | 2004-09-07 |
Method of manufacturing semiconductor device capable of sensing dynamic quantity
Grant 6,753,201 - Muto , et al. June 22, 2 | 2004-06-22 |
Semiconductor dynamic quantity detecting sensor and manufacturing method of the same
Grant 6,718,824 - Ito , et al. April 13, 2 | 2004-04-13 |
Method of manufacturing semiconductor device capable of sensing dynamic quantity
App 20030201506 - Muto, Hiroshi ; et al. | 2003-10-30 |
Method of manufacturing semiconductor device capable of sensing dynamic quantity
App 20020177252 - Muto, Hiroshi ; et al. | 2002-11-28 |
Semiconductor sensor device and method of manufacturing the same
Grant 6,444,543 - Sakai , et al. September 3, 2 | 2002-09-03 |
Semiconductor device produced by dicing
Grant 6,429,506 - Fujii , et al. August 6, 2 | 2002-08-06 |
Method for manufacturing semiconductor dynamic quantity sensor
Grant 6,423,563 - Fukada , et al. July 23, 2 | 2002-07-23 |
Semiconductor device and method for producing the same by dicing
App 20020093076 - Fujii, Tetsuo ; et al. | 2002-07-18 |
Semiconductor dynamic quantity detecting sensor and manufacturing method of the same
App 20020073779 - Ito, Takeshi ; et al. | 2002-06-20 |
Semiconductor sensor device and method of manufacturing the same
App 20010055876 - Sakai, Minekazu ; et al. | 2001-12-27 |
Angular velocity sensor
Grant 6,308,567 - Higuchi , et al. October 30, 2 | 2001-10-30 |
Method for manufacturing semiconductor dynamic quantity sensor
App 20010029060 - Fukada, Tsuyoshi ; et al. | 2001-10-11 |
Method for manufacturing semiconductor dynamic quantity sensor
Grant 6,287,885 - Muto , et al. September 11, 2 | 2001-09-11 |
Method of etching silicon wafer and silicon wafer
Grant 6,284,670 - Abe , et al. September 4, 2 | 2001-09-04 |
Semiconductor physical quantity sensor and production method thereof
Grant 6,240,782 - Kato , et al. June 5, 2 | 2001-06-05 |
Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure
Grant 6,151,966 - Sakai , et al. November 28, 2 | 2000-11-28 |
Method for fabrication of a semiconductor sensor
Grant 6,143,584 - Fukada , et al. November 7, 2 | 2000-11-07 |
Etching method for silicon substrates and semiconductor sensor
Grant 5,949,118 - Sakai , et al. September 7, 1 | 1999-09-07 |
Semiconductor device and method for producing the same
Grant 5,920,106 - Oba , et al. July 6, 1 | 1999-07-06 |
Process for producing semiconductor strain-sensitive sensor
Grant 5,654,244 - Sakai , et al. August 5, 1 | 1997-08-05 |
Production method of a semiconductor dynamic sensor
Grant 5,643,803 - Fukada , et al. July 1, 1 | 1997-07-01 |
Method of forming a semiconductor strain sensor
Grant 5,622,901 - Fukada April 22, 1 | 1997-04-22 |
Method for producing an acceleration sensor
Grant 5,525,549 - Fukada , et al. June 11, 1 | 1996-06-11 |
Semiconductor pressure sensor
Grant 5,289,721 - Tanizawa , et al. March 1, 1 | 1994-03-01 |
Dazzle-free mirror with photocell in a non-dazzle-free portion
Grant 4,721,364 - Itoh , et al. January 26, 1 | 1988-01-26 |
Liquid crystal element driving apparatus
Grant 4,687,956 - Itoh , et al. August 18, 1 | 1987-08-18 |
Drive apparatus for a liquid crystal dazzle-free mirror arrangement
Grant 4,676,601 - Itoh , et al. June 30, 1 | 1987-06-30 |
Control apparatus for a dazzle-free reflection mirror of a vehicle
Grant 4,671,615 - Fukada , et al. June 9, 1 | 1987-06-09 |
Detection of manipulation of position apparatus for dazzle-free mirror
Grant 4,669,827 - Fukada , et al. June 2, 1 | 1987-06-02 |
Apparatus for detecting the direction of light for dazzle-free mirrors
Grant 4,669,826 - Itoh , et al. June 2, 1 | 1987-06-02 |
Control apparatus with delay circuit for antiglare mirror
Grant 4,669,825 - Itoh , et al. June 2, 1 | 1987-06-02 |
Automatic antidazzle semitransparent mirror
Grant 4,655,549 - Suzuki , et al. April 7, 1 | 1987-04-07 |
Glare-shielding type reflector
Grant 4,632,509 - Ohmi , et al. December 30, 1 | 1986-12-30 |
Liquid crystal type dazzle-free transmissive-reflective mirror
Grant 4,623,222 - Itoh , et al. November 18, 1 | 1986-11-18 |
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