Fukada; Atsuko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fukada; Atsuko.The latest application filed is for "electron beam apparatus and electron beam inspection method".

Company Profile

0.10.10

Fukada; Atsuko - Kokubunji N/A JP
Fukada; Atsuko - Kokununji JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electron beam apparatus and electron beam inspection method Grant 8,431,893 - Fukuda , et al. April 30, 2	2013-04-30
Electron Beam Apparatus and Electron Beam Inspection Method App 20120261574 - Fukuda; Muneyuki ; et al.	2012-10-18
Electron beam apparatus and electron beam inspection method Grant 8,207,498 - Fukuda , et al. June 26, 2	2012-06-26
Inspection method and inspection system using charged particle beam Grant 8,153,969 - Fukada , et al. April 10, 2	2012-04-10
Charged Particle Apparatus, Scanning Electron Microscope, And Sample Inspection Method App 20120004879 - FUKUDA; Muneyuki ; et al.	2012-01-05
Charged particle apparatus, scanning electron microscope, and sample inspection method Grant 8,026,481 - Fukuda , et al. September 27, 2	2011-09-27
Electron Beam Apparatus And Electron Beam Inspection Method App 20110101223 - Fukuda; Muneyuki ; et al.	2011-05-05
Electron beam apparatus and electron beam inspection method Grant 7,875,849 - Fukuda , et al. January 25, 2	2011-01-25
Charged particle beam apparatus Grant 7,847,249 - Takahashi , et al. December 7, 2	2010-12-07
Inspection Method And Inspection System Using Charged Particle Beam App 20090184255 - FUKADA; Atsuko ; et al.	2009-07-23
Scanning electron microscope and apparatus for detecting defect Grant 7,504,626 - Tachibana , et al. March 17, 2	2009-03-17
Inspection method and inspection system using charged particle beam Grant 7,462,828 - Fukada , et al. December 9, 2	2008-12-09
Inspection method and inspection apparatus using charged particle beam Grant 7,449,690 - Nishiyama , et al. November 11, 2	2008-11-11
Charged particle beam apparatus App 20080185519 - Takahashi; Noritsugu ; et al.	2008-08-07
Electron Beam Apparatus and Electron Beam Inspection Method App 20080099673 - Fukuda; Muneyuki ; et al.	2008-05-01
Scanning electron microscope and apparatus for detecting defect App 20070187598 - Tachibana; Ichiro ; et al.	2007-08-16
Charged particle apparatus, scanning electron microscope, and sample inspection method App 20070181807 - Fukuda; Muneyuki ; et al.	2007-08-09
Inspection method and inspection system using charged particle beam App 20060243906 - Fukada; Atsuko ; et al.	2006-11-02
Inspection method and inspection apparatus using charged particle beam App 20060186351 - Nishiyama; Hidetoshi ; et al.	2006-08-24

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