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CaF.sub.2 polycrystalline body, focus ring, plasma processing apparatus, and method for producing CaF.sub.2 polycrystalline body Grant 9,580,331 - Fujiwara , et al. February 28, 2 | 2017-02-28 |
CaF2 POLYCRYSTALLINE BODY, FOCUS RING, PLASMA PROCESSING APPARATUS, AND METHOD FOR PRODUCING CaF2 POLYCRYSTALLINE BODY App 20140079902 - Fujiwara; Seishi ;   et al. | 2014-03-20 |
Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member App 20050284177 - Komine, Norio ;   et al. | 2005-12-29 |
Synthetic quartz glass member and method for producing the same App 20050047986 - Mizuguchi, Masafumi ;   et al. | 2005-03-03 |
Quartz glass member and projection aligner Grant 6,835,683 - Komine , et al. December 28, 2 | 2004-12-28 |
Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member App 20040095566 - Komine, Norio ;   et al. | 2004-05-20 |
Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member Grant 6,649,268 - Komine , et al. November 18, 2 | 2003-11-18 |
Quartz glass member and projection aligner App 20030171203 - Komine, Norio ;   et al. | 2003-09-11 |
Fluorine-containing silica glass and its method of manufacture App 20030037568 - Fujiwara, Seishi ;   et al. | 2003-02-27 |
Synthetic silica glass optical member and method of manufacturing the same App 20020144517 - Fujiwara, Seishi ;   et al. | 2002-10-10 |
Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus App 20020135746 - Jinbo, Hiroki ;   et al. | 2002-09-26 |
Synthetic silica glass molding method, synthetic silica glass molding apparatus, and synthetic silica glass App 20020050152 - Fujiwara, Seishi ;   et al. | 2002-05-02 |
Silica glass and its manufacturing method App 20020013208 - Komine, Norio ;   et al. | 2002-01-31 |
Manufacturing method of synthetic silica glass App 20020007649 - Fujiwara, Seishi ;   et al. | 2002-01-24 |
Silica glass and its manufacturing method Grant 6,291,377 - Komine , et al. September 18, 2 | 2001-09-18 |
Silica glass having superior durability against excimer laser beams and method for manufacturing the same App 20010000508 - Jinbo, Hiroki ;   et al. | 2001-04-26 |
Manufacturing method of synthetic silica glass Grant 6,094,940 - Fujiwara , et al. August 1, 2 | 2000-08-01 |
Image-focusing optical system for ultraviolet laser Grant 6,061,174 - Shiozawa , et al. May 9, 2 | 2000-05-09 |
Fluorine-containing silica glass Grant 5,958,809 - Fujiwara , et al. September 28, 1 | 1999-09-28 |
Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production Grant 5,702,495 - Hiraiwa , et al. December 30, 1 | 1997-12-30 |
Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production Grant 5,696,624 - Komine , et al. December 9, 1 | 1997-12-09 |
Method for producing silica glass for use with light in a vacuum ultraviolet wavelength range Grant 5,679,125 - Hiraiwa , et al. October 21, 1 | 1997-10-21 |