Patent | Date |
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SELF-STANDING GaN SUBSTRATE, GaN CRYSTAL, METHOD FOR PRODUCING GaN SINGLE CRYSTAL, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE App 20210273058 - NAGAO; Satoru ;   et al. | 2021-09-02 |
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device Grant 11,038,024 - Nagao , et al. June 15, 2 | 2021-06-15 |
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device Grant 11,031,475 - Nagao , et al. June 8, 2 | 2021-06-08 |
GaN substrate, method for producing GaN substrate, method for producing GaN crystal, and method for manufacturing semiconductor device Grant 10,655,244 - Tsukada , et al. | 2020-05-19 |
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals Grant 10,570,530 - Enatsu , et al. Feb | 2020-02-25 |
SELF-STANDING GaN SUBSTRATE, GaN CRYSTAL, METHOD FOR PRODUCING GaN SINGLE CRYSTAL, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE App 20200013860 - NAGAO; Satoru ;   et al. | 2020-01-09 |
Self-standing GaN substrate, GaN crystal, method for producing GaN single crystal, and method for producing semiconductor device Grant 10,475,887 - Nagao , et al. Nov | 2019-11-12 |
SELF-STANDING GaN SUBSTRATE, GaN CRYSTAL, METHOD FOR PRODUCING GaN SINGLE CRYSTAL, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE App 20190312111 - NAGAO; Satoru ;   et al. | 2019-10-10 |
GaN SUBSTRATE, METHOD FOR PRODUCING GaN SUBSTRATE, METHOD FOR PRODUCING GaN CRYSTAL, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE App 20180334758 - TSUKADA; Yusuke ;   et al. | 2018-11-22 |
Periodic Table Group 13 Metal Nitride Crystals And Method For Manufacturing Periodic Table Group 13 Metal Nitride Crystals App 20180258552 - ENATSU; Yuuki ;   et al. | 2018-09-13 |
GaN substrate, method for producing GaN substrate, method for producing GaN crystal, and method for manufacturing semiconductor device Grant 10,066,319 - Tsukada , et al. September 4, 2 | 2018-09-04 |
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals Grant 10,023,976 - Enatsu , et al. July 17, 2 | 2018-07-17 |
Periodic Table Group 13 Metal Nitride Crystals And Method For Manufacturing Periodic Table Group 13 Metal Nitride Crystals App 20180057960 - ENATSU; Yuuki ;   et al. | 2018-03-01 |
Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals Grant 9,840,791 - Enatsu , et al. December 12, 2 | 2017-12-12 |
Method for growing group III-nitride crystals in supercritical ammonia using an autoclave Grant 9,551,088 - Fujito , et al. January 24, 2 | 2017-01-24 |
Group III nitride crystal production method and group III nitride crystal Grant 9,502,241 - Matsumoto , et al. November 22, 2 | 2016-11-22 |
GaN SUBSTRATE, METHOD FOR PRODUCING GaN SUBSTRATE, METHOD FOR PRODUCING GaN CRYSTAL, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE App 20160319460 - TSUKADA; Yusuke ;   et al. | 2016-11-03 |
Process for producing a group-III nitride crystal and process for producing a light-emitting semiconductor element or a semiconductor device comprising a group-III nitride crystal Grant 9,428,386 - Fujito , et al. August 30, 2 | 2016-08-30 |
SELF-STANDING GaN SUBSTRATE, GaN CRYSTAL, METHOD FOR PRODUCING GaN SINGLE CRYSTAL, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE App 20160233306 - NAGAO; Satoru ;   et al. | 2016-08-11 |
Method for producing group-III nitride semiconductor crystal, group-III nitride semiconductor substrate, and semiconductor light emitting device Grant 9,112,096 - Fujito , et al. August 18, 2 | 2015-08-18 |
Periodic Table Group 13 Metal Nitride Crystals And Method For Manufacturing Periodic Table Group 13 Metal Nitride Crystals App 20150093318 - ENATSU; Yuuki ;   et al. | 2015-04-02 |
Single-crystal Substrate, Group-iii Nitride Crystal Obtained Using The Same, And Process For Producing Group-iii Nitride Crystal App 20140209012 - FUJITO; Kenji ;   et al. | 2014-07-31 |
Method For Growing Group Iii-nitride Crystals In Supercritical Ammonia Using An Autoclave App 20140190403 - Fujito; Kenji ;   et al. | 2014-07-10 |
Single-crystal substrate, group-III nitride crystal obtained using the same, and process for producing group-III nitride crystal Grant 8,728,622 - Fujito , et al. May 20, 2 | 2014-05-20 |
Method for growing group III-nitride crystals in supercritical ammonia using an autoclave Grant 8,709,371 - Fujito , et al. April 29, 2 | 2014-04-29 |
Group Iii Nitride Crystal Production Method And Group Iii Nitride Crystal App 20140035103 - MATSUMOTO; Hajime ;   et al. | 2014-02-06 |
Method For Producing Group-iii Nitride Semiconductor Crystal, Group-iii Nitride Semiconductor Substrate, And Semiconductor Light Emitting Device App 20130320394 - Fujito; Kenji ;   et al. | 2013-12-05 |
Nitride semiconductor crystal and its production method Grant 8,545,626 - Fujito , et al. October 1, 2 | 2013-10-01 |
Method For Producing Group-iii Nitride Semiconductor Crystal, Group-iii Nitride Semiconductor Substrate, And Semiconductor Light Emitting Device App 20120305983 - Fujito; Kenji ;   et al. | 2012-12-06 |
Single-crystal Substrate, Group-iii Nitride Crystal Obtained Using The Same, And Process For Producing Group-iii Nitride Crystal App 20120282443 - FUJITO; Kenji ;   et al. | 2012-11-08 |
Method for producing group III nitride semiconductor crystal, group III nitride semiconductor substrate, and semiconductor light-emitting device Grant 8,269,251 - Fujito , et al. September 18, 2 | 2012-09-18 |
Nitride Semiconductor Crystal And Production Process Thereof App 20120112320 - KUBO; Shuichi ;   et al. | 2012-05-10 |
Group III nitride semiconductor substrate and method for cleaning the same Grant 8,022,413 - Fujito , et al. September 20, 2 | 2011-09-20 |
Group Iii Nitride Semiconductor Substrate And Method For Cleaning The Same App 20110180904 - FUJITO; Kenji ;   et al. | 2011-07-28 |
Nitride Semiconductor Crystal And Its Production Method App 20110129669 - Fujito; Kenji ;   et al. | 2011-06-02 |
Group III nitride semiconductor substrate and method for cleaning the same Grant 7,928,446 - Fujito , et al. April 19, 2 | 2011-04-19 |
Group Iii Nitride Semiconductor Substrate And Method For Cleaning The Same App 20100200865 - Fujito; Kenji ;   et al. | 2010-08-12 |
Method for Growing Group III-Nitride Crystals in Supercritical Ammonia Using an Autoclave App 20100158785 - Fujito; Kenji | 2010-06-24 |
Method For Producing Group Iii Nitride Semiconductor Crystal, Group Iii Nitride Semiconductor Substrate, And Semiconductor Light- Emitting Device App 20100148212 - Fujito; Kenji ;   et al. | 2010-06-17 |