Patent | Date |
---|
Sound inspection system and sound inspection method Grant 11,373,673 - Sasaki , et al. June 28, 2 | 2022-06-28 |
Sound Inspection System And Sound Inspection Method App 20210241784 - SASAKI; Reiso ;   et al. | 2021-08-05 |
Sensing System and Sensing Control Method App 20210227348 - FUJIMORI; Tsukasa ;   et al. | 2021-07-22 |
Sensor system for collecting data using an encryption key Grant 10,979,987 - Fujimori , et al. April 13, 2 | 2021-04-13 |
Detection device and detection method, and fluid control system Grant 10,782,167 - Degawa , et al. Sept | 2020-09-22 |
Wireless sensor terminal, wireless sensor system, and sensor data collection method Grant 10,629,065 - Fujimori , et al. | 2020-04-21 |
Sensor System, Data Collection Apparatus, and Data Collection Method App 20200037272 - FUJIMORI; Tsukasa ;   et al. | 2020-01-30 |
Wireless Sensor Terminal, Wireless Sensor System, And Sensor Data Collection Method App 20190005807 - FUJIMORI; Tsukasa ;   et al. | 2019-01-03 |
Detection Device and Detection Method, and Fluid Control System App 20180202847 - DEGAWA; Munenori ;   et al. | 2018-07-19 |
Autonomous power supply system Grant 9,590,451 - Fujimori , et al. March 7, 2 | 2017-03-07 |
Autonomous Power Supply System App 20150008872 - FUJIMORI; Tsukasa ;   et al. | 2015-01-08 |
Semiconductor device carrying micro electro mechanical system Grant 8,581,354 - Fujimori , et al. November 12, 2 | 2013-11-12 |
Integrated micro electro-mechanical system and manufacturing method thereof Grant 8,129,802 - Fukuda , et al. March 6, 2 | 2012-03-06 |
Method of manufacturing micro electro mechanical systems device Grant 7,972,886 - Jeong , et al. July 5, 2 | 2011-07-05 |
Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode Grant 7,919,814 - Goto , et al. April 5, 2 | 2011-04-05 |
Controlling stress in MEMS structures Grant 7,670,861 - Hanaoka , et al. March 2, 2 | 2010-03-02 |
Inertial sensor and manufacturing method of the same Grant 7,658,109 - Fukuda , et al. February 9, 2 | 2010-02-09 |
Magnetic disk drive, preamplifier for magnetic disk drive, flexible printed cable assembly for magnetic disk drive Grant 7,630,160 - Kurita , et al. December 8, 2 | 2009-12-08 |
Semiconductor device and method of manufacturing the same App 20090134459 - GOTO; Yasushi ;   et al. | 2009-05-28 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20090064785 - Fukuda; Hiroshi ;   et al. | 2009-03-12 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20090049911 - Fukuda; Hiroshi ;   et al. | 2009-02-26 |
Method Of Manufacturing Micro Electro Mechanical Systems Device App 20090017579 - JEONG; Heewon ;   et al. | 2009-01-15 |
Magnetic disk drive, preamplifier for magnetic disk drive, flexible printed cable assembly for magnetic disk drive App 20080273262 - Kurita; Masayuki ;   et al. | 2008-11-06 |
Inertial Sensor And Manufacturing Method Of The Same App 20080196502 - FUKUDA; Hiroshi ;   et al. | 2008-08-21 |
Integrated micro electro-mechanical system and manufacturing method thereof Grant 7,402,449 - Fukuda , et al. July 22, 2 | 2008-07-22 |
Semiconductor Device Carrying Micro Electro Mechanical System App 20080128841 - Fujimori; Tsukasa ;   et al. | 2008-06-05 |
Sensor and sensor module Grant 7,325,457 - Fujimori , et al. February 5, 2 | 2008-02-05 |
Manufacturing method of MEMS structures and manufacturing method of MEMS structures with semiconductor device App 20070249082 - Hanaoka; Yuko ;   et al. | 2007-10-25 |
Sensor and sensor module App 20070068266 - Fujimori; Tsukasa ;   et al. | 2007-03-29 |
Integrated micro electro-mechanical system and manufacturing method thereof App 20060205106 - Fukuda; Hiroshi ;   et al. | 2006-09-14 |