Patent | Date |
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Nitride Crystal, Semiconductor Laminate, And Method For Manufacturing Nitride Crystal App 20220259765 - FUJIKURA; Hajime ;   et al. | 2022-08-18 |
Nitride crystal Grant 11,339,053 - Fujikura , et al. May 24, 2 | 2022-05-24 |
Group Iii Nitride Laminate, Semiconductor Element, And Method For Producing Group Iii Nitride Laminate App 20220028981 - FUJIKURA; Hajime ;   et al. | 2022-01-27 |
Nitride semiconductor template and nitride semiconductor device Grant 11,075,077 - Fujikura , et al. July 27, 2 | 2021-07-27 |
Group-iii Nitride Laminated Substrate And Semiconductor Light-emitting Element App 20210217927 - FUJIKURA; Hajime ;   et al. | 2021-07-15 |
Group-iii Nitride Laminated Substrate And Semiconductor Element App 20210184080 - FUJIKURA; Hajime ;   et al. | 2021-06-17 |
Nitride Semiconductor Laminated Structure, Nitride Semiconductor Light Emitting Element, And Method For Manufacturing Nitride Semiconductor Laminated Structure App 20210151625 - KONNO; Taichiro ;   et al. | 2021-05-20 |
Nitride crystal Grant 11,008,671 - Fujikura , et al. May 18, 2 | 2021-05-18 |
Semi-insulating crystal, N-type semiconductor crystal and P-type semiconductor crystal Grant 10,978,294 - Fujikura April 13, 2 | 2021-04-13 |
Nitride semiconductor substrate, semiconductor laminate, laminated structure, method for manufacturing nitride semiconductor substrate and method for manufacturing semiconductor laminate Grant 10,978,296 - Yoshida , et al. April 13, 2 | 2021-04-13 |
GaN laminate and method of manufacturing the same Grant 10,903,074 - Fujikura January 26, 2 | 2021-01-26 |
Aluminum Nitride Laminate Member And Light-emitting Device App 20200259046 - A1 | 2020-08-13 |
Nitride Semiconductor Laminate, Semiconductor Device, Method Of Manufacturing Nitride Semiconductor Laminate, Method Of Manufact App 20200219983 - FUJIKURA; Hajime | 2020-07-09 |
GaN laminate and method of manufacturing the same Grant 10,707,309 - Fujikura | 2020-07-07 |
Nitride Semiconductor Template, Method For Manufacturing Nitride Semiconductor Template, And Method For Manufacturing Nitride Se App 20200127163 - FUJIKURA; Hajime ;   et al. | 2020-04-23 |
Nitride Crystal App 20200031668 - FUJIKURA; Hajime ;   et al. | 2020-01-30 |
Nitride Crystal App 20200032417 - FUJIKURA; Hajime ;   et al. | 2020-01-30 |
Nitride semiconductor template, manufacturing method thereof, and epitaxial wafer Grant 10,472,715 - Nemoto , et al. Nov | 2019-11-12 |
Semi-insulating Crystal, N-type Semiconductor Crystal And P-type Semiconductor Crystal App 20190326111 - FUJIKURA; Hajime | 2019-10-24 |
Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template Grant 10,418,241 - Konno , et al. Sept | 2019-09-17 |
GaN LAMINATE AND METHOD OF MANUFACTURING THE SAME App 20190273138 - FUJIKURA; Hajime | 2019-09-05 |
GaN LAMINATE AND METHOD OF MANUFACTURING THE SAME App 20190272990 - FUJIKURA; Hajime | 2019-09-05 |
Nitride Semiconductor Substrate, Semiconductor Laminate, Laminated Structure, Method For Manufacturing Nitride Semiconductor Sub App 20190198312 - YOSHIDA; Takehiro ;   et al. | 2019-06-27 |
Substrate processing apparatus and substrate processing method Grant 10,294,566 - Fujikura , et al. | 2019-05-21 |
Wafer inspection apparatus and wafer inspection method Grant 10,209,203 - Fujikura Feb | 2019-02-19 |
Nitride semiconductor template and light emitting element Grant 10,084,113 - Konno , et al. September 25, 2 | 2018-09-25 |
Semiconductor manufacturing device and semiconductor manufacturing method Grant 10,066,292 - Fujikura September 4, 2 | 2018-09-04 |
Method for manufacturing nitride semiconductor template Grant 10,062,807 - Fujikura August 28, 2 | 2018-08-28 |
Nitride semiconductor crystal producing method including growing nitride semiconductor crystal over seed crystal substrate Grant 10,060,047 - Fujikura , et al. August 28, 2 | 2018-08-28 |
Method For Manufacturing Nitride Semiconductor Template, Nitride Semiconductor Template And Nitride Semiconductor Device App 20180158681 - FUJIKURA; Hajime ;   et al. | 2018-06-07 |
Method For Manufacturing Nitride Semiconductor Template, Nitride Semiconductor Template And Nitride Semiconductor Device App 20180158680 - FUJIKURA; Hajime ;   et al. | 2018-06-07 |
Substrate Processing Apparatus And Substrate Processing Method App 20180073139 - FUJIKURA; Hajime ;   et al. | 2018-03-15 |
Nitride Semiconductor Template, Manufacturing Method Thereof, And Epitaxial Wafer App 20180010246 - NEMOTO; Shusei ;   et al. | 2018-01-11 |
Semiconductor manufacturing device and semiconductor manufacturing method Grant 9,856,562 - Fujikura January 2, 2 | 2018-01-02 |
Method for manufacturing nitride semiconductor template Grant 9,812,607 - Fujikura November 7, 2 | 2017-11-07 |
Semiconductor Manufacturing Device And Semiconductor Manufacturing Method App 20170283944 - FUJIKURA; Hajime | 2017-10-05 |
Nitride semiconductor free-standing substrate, method of manufacturing the same and nitride semiconductor device Grant 9,779,934 - Fujikura October 3, 2 | 2017-10-03 |
Method For Manufacturing Nitride Semiconductor Template App 20170263807 - FUJIKURA; Hajime | 2017-09-14 |
Substrate Processing Apparatus And Substrate Processing Method App 20170260630 - FUJIKURA; Hajime ;   et al. | 2017-09-14 |
Semiconductor Manufacturing Device And Semiconductor Manufacturing Method App 20170260628 - FUJIKURA; Hajime | 2017-09-14 |
Method For Manufacturing Nitride Semiconductor Template App 20170256677 - FUJIKURA; Hajime | 2017-09-07 |
Nitride Semiconductor Wafer And Manufacturing Method Thereof App 20170141259 - FUJIKURA; Hajime | 2017-05-18 |
Nitride Semiconductor Template And Light Emitting Element App 20170141269 - Konno; Taichiro ;   et al. | 2017-05-18 |
Wafer Inspection Apparatus And Wafer Inspection Method App 20170131219 - FUJIKURA; Hajime | 2017-05-11 |
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method App 20170130336 - FUJIKURA; Hajime ;   et al. | 2017-05-11 |
Nitride semiconductor epitaxial substrate and nitride semiconductor device Grant 9,397,232 - Fujikura , et al. July 19, 2 | 2016-07-19 |
Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and method for fabricating a nitride semiconductor template Grant 9,359,692 - Konno , et al. June 7, 2 | 2016-06-07 |
Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template Grant 9,236,252 - Konno , et al. January 12, 2 | 2016-01-12 |
Metal Chloride Gas Generator, Hydride Vapor Phase Epitaxy Growth Apparatus, And Nitride Semiconductor Template App 20150357416 - KONNO; Taichiroo ;   et al. | 2015-12-10 |
Method for manufacturing a nitride semiconductor substrate Grant 9,175,417 - Fujikura November 3, 2 | 2015-11-03 |
Method of manufacturing a nitride semiconductor epitaxial substrate Grant 9,105,755 - Fujikura , et al. August 11, 2 | 2015-08-11 |
Nitride Semiconductor Epitaxial Substrate And Nitride Semiconductor Device App 20150214308 - FUJIKURA; Hajime ;   et al. | 2015-07-30 |
Apparatus For Producing Metal Chloride Gas And Method For Producing Metal Chloride Gas, And Apparatus For Hydride Vapor Phase Epitaxy, Nitride Semiconductor Wafer, Nitride Semiconductor Device, Wafer For Nitride Semiconductor Light Emitting Diode, Method For Manufacturing Nitride Semiconductor Frees App 20150140791 - FUJIKURA; Hajime | 2015-05-21 |
Nitride semiconductor template and light-emitting diode Grant 8,829,489 - Konno , et al. September 9, 2 | 2014-09-09 |
Nitride semiconductor crystal producing method, nitride semiconductor epitaxial wafer, and nitride semiconductor freestanding substrate Grant 8,786,052 - Fujikura , et al. July 22, 2 | 2014-07-22 |
Nitride Semiconductor Crystal Producing Method App 20140196660 - FUJIKURA; Hajime ;   et al. | 2014-07-17 |
Method for manufacturing nitride semiconductor substrate Grant 8,664,123 - Fujikura March 4, 2 | 2014-03-04 |
Nitride semiconductor template and light-emitting diode including oxygen-doped layer and silicon-doped layer formed on the oxygen-doped layer Grant 8,664,663 - Konno , et al. March 4, 2 | 2014-03-04 |
Method Of Manufacturing Gallium Nitride Substrate App 20130260538 - Fujikura; Hajime | 2013-10-03 |
Metal Chloride Gas Generator, Hydride Vapor Phase Epitaxy Growth Apparatus, And Method For Fabricating A Nitride Semiconductor Template App 20130247817 - KONNO; Taichiroo ;   et al. | 2013-09-26 |
Nitride Semiconductor Template And Light-emitting Diode App 20130153858 - Konno; Taichiroo ;   et al. | 2013-06-20 |
Nitride Semiconductor Growth Substrate And Manufacturing Method Of The Same, Nitride Semiconductor Epitaxial Substrate And Nitride Semiconductor Element App 20130092950 - FUJIKURA; Hajime ;   et al. | 2013-04-18 |
Method For Manufacturing Nitride Semiconductor Substrate App 20130072005 - FUJIKURA; Hajime | 2013-03-21 |
Nitride Semiconductor Crystal Producing Method, Nitride Semiconductor Epitaxial Wafer, And Nitride Semiconductor Freestanding Substrate App 20130069075 - Fujikura; Hajime ;   et al. | 2013-03-21 |
Nitride Semiconductor Template And Light-emitting Diode App 20130048942 - KONNO; Taichiroo ;   et al. | 2013-02-28 |
Metal Chloride Gas Generator, Hydride Vapor Phase Epitaxy Growth Apparatus, And Nitride Semiconductor Template App 20130043442 - KONNO; Taichiroo ;   et al. | 2013-02-21 |
Method For Manufacturing Nitride Semiconductor Substrate App 20130023128 - FUJIKURA; Hajime | 2013-01-24 |
Nitride Semiconductor Epitaxial Substrate and Nitride Semiconductor Device App 20130001644 - FUJIKURA; Hajime ;   et al. | 2013-01-03 |
Apparatus For Producing Metal Chloride Gas And Method For Producing Metal Chloride Gas, And Apparatus For Hydride Vapor Phase Epitaxy, Nitride Semiconductor Wafer, Nitride Semiconductor Device, Wafer For Nitride Semiconductor Light Emitting Diode, Method For Manufacturing Nitride Semiconductor Frees App 20120305935 - FUJIKURA; Hajime | 2012-12-06 |
Group III nitride semiconductor free-standing substrate and method of manufacturing the same, group III nitride semiconductor device and method of manufacturing the same Grant 8,310,029 - Fujikura , et al. November 13, 2 | 2012-11-13 |
Nitride semiconductor crystal, manufacturing method of the nitride semiconductor freestanding substrate and nitride semiconductor device Grant 8,237,245 - Fujikura August 7, 2 | 2012-08-07 |
Zinc-blende nitride semiconductor free-standing substrate, method for fabricating same, and light-emitting device employing same Grant 8,030,682 - Fujikura October 4, 2 | 2011-10-04 |
Nitride semiconductor free-standing substrate and device using the same Grant 8,026,523 - Fujikura September 27, 2 | 2011-09-27 |
Nitride Semiconductor Crystal, Manufacturing Method Of The Nitride Semiconductor Freestanding Substrate And Nitride Semiconductor Device App 20110198610 - FUJIKURA; Hajime | 2011-08-18 |
Nitride semiconductor free-standing substrate, method of manufacturing the same and nitride semiconductor device App 20110108944 - Fujikura; Hajime | 2011-05-12 |
Method for growing nitride semiconductor Grant 7,932,107 - Fujikura April 26, 2 | 2011-04-26 |
Group III nitride semiconductor free-standing substrate and method of manufacturing the same, group III nitride semiconductor device and method of manufacturing the same App 20110006397 - Fujikura; Hajime ;   et al. | 2011-01-13 |
Nitride Semiconductor Freestanding Substrate And Manufacturing Method Of The Same, And Laser Diode App 20100272141 - FUJIKURA; Hajime | 2010-10-28 |
Nitride semiconductor light emitting element Grant 7,663,138 - Fujikura February 16, 2 | 2010-02-16 |
Light emitting diode having surface containing flat portion and plurality of bores Grant 7,504,667 - Fujikura , et al. March 17, 2 | 2009-03-17 |
Zinc-blende nitride semiconductor free-standing substrate, method for fabricating same, and light-emitting device employing same App 20090050928 - Fujikura; Hajime | 2009-02-26 |
Method for growing nitride semiconductor App 20080182426 - Fujikura; Hajime | 2008-07-31 |
Nitride semiconductor light emitting element App 20070262293 - Fujikura; Hajime | 2007-11-15 |
Method for producing nitride semiconductor crystal, and nitride semiconductor wafer and nitride semiconductor device Grant 7,294,200 - Fujikura , et al. November 13, 2 | 2007-11-13 |
Light emitting diode and manufacturing method thereof App 20060273336 - Fujikura; Hajime ;   et al. | 2006-12-07 |
Method for producing nitride semiconductor, semiconductor wafer and semiconductor device Grant 6,989,287 - Fujikura , et al. January 24, 2 | 2006-01-24 |
Method for producing nitride semiconductor, semiconductor wafer and semiconductor device App 20050042789 - Fujikura, Hajime ;   et al. | 2005-02-24 |
Method for producing nitride semiconductor crystal, and nitride semiconductor wafer and nitride semiconductor device App 20030183160 - Fujikura, Hajime ;   et al. | 2003-10-02 |