| Patent | Date |
|---|
Flow Rate Control Device, Flow Rate Control Method, Control Program For Flow Rate Control Device
App 20220307882 - NOZAWA; Takahiro ; et al. | 2022-09-29 |
Concentration Measurement Device
App 20220299432 - NAGASE; Masaaki ; et al. | 2022-09-22 |
Valve Device, Fluid Control Device, And Manufacturing Method Of Valve Device
App 20220290764 - HARADA; AKIHIRO ; et al. | 2022-09-15 |
Density Measurement Device
App 20220283081 - NAGASE; Masaaki ; et al. | 2022-09-08 |
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
Grant 11,427,911 - Watanabe , et al. August 30, 2 | 2022-08-30 |
Diaphragm Valve
App 20220268365 - HIRATA; Kaoru ; et al. | 2022-08-25 |
Flow rate regulating valve and fluid control apparatus using the same
Grant 11,421,800 - Kobayashi , et al. August 23, 2 | 2022-08-23 |
Pressure-type flow control device and flow control method
Grant 11,416,011 - Sugita , et al. August 16, 2 | 2022-08-16 |
Fluid heater, fluid control apparatus, and production method for fluid heater
Grant 11,402,124 - Okabe , et al. August 2, 2 | 2022-08-02 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method
Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
Grant 11,402,029 - Sato , et al. August 2, 2 | 2022-08-02 |
Fluid control device and semiconductor manufacturing apparatus
Grant 11,397,443 - Aikawa , et al. July 26, 2 | 2022-07-26 |
Fluid control device
Grant 11,390,951 - Hidaka , et al. July 19, 2 | 2022-07-19 |
Self-diagnosis method for flow rate control device
Grant 11,391,608 - Sugita , et al. July 19, 2 | 2022-07-19 |
Concentration measurement device
Grant 11,391,668 - Nagase , et al. July 19, 2 | 2022-07-19 |
Flow rate control system, control method of flowrate control system, and control program of flowrate control system
Grant 11,392,148 - Nguyen , et al. July 19, 2 | 2022-07-19 |
Flow-path Forming Block And Fluid Control Device Provided With Flow-path Forming Block
App 20220213972 - WATANABE; KAZUNARI ; et al. | 2022-07-07 |
Valve Device
App 20220213965 - NAKAMURA; Nobuo ; et al. | 2022-07-07 |
System, method, and computer program for analyzing operation of fluid control device
Grant 11,371,627 - Suzuki , et al. June 28, 2 | 2022-06-28 |
Valve Device, Flow Rate Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus Using The Valve Device
App 20220196163 - TSUCHIGUCHI; Daihi ; et al. | 2022-06-23 |
Flow Rate Control Device
App 20220197316 - HIRATA; Kaoru ; et al. | 2022-06-23 |
Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device
Grant 11,365,830 - Watanabe , et al. June 21, 2 | 2022-06-21 |
Flow Path Assembly, Valve Device, Fluid Control Device, Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method Using Said Flow Path Assembly
App 20220186845 - INADA; Toshiyuki ; et al. | 2022-06-16 |
Diaphragm And Diaphragm Valve
App 20220186844 - Obara; Shunji ; et al. | 2022-06-16 |
Valve device
Grant 11,359,730 - Nakamura , et al. June 14, 2 | 2022-06-14 |
Concentration Measurement Device
App 20220170849 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Concentration Measurement Device
App 20220172969 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Fluid supply system, fluid control device, and semiconductor manufacturing device
Grant 11,346,505 - Kuriki , et al. May 31, 2 | 2022-05-31 |
Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
Grant 11,346,457 - Dohi , et al. May 31, 2 | 2022-05-31 |
Manual valve device and fluid control device
Grant 11,346,461 - Watanabe , et al. May 31, 2 | 2022-05-31 |
Attachment Structure For Temperature Sensor
App 20220163399 - Doya; Hidehiro ; et al. | 2022-05-26 |
Abnormality diagnosis method of fluid supply line
Grant 11,340,636 - Tanno , et al. May 24, 2 | 2022-05-24 |
Valve device and fluid control device
Grant 11,339,881 - Watanabe , et al. May 24, 2 | 2022-05-24 |
Valve
Grant 11,326,742 - Yanagida , et al. May 10, 2 | 2022-05-10 |
Flow rate measuring method and flow rate measuring device
Grant 11,326,921 - Nagase , et al. May 10, 2 | 2022-05-10 |
Valve device
Grant 11,320,056 - Watanabe , et al. May 3, 2 | 2022-05-03 |
Fluid supply device and liquid discharge method of this device
Grant 11,322,372 - Yoshida , et al. May 3, 2 | 2022-05-03 |
Flow rate control device and abnormality detection method using flow rate control device
Grant 11,313,756 - Nagase , et al. April 26, 2 | 2022-04-26 |
Fluid Control Apparatus
App 20220120355 - KURIKI; Haruhiko ; et al. | 2022-04-21 |
Valve device
Grant 11,306,830 - Kondo , et al. April 19, 2 | 2022-04-19 |
Valve Device, Flow Control Method, Fluid Control Device, Semiconductor Manufacturing Method, And Semiconductor Manufacturing Apparatus
App 20220082176 - TANNO; Ryutaro ; et al. | 2022-03-17 |
Concentration Measurement Device
App 20220074851 - NAGASE; Masaaki ; et al. | 2022-03-10 |
Flow rate control method and flow rate control device
Grant 11,269,362 - Hirata , et al. March 8, 2 | 2022-03-08 |
Actuator and valve device
Grant 11,261,990 - Miura , et al. March 1, 2 | 2022-03-01 |
Diaphragm Valve And Flow Rate Control Device
App 20220057002 - SHIGYOU; Kohei ; et al. | 2022-02-24 |
Gasket for fluid coupling, and fluid coupling
Grant 11,255,468 - Ishibashi , et al. February 22, 2 | 2022-02-22 |
Valve device and fluid control device
Grant 11,255,458 - Matsuda , et al. February 22, 2 | 2022-02-22 |
Diaphragm, Valve Device, And Method For Manufacturing Diaphragm
App 20220049775 - KONDO; Kenta ; et al. | 2022-02-17 |
Valve device
Grant 11,242,934 - Kondo , et al. February 8, 2 | 2022-02-08 |
Valve and fluid supply line
Grant 11,243,549 - Tanno , et al. February 8, 2 | 2022-02-08 |
Concentration Measurement Device
App 20220034794 - NAGASE; Masaaki ; et al. | 2022-02-03 |
Fluid Control Device, Joint Block And Manufacturing Method For Fluid Control Device
App 20220025986 - HARADA; Akihiro ; et al. | 2022-01-27 |
Valve device
Grant 11,231,026 - Watanabe , et al. January 25, 2 | 2022-01-25 |
Actuator, valve device, and fluid control apparatus
Grant 11,231,121 - Hirose , et al. January 25, 2 | 2022-01-25 |
Work Management Apparatus, Work Management Method, And Work Management System
App 20220019187 - KAWAUCHI; Yuto ; et al. | 2022-01-20 |
Ball valve
Grant 11,226,043 - Mouri , et al. January 18, 2 | 2022-01-18 |
Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller
Grant 11,226,257 - Harada , et al. January 18, 2 | 2022-01-18 |
Fluid control device
Grant 11,226,641 - Hirata , et al. January 18, 2 | 2022-01-18 |
Fluid supply system
Grant 11,226,049 - Tagashira , et al. January 18, 2 | 2022-01-18 |
Concentration Measurement Method
App 20220003662 - NAGASE; Masaaki ; et al. | 2022-01-06 |
Fluid sealing device and pressure detector calibration device
Grant 11,215,374 - Takimoto , et al. January 4, 2 | 2022-01-04 |
Flow rate control method and flow rate control device
Grant 11,216,016 - Hirata , et al. January 4, 2 | 2022-01-04 |
Bolt Holding Member, Combined Body Of Bolt And Bolt Holding Member, And Mounting Method
App 20210404505 - SHINOHARA; Tsutomu ; et al. | 2021-12-30 |
Fluid Control Device And Manufacturing Method For The Fluid Control Device
App 20210396326 - AIKAWA; Kenji ; et al. | 2021-12-23 |
Concentration Measurement Device
App 20210396657 - NAGASE; Masaaki ; et al. | 2021-12-23 |
Valve Device And Gas Supply System
App 20210388914 - AIKAWA; Kenji ; et al. | 2021-12-16 |
Valve Device And Gas Supply Systems
App 20210388919 - MATSUDA; Takahiro ; et al. | 2021-12-16 |
Fluid Supply System, Fluid Control Device, And Semiconductor Manufacturing Device
App 20210388949 - Kuriki; Haruhiko ; et al. | 2021-12-16 |
Valve Device
App 20210372532 - TANNO; Ryutaro ; et al. | 2021-12-02 |
Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus
Grant 11,187,346 - Takimoto , et al. November 30, 2 | 2021-11-30 |
Pressure Sensor
App 20210356346 - HIDAKA; Atsushi ; et al. | 2021-11-18 |
Actuator and valve device using the same
Grant 11,174,949 - Nakata , et al. November 16, 2 | 2021-11-16 |
Flow path assembly and valve device
Grant 11,162,597 - Watanabe , et al. November 2, 2 | 2021-11-02 |
Fluid control device
Grant 11,162,606 - Suzuki , et al. November 2, 2 | 2021-11-02 |
Valve Device, Fluid Control System, Fluid Control Method, Semiconductor Manufacturing System, And Semiconductor Manufacturing Method
App 20210332900 - Sato; Tatsuhiko ; et al. | 2021-10-28 |
Fluid control system
Grant 11,156,305 - Aikawa , et al. October 26, 2 | 2021-10-26 |
Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used
Grant 11,149,871 - Dohi , et al. October 19, 2 | 2021-10-19 |
Fluid Supply System
App 20210317924 - TAGASHIRA; Naoto ; et al. | 2021-10-14 |
Flow Rate Control System And Flow Rate Measurement Method
App 20210310844 - NAGASE; Masaaki ; et al. | 2021-10-07 |
Fluid control device, method for controlling fluid control device, and fluid control system
Grant 11,137,779 - Hirata , et al. October 5, 2 | 2021-10-05 |
Fluid Control Device, Abnormality Detection Method of Fluid Control Device, Abnormality Detection Device, and Abnormality Detection System
App 20210302264 - Tanno; Ryutaro ; et al. | 2021-09-30 |
Flow Rate Control System, Control Method of FlowRate Control System, and Control Program of FlowRate Control System
App 20210303007 - Nguyen; Van Tu ; et al. | 2021-09-30 |
Fluid Control Apparatus, Fluid Control Device, and Operation Analysis System
App 20210303008 - Tanno; Ryutaro ; et al. | 2021-09-30 |
Electromagnetic Valve, Valve Device, Fluid Control Device, And Electromagnetic Valve Replacement Method
App 20210293345 - TANNO; Ryutaro ; et al. | 2021-09-23 |
Inverter circuit and X-ray radiation device
Grant 11,128,213 - Sakabe , et al. September 21, 2 | 2021-09-21 |
Valve Device
App 20210285552 - KONDO; Kenta ; et al. | 2021-09-16 |
Valve device and fluid control system
Grant 11,118,700 - Watanabe , et al. September 14, 2 | 2021-09-14 |
Information Processing System
App 20210278925 - MACHIDA; Hidekazu ; et al. | 2021-09-09 |
Fluid Drive Valve
App 20210278012 - Kitano; Taichi ; et al. | 2021-09-09 |
Fingerprint sensor and display device
Grant 11,113,503 - Komatsu , et al. September 7, 2 | 2021-09-07 |
Valve Device, Fluid Control Device, Fluid Control Method, Semiconductor Manufacturing Apparatus, And Semiconductor Manufacturing Method
App 20210262577 - SATO; Tatsuhiko ; et al. | 2021-08-26 |
Diaphragm Valve And Monitoring Method Thereof
App 20210262576 - SUZUKI; Yuya ; et al. | 2021-08-26 |
Valve device, flow control method using the same, and semiconductor manufacturing method
Grant 11,098,819 - Yoshida , et al. August 24, 2 | 2021-08-24 |
Fluid control system and product manufacturing method using fluid control system
Grant 11,091,837 - Doya August 17, 2 | 2021-08-17 |
Piezoelectric Driven Valve, Pressure-type Flow Rate Control Device, And Vaporization Supply Device
App 20210239230 - DOHI; Ryousuke ; et al. | 2021-08-05 |
Flow Rate Control Method And Flow Rate Control Device
App 20210240208 - HIRATA; Kaoru ; et al. | 2021-08-05 |
Valve Device, Method For Replacing Valve Body Unit Of Valve Device, And Valve Device Assembly Method
App 20210239222 - SATO; Hidenobu ; et al. | 2021-08-05 |
Flow rate control device
Grant 11,079,774 - Sugita , et al. August 3, 2 | 2021-08-03 |
Gas supply system
Grant 11,073,215 - Miura , et al. July 27, 2 | 2021-07-27 |
Actuator, valve device, and fluid control apparatus
Grant 11,067,195 - Nakazawa , et al. July 20, 2 | 2021-07-20 |
Fluid Control Device
App 20210215269 - Tanno; Ryutaro ; et al. | 2021-07-15 |
Valve Device
App 20210207722 - NAKAMURA; Nobuo ; et al. | 2021-07-08 |
Piezoelectric-element-driven valve and flow rate control device
Grant 11,054,052 - Dohi , et al. July 6, 2 | 2021-07-06 |
Valve Device
App 20210199205 - WATANABE; Kazunari ; et al. | 2021-07-01 |
Actuator, Valve Device, And Fluid Control Apparatus
App 20210199210 - HIROSE; Takashi ; et al. | 2021-07-01 |
Actuator, valve device, and fluid supply system
Grant 11,047,503 - Miura , et al. June 29, 2 | 2021-06-29 |
Seal structure, sealing method, and coupling equipped with said seal structure
Grant 11,041,566 - Hiramatsu , et al. June 22, 2 | 2021-06-22 |
Controller
Grant 11,035,493 - Ishibashi , et al. June 15, 2 | 2021-06-15 |
Flow rate control apparatus and flow rate control method for the flow rate control apparatus
Grant 11,035,494 - Funakoshi , et al. June 15, 2 | 2021-06-15 |
Valve device, flow control method using the same, and semiconductor manufacturing method
Grant 11,022,224 - Yoshida , et al. June 1, 2 | 2021-06-01 |
Pipe connection structure, pipe connection unit, and connection method of pipe
Grant 11,022,242 - Nakata , et al. June 1, 2 | 2021-06-01 |
Flow Rate Control Method And Flow Rate Control Device
App 20210157341 - HIRATA; Kaoru ; et al. | 2021-05-27 |
Flow Rate Control Device And Flow Rate Control Method
App 20210141399 - SUGITA; Katsuyuki ; et al. | 2021-05-13 |
Fluid Control Device And Semiconductor Manufacturing Apparatus
App 20210132638 - AIKAWA; Kenji ; et al. | 2021-05-06 |
Valve Device And Fluid Control Device
App 20210131583 - MATSUDA; Takahiro ; et al. | 2021-05-06 |
Management system, method, and computer program for semiconductor fabrication apparatus
Grant 10,998,211 - Tanno , et al. May 4, 2 | 2021-05-04 |
Fluid Control Device
App 20210123544 - Tanno; Ryutaro ; et al. | 2021-04-29 |
Conversion Joint, Integrated Fluid Supply Device Having Said Conversion Joint, and Method for Mounting a Fluid Part
App 20210125842 - Iwasawa; Ryosuke ; et al. | 2021-04-29 |
Fluid Supply Device And Fluid Supply Method
App 20210125839 - YOSHIDA; Toshihide ; et al. | 2021-04-29 |
Fluid Supply Device And Fluid Supply Method
App 20210125840 - YOSHIDA; Toshihide ; et al. | 2021-04-29 |
Fluid Control Device
App 20210116047 - Suzuki; Yuya ; et al. | 2021-04-22 |
Concentration measurement device
Grant 10,976,240 - Deguchi , et al. April 13, 2 | 2021-04-13 |
Fluid Control Device and Sensor Holding Member
App 20210102633 - Fujine; Kazuhiro ; et al. | 2021-04-08 |
Valve Device
App 20210102636 - SAKAMOTO; Toshiyuki ; et al. | 2021-04-08 |
Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
Grant 10,969,259 - Sawada , et al. April 6, 2 | 2021-04-06 |
Concentration detection method and pressure-type flow rate control device
Grant 10,962,513 - Nagase , et al. March 30, 2 | 2021-03-30 |
Valve
App 20210088186 - Yanagida; Yasumasa ; et al. | 2021-03-25 |
Concentration measuring device
Grant 10,928,303 - Deguchi , et al. February 23, 2 | 2021-02-23 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Ball Valve
App 20210033202 - Mouri; Tomohiro ; et al. | 2021-02-04 |
Diaphragm Valve
App 20210018103 - Yakushijin; Tadayuki ; et al. | 2021-01-21 |
Fluid control system, base block used for same, and method for manufacturing fluid control system
Grant 10,895,329 - Doya , et al. January 19, 2 | 2021-01-19 |
Dual sensor type mass flow controller
Grant 10,895,482 - Murata , et al. January 19, 2 | 2021-01-19 |
Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
Grant 10,895,484 - Sawada , et al. January 19, 2 | 2021-01-19 |
Pressure-based flow rate control device and malfunction detection method therefor
Grant 10,883,866 - Sugita , et al. January 5, 2 | 2021-01-05 |
Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same
Grant 10,884,435 - Nagase , et al. January 5, 2 | 2021-01-05 |
Flow rate signal correction method and flow rate control device employing same
Grant 10,884,436 - Sugita , et al. January 5, 2 | 2021-01-05 |
Fluid Control Apparatus
App 20200413494 - FUNABIKI; Teruyuki ; et al. | 2020-12-31 |
Fingerprint Sensor And Display Device
App 20200401780 - KOMATSU; Hiroshi ; et al. | 2020-12-24 |
Valve, Abnormality Diagnosis Method of Valve, and Computer Program
App 20200393060 - Tanno; Ryutaro ; et al. | 2020-12-17 |
Valve Device
App 20200393051 - KONDO; Kenta ; et al. | 2020-12-17 |
Valve Device
App 20200386342 - YOSHIDA; Toshihide ; et al. | 2020-12-10 |
Valve Device And Fluid Control Device
App 20200370664 - WATANABE; Kazunari ; et al. | 2020-11-26 |
Valve Device, Its Control Device, Control Methods Using The Same, Fluid Control Device And Semiconductor Manufacturing Apparatus
App 20200370671 - TAKIMOTO; Masahiko ; et al. | 2020-11-26 |
Abnormality Diagnosis Method of Fluid Supply Line
App 20200363826 - Tanno; Ryutaro ; et al. | 2020-11-19 |
Pressure-type flow rate control device
Grant 10,838,435 - Hirata , et al. November 17, 2 | 2020-11-17 |
Valve Device, Fluid Control Device And Semiconductor Manufacturing Apparatus Using The Valve Device
App 20200354835 - WATANABE; Kazunari ; et al. | 2020-11-12 |
Fluid control system
Grant 10,830,367 - Aikawa , et al. November 10, 2 | 2020-11-10 |
Flow Rate Control Device
App 20200348704 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Self-diagnosis Method For Flow Rate Control Device
App 20200348158 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow Path Assembly And Valve Device
App 20200340591 - WATANABE; Kazunari ; et al. | 2020-10-29 |
Valve Device
App 20200325887 - WATANABE; Kazunari ; et al. | 2020-10-15 |
Image Acquiring Apparatus And Display Apparatus Equipped Therewith
App 20200327298 - KOMATSU; Hiroshi ; et al. | 2020-10-15 |
Diaphragm Valve
App 20200309274 - Obara; Shunji ; et al. | 2020-10-01 |
Tool, Task Management Device, Task Management Method, And Task Management System
App 20200301401 - HORIKAWA; Kazutoshi ; et al. | 2020-09-24 |
Valve Device And Fluid Control System
App 20200292093 - WATANABE; Kazunari ; et al. | 2020-09-17 |
Fluid Supply Line And Motion Analysis System
App 20200285256 - Tanno; Ryutaro ; et al. | 2020-09-10 |
Joint Block And Fluid Control System Using Same
App 20200284367 - KUDO; Shotaro ; et al. | 2020-09-10 |
Flow dividing system
Grant 10,768,641 - Nakamura , et al. Sep | 2020-09-08 |
Manual Valve Device And Fluid Control Device
App 20200278046 - WATANABE; Kazunari ; et al. | 2020-09-03 |
Valve Apparatus, Flow Rate Adjusting Method, Fluid Control Apparatus, Flow Rate Control Method, Semiconductor Manufacturing Appa
App 20200278033 - KONDO; Kenta ; et al. | 2020-09-03 |
Valve Device, Fluid Control Device And Semiconductor Manufacturing Apparatus Using The Valve Device
App 20200278049 - WATANABE; Kazunari ; et al. | 2020-09-03 |
Valve Device, Adjustment Information Generating Method, Flow Rate Adjusting Method, Fluid Control System, Flow Rate Control Meth
App 20200278234 - KONDO; Kenta ; et al. | 2020-09-03 |
Shutoff-opening device
Grant 10,753,497 - Ishibashi , et al. A | 2020-08-25 |
Pipe joint, fluid control device, fluid control unit, semiconductor fabrication apparatus and method of forming pipe joint
Grant 10,737,345 - Watanabe , et al. A | 2020-08-11 |
Switching valve
Grant 10,738,898 - Ishibashi , et al. A | 2020-08-11 |
Actuator, Valve Device, And Fluid Control Apparatus
App 20200248833 - Kind Code | 2020-08-06 |
Joint Block And Manufacturing Method Thereof
App 20200248310 - Kind Code | 2020-08-06 |
Valve element and high-temperature-oriented valve
Grant 10,731,763 - Ishibashi , et al. | 2020-08-04 |
Manual Tool, And Bit And Torque Sensor Used Therefor
App 20200238485 - HARADA; Akihiro ; et al. | 2020-07-30 |
Flow Rate Control Device And Abnormality Detection Method Using Flow Rate Control Device
App 20200232873 - NAGASE; Masaaki ; et al. | 2020-07-23 |
Valve Device, Flow Control Method Using The Same, And Semiconductor Manufacturing Method
App 20200224776 - YOSHIDA; Toshihide ; et al. | 2020-07-16 |
Valve And Fluid Supply Line
App 20200225686 - Tanno; Ryutaro ; et al. | 2020-07-16 |
Flow dividing valve
Grant 10,711,902 - Tanikawa , et al. | 2020-07-14 |
Dual Sensor Type Mass Flow Controller
App 20200209033 - MURATA; Takuro ; et al. | 2020-07-02 |
Power unit and medical electric device
Grant 10,701,788 - Sakabe , et al. | 2020-06-30 |
Fluid Control Device
App 20200199753 - HIDAKA; Atsushi ; et al. | 2020-06-25 |
Pressure control device and pressure control system
Grant 10,684,632 - Nozawa , et al. | 2020-06-16 |
Information Processor, Manufacturing Assistance System, And Valve Device Assembly Method
App 20200183368 - SATO; Tatsuhiko ; et al. | 2020-06-11 |
Management System, Method, and Computer Program for Semiconductor Fabrication Apparatus
App 20200185242 - Tanno; Ryutaro ; et al. | 2020-06-11 |
Wrench
Grant D885,859 - Ishibashi , et al. | 2020-06-02 |
Fluid Supply Device And Liquid Discharge Method Of This Device
App 20200161147 - YOSHIDA; Toshihide ; et al. | 2020-05-21 |
Fluid Control System and Flow Rate Measurement Method
App 20200159257 - YAMASHITA; Satoru ; et al. | 2020-05-21 |
Valve Device
App 20200149639 - AIKAWA; Kenji ; et al. | 2020-05-14 |
Fluid Control Device
App 20200149162 - HIDAKA; Atsushi ; et al. | 2020-05-14 |
Actuator And Valve Device
App 20200149653 - MIURA; Takeru ; et al. | 2020-05-14 |
Vaporization supply apparatus
Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Valve with built-in orifice, and pressure-type flow rate control device
Grant 10,648,572 - Sawada , et al. | 2020-05-12 |
Actuator, Valve Device, And Fluid Supply System
App 20200141428 - MIURA; Takeru ; et al. | 2020-05-07 |
Flow rate control device
Grant 10,641,407 - Hirai , et al. | 2020-05-05 |
Flow Rate Control Apparatus And Flow Rate Control Method For The Flow Rate Control Apparatus
App 20200132216 - FUNAKOSHI; Takashi ; et al. | 2020-04-30 |
Flow Rate Regulating Valve And Fluid Control Apparatus Using The Same
App 20200124064 - Kobayashi; Keigo ; et al. | 2020-04-23 |
Liquid level indicator and liquid raw material vaporization feeder
Grant 10,604,840 - Hidaka , et al. | 2020-03-31 |
Mass Flow Sensor, Mass Flow Meter Including the Mass Flow Sensor, and Mass Flow Controller Including the Mass Flow Sensor
App 20200096373 - Shimizu; Tsunehisa | 2020-03-26 |
Fluid control valve unit
Grant D879,248 - Shigyou , et al. | 2020-03-24 |
Gas Supply System
App 20200088307 - MIURA; Takeru ; et al. | 2020-03-19 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method
App 20200088561 - HIDAKA; Atsushi ; et al. | 2020-03-19 |
System, Method, and Computer Program for Analyzing Operation of Fluid Control Device
App 20200080663 - Suzuki; Yuya ; et al. | 2020-03-12 |
Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
Grant 10,573,801 - Shigyou , et al. Feb | 2020-02-25 |
Sensor-equipped Joint And Monitoring System Using The Same
App 20200050221 - Hiramatsu; Koji ; et al. | 2020-02-13 |
Valve Device
App 20200041024 - ITO; Kazushi ; et al. | 2020-02-06 |
Actuator And Valve Device Using The Same
App 20200041007 - NAKATA; Tomohiro ; et al. | 2020-02-06 |
Pressure-type Flow Control Device And Flow Control Method
App 20200033895 - SUGITA; Katsuyuki ; et al. | 2020-01-30 |
Piezoelectric-element-driven Valve And Flow Rate Control Device
App 20200018413 - DOHI; Ryousuke ; et al. | 2020-01-16 |
Concentration Detection Method And Pressure-type Flow Rate Control Device
App 20200018736 - NAGASE; Masaaki ; et al. | 2020-01-16 |
Fluid Heater, Fluid Control Apparatus, And Production Method For Fluid Heater
App 20200018519 - OKABE; Tsuneyuki ; et al. | 2020-01-16 |
Controller
App 20200018331 - Ishibashi; Keisuke ; et al. | 2020-01-16 |
Gas divided flow supplying apparatus for semiconductor manufacturing equipment
Grant 10534376 - | 2020-01-14 |
Flow Rate Measuring Method And Flow Rate Measuring Device
App 20200011720A1 - | 2020-01-09 |
Valve Device And Semiconductor Production Device
App 20200011448A1 - | 2020-01-09 |
Fluid control apparatus and method for attaching and detaching gas line section
Grant 10,527,071 - Ochiishi , et al. J | 2020-01-07 |
Pressure control device
Grant 10,520,958 - Nozawa , et al. Dec | 2019-12-31 |
Joint And Fluid Control Device
App 20190390811A1 - | 2019-12-26 |
Fluid Sealing Device And Pressure Detector Calibration Device
App 20190368757A1 - | 2019-12-05 |
Anomaly Detection Device for Fluid Controller, Anomaly Detection System, Anamoly Detection Method, and Fluid Controller
App 20190360887A1 - | 2019-11-28 |
Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component
Grant 10,473,247 - Watanabe , et al. Nov | 2019-11-12 |
Flow Rate Adjustment Valve, And Fluid Control Apparatus In Which The Flow Rate Adjustment Valve Is Used
App 20190316703A1 - | 2019-10-17 |
Seal Structure, Sealing Method, And Coupling Equipped With Said Seal Structure
App 20190293178A1 - | 2019-09-26 |
Seal Structure, Sealing Method, And Coupling Equipped With Said Seal Structure
App 20190293179A1 - | 2019-09-26 |
Valve Device, Flow Control Method Using The Same, And Semiconductor Manufacturing Method
App 20190285176A1 - | 2019-09-19 |
Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method
Grant 10,408,742 - Nagase , et al. Sept | 2019-09-10 |
Fluid Control System, Base Block Used For Same, And Method For Manufacturing Fluid Control System
App 20190271402A1 - | 2019-09-05 |
Concentration Measuring Device
App 20190271636A1 - | 2019-09-05 |
Fluid Control System And Product Manufacturing Method Using Fluid Control System
App 20190264326A1 - | 2019-08-29 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 10,386,861 - Hirata , et al. A | 2019-08-20 |
Pressure-type flow controller
Grant 10,386,863 - Hirata , et al. A | 2019-08-20 |
Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus
Grant 10,385,998 - Shigyou , et al. A | 2019-08-20 |
Pressure-type Flow Rate Control Device
App 20190250648A1 - | 2019-08-15 |
Fluid Control Device
App 20190243391A1 - | 2019-08-08 |
Inline concentration meter and concentration detection method
Grant 10,371,630 - Deguchi , et al. | 2019-08-06 |
Fluid controller with diaphragm
Grant 10,371,271 - Tokuda , et al. | 2019-08-06 |
Pressure-type flow rate control device
Grant 10,372,145 - Hirose , et al. | 2019-08-06 |
Diaphragm valve
Grant 10,371,270 - Funakoshi , et al. | 2019-08-06 |
Fluid controller
Grant D854,656 - Koyama , et al. | 2019-07-23 |
Fluid controller
Grant 10,359,120 - Tokuda | 2019-07-23 |
| 