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Attachment Method App 20160005635 - Inao; Yoshihiro ;   et al. | 2016-01-07 |
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Laminate and method for separating the same Grant 9,048,311 - Inao , et al. June 2, 2 | 2015-06-02 |
Supporting Member Separation Method And Supporting Member Separation Apparatus App 20150083343 - Fujii; Yasushi ;   et al. | 2015-03-26 |
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Method Of Manufacturing Multilayer Body, Method Of Processing Substrate, And Multilayer Body App 20140141253 - Fujii; Yasushi ;   et al. | 2014-05-22 |
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Laminate And Method For Separating The Same App 20130220554 - Inao; Yoshihiro ;   et al. | 2013-08-29 |
Laminate And Method For Separating The Same App 20130213582 - Inao; Yoshihiro ;   et al. | 2013-08-22 |
Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein Grant 8,475,668 - Tanaka , et al. July 2, 2 | 2013-07-02 |
Av System App 20130088581 - Arai; Kanehide ;   et al. | 2013-04-11 |
Stage for substrate Grant 8,336,866 - Fujii , et al. December 25, 2 | 2012-12-25 |
Liquid Processing Method, Liquid Processing Apparatus And Storage Medium App 20120260949 - SEKIGUCHI; Kenji ;   et al. | 2012-10-18 |
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Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method, And Storage Medium Having Substrate Liquid Processing Program Stored Therein App 20110089137 - TANAKA; Hiroshi ;   et al. | 2011-04-21 |
Semiconductor device manufacturing method that recovers damage of the etching target while supplying a predetermined recovery gas Grant 7,902,077 - Asako , et al. March 8, 2 | 2011-03-08 |
Thermoacid generator for antireflection film formation, composition for antireflection film formation, and antireflection film made therefrom Grant 7,785,768 - Kawana , et al. August 31, 2 | 2010-08-31 |
Substrate Processing Method and Storage Medium App 20090286399 - Fujii; Yasushi ;   et al. | 2009-11-19 |
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Photosensitive Resin Composition And Method Of Forming Pattern App 20090220889 - Sato; Kazufumi ;   et al. | 2009-09-03 |
Thermoacid Generator for Antireflection Film Formation, Composition for Antireflection Film Formation, and Antireflection Film Made Therefrom App 20090130595 - Kawana; Daisuke ;   et al. | 2009-05-21 |
Substrate processing method Grant 7,482,281 - Fujii , et al. January 27, 2 | 2009-01-27 |
Silylphenylene Polymer Composition For The Formation Of Interlayers And Process For The Formation Of Patterns By Using The Same App 20080107971 - Fujii; Yasushi ;   et al. | 2008-05-08 |
Material for forming silica based film Grant 7,235,500 - Fujii , et al. June 26, 2 | 2007-06-26 |
Semiconductor Device Manufacturing Method And Substrate Processing System App 20070122752 - ASAKO; Ryuichi ;   et al. | 2007-05-31 |
Substrate processing method App 20070077768 - Fujii; Yasushi ;   et al. | 2007-04-05 |
Composition for formation of antireflection film, and antireflection film in which the same is used App 20060292488 - Takayama; Toshikazu ;   et al. | 2006-12-28 |
Composition for forming intermediate layer containing sylylphenylene-based polymer and pattern-forming method App 20060263702 - Yamashita; Naoki ;   et al. | 2006-11-23 |
Silica-based organic film and method of manufacturing the same, and base material comprising organic film Grant 7,060,361 - Shibuya , et al. June 13, 2 | 2006-06-13 |
Toothbrush App 20050271997 - Mikami, Shintarou ;   et al. | 2005-12-08 |
Material for forming silica based film App 20050136692 - Fujii, Yasushi ;   et al. | 2005-06-23 |
Silica-based organic film and method of manufacturing the same, and base material comprising organic film App 20040180223 - Shibuya, Tatsuhiko ;   et al. | 2004-09-16 |
Method for processing coating film and method for manufacturing semiconductor element with use of the same method Grant 6,746,963 - Fujii , et al. June 8, 2 | 2004-06-08 |
Silica-based organic film and method of manufacturing the same, and base material comprising organic film App 20040028915 - Shibuya, Tatsuhiko ;   et al. | 2004-02-12 |
Coating liquid for forming a silica group coating film having a small dielectric constant Grant 6,664,199 - Fujii , et al. December 16, 2 | 2003-12-16 |
Methods for processing a coating film and for manufacturing a semiconductor element Grant 6,649,534 - Fujii , et al. November 18, 2 | 2003-11-18 |
Methods for processing a coating film and for manufacturing a semiconductor element Grant 6,509,279 - Fujii , et al. January 21, 2 | 2003-01-21 |
Mothods for processing a coating film and for manufacturing a semiconductor element App 20020192977 - Fujii, Yasushi ;   et al. | 2002-12-19 |
Coating liquid for forming a silica group coating film having a small dielectric constant App 20020192981 - Fujii, Yasushi ;   et al. | 2002-12-19 |
Method for processing coating film and method for manufacturing semiconductor element with use of the same method App 20020164886 - Fujii, Yasushi ;   et al. | 2002-11-07 |
Clearance information matching system App 20020069095 - Nishio, Kazuhisa ;   et al. | 2002-06-06 |
Methods for processing a coating film and for manufacturing a semiconductor element App 20020009791 - Fujii, Yasushi ;   et al. | 2002-01-24 |
Traffic navigation apparatus having a by-pass function Grant 6,061,629 - Yano , et al. May 9, 2 | 2000-05-09 |
Door grip structure for vehicles Grant 5,943,737 - Tomimitsu , et al. August 31, 1 | 1999-08-31 |
Communications control apparatus and client/server computer system Grant 5,873,086 - Fujii , et al. February 16, 1 | 1999-02-16 |
Map displaying apparatus Grant 5,635,953 - Hayami , et al. June 3, 1 | 1997-06-03 |
Quadrature amplitude modulation type digital radio communication device and method for preventing abnormal synchronization in demodulation system Grant 5,438,591 - Oie , et al. August 1, 1 | 1995-08-01 |
Navigation system for motor vehicles Grant 5,369,588 - Hayami , et al. November 29, 1 | 1994-11-29 |
Process for producing 1-aminoanthraquinones Grant 5,213,665 - Sugishima , et al. May 25, 1 | 1993-05-25 |
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