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Method for ascertaining the change in a spatial orientation of an NMR gyroscope and an NMR gyroscope Grant 11,402,210 - Roelver , et al. August 2, 2 | 2022-08-02 |
Transistor Comprising A Ceramic And An Ionogel App 20210341414 - Ersoez; Bora ;   et al. | 2021-11-04 |
Method for Ascertaining the Change in a Spatial Orientation of an NMR Gyroscope and an NMR Gyroscope App 20210172739 - Roelver; Robert ;   et al. | 2021-06-10 |
Magnetic field sensor and method for producing a magnetic field sensor Grant 9,030,198 - Schatz , et al. May 12, 2 | 2015-05-12 |
Microelectromechanical sensor for measuring a force, and corresponding method Grant 9,021,898 - Fuchs May 5, 2 | 2015-05-05 |
Method for etching a layer on a silicon semiconductor substrate Grant 8,946,090 - Becker , et al. February 3, 2 | 2015-02-03 |
Particle sensor Grant 8,800,350 - Krauss , et al. August 12, 2 | 2014-08-12 |
Microelectromechanical Sensor For Measuring A Force, And Corresponding Method App 20130319138 - Fuchs; Tino | 2013-12-05 |
Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component Grant 8,529,781 - Fuchs , et al. September 10, 2 | 2013-09-10 |
Method for producing micromechanical patterns having a relief-like sidewall outline shape or an adjustable angle of inclination Grant 8,501,516 - Laermer , et al. August 6, 2 | 2013-08-06 |
Magnetic Field Sensor And Method For Producing A Magnetic Field Sensor App 20120126799 - Schatz; Frank ;   et al. | 2012-05-24 |
Method for etching a layer on a substrate Grant 8,182,707 - Laermer , et al. May 22, 2 | 2012-05-22 |
Method For Producing Micromechanical Patterns Having A Relief-like Sidewall Outline Shape Or An Adjustable Angle Of Inclination App 20120018779 - Laermer; Franz ;   et al. | 2012-01-26 |
Particle Sensor App 20110107817 - Krauss; Andreas ;   et al. | 2011-05-12 |
Microelectromechanical systems encapsulation process Grant 7,898,046 - Ulm , et al. March 1, 2 | 2011-03-01 |
Method for producing a micromechanical component having a thin-layer capping Grant 7,851,248 - Kronmueller , et al. December 14, 2 | 2010-12-14 |
Method for producing a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, and component App 20100294710 - Fuchs; Tino ;   et al. | 2010-11-25 |
Micromechanical component and corresponding method for its manufacture Grant 7,834,409 - Reichenbach , et al. November 16, 2 | 2010-11-16 |
Method For Etching A Layer On A Silicon Semiconductor Substrate App 20100203739 - Becker; Volker ;   et al. | 2010-08-12 |
Micromechanical Component Having An Anti-adhesive Layer App 20100127339 - Laermer; Franz ;   et al. | 2010-05-27 |
Method For Structuring Silicon Carbide With The Aid Of Fluorine-containing Compounds App 20100086463 - Rudhard; Joachim ;   et al. | 2010-04-08 |
Method For Producing A Micromechanical Component Having A Thin-layer Capping App 20100003790 - Kronmueller; Silvia ;   et al. | 2010-01-07 |
Microelectromechanical Systems Encapsulation Process App 20090278214 - Ulm; Markus ;   et al. | 2009-11-12 |
Microelectromechanical systems encapsulation process with anti-stiction coating Grant 7,582,514 - Vancura , et al. September 1, 2 | 2009-09-01 |
Microelectromechanical systems encapsulation process Grant 7,563,633 - Ulm , et al. July 21, 2 | 2009-07-21 |
Micromechanical component and corresponding method for its manufacture App 20090026561 - Reichenbach; Frank ;   et al. | 2009-01-29 |
Method for Etching a Layer on a Substrate App 20080311751 - Laermer; Franz ;   et al. | 2008-12-18 |
Microelectromechanical Systems Encapsulation Process with Anti-Stiction Coating App 20080050861 - Vancura; Cyril ;   et al. | 2008-02-28 |
Microelectromechanical systems encapsulation process App 20080050845 - Ulm; Markus ;   et al. | 2008-02-28 |