Patent | Date |
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Pump Truck Boom Control Method, Pump Truck Boom Control System And Pump Truck App 20210293038 - Wu; Liang ;   et al. | 2021-09-23 |
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20210225655 - Fu; Xinyu ;   et al. | 2021-07-22 |
Methods for depositing fluorine/carbon-free conformal tungsten Grant 10,985,023 - Fu , et al. April 20, 2 | 2021-04-20 |
Process kit shield for improved particle reduction Grant 10,718,049 - Rasheed , et al. | 2020-07-21 |
Method of enabling seamless cobalt gap-fill Grant 10,699,946 - Zope , et al. | 2020-06-30 |
Methods of depositing metal films using metal oxyhalide precursors Grant 10,483,116 - Fu , et al. Nov | 2019-11-19 |
Method of enabling seamless cobalt gap-fill Grant 10,269,633 - Zope , et al. | 2019-04-23 |
Methods of Depositing Metal Films Using Metal Oxyhalide Precursors App 20190088489 - Fu; Xinyu ;   et al. | 2019-03-21 |
Methods for selective deposition of metal silicides via atomic layer deposition cycles Grant 10,199,230 - Ganguli , et al. Fe | 2019-02-05 |
Methods of depositing metal films using metal oxyhalide precursors Grant 10,121,671 - Fu , et al. November 6, 2 | 2018-11-06 |
Methods for thermally forming a selective cobalt layer Grant 10,043,709 - Ai , et al. August 7, 2 | 2018-08-07 |
Methods for forming low-resistance contacts through integrated process flow systems Grant 9,947,578 - Lei , et al. April 17, 2 | 2018-04-17 |
Process Kit Shield For Improved Particle Reduction App 20180087147 - RASHEED; MUHAMMAD ;   et al. | 2018-03-29 |
Tungsten films by organometallic or silane pre-treatment of substrate Grant 9,922,872 - Knapp , et al. March 20, 2 | 2018-03-20 |
Method Of Enabling Seamless Cobalt Gap-fill App 20180068890 - ZOPE; Bhushan N. ;   et al. | 2018-03-08 |
Method of enabling seamless cobalt gap-fill Grant 9,842,769 - Zope , et al. December 12, 2 | 2017-12-12 |
Process kit shield for improved particle reduction Grant 9,834,840 - Rasheed , et al. December 5, 2 | 2017-12-05 |
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20170194156 - Fu; Xinyu ;   et al. | 2017-07-06 |
Method of enabling seamless cobalt gap-fill Grant 9,685,371 - Zope , et al. June 20, 2 | 2017-06-20 |
Methods For Forming Low-resistance Contacts Through Integrated Process Flow Systems App 20170148670 - LEI; YU ;   et al. | 2017-05-25 |
Method Of Enabling Seamless Cobalt Gap-fill App 20170084486 - ZOPE; Bhushan N. ;   et al. | 2017-03-23 |
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,601,339 - Fu , et al. March 21, 2 | 2017-03-21 |
Methods for etching via atomic layer deposition (ALD) cycles Grant 9,595,466 - Fu , et al. March 14, 2 | 2017-03-14 |
Methods of Depositing Metal Films Using Metal Oxyhalide Precursors App 20170062224 - Fu; Xinyu ;   et al. | 2017-03-02 |
Tungsten Films by Organometallic or Silane Pre-Treatment of Substrate App 20160336222 - Knapp; David ;   et al. | 2016-11-17 |
Methods For Selective Deposition Of Metal Silicides Via Atomic Layer Deposition Cycles App 20160322229 - GANGULI; Seshadri ;   et al. | 2016-11-03 |
Methods For Etching Via Atomic Layer Deposition (ald) Cycles App 20160276214 - FU; Xinyu ;   et al. | 2016-09-22 |
Method Of Enabling Seamless Cobalt Gap-fill App 20160247718 - ZOPE; Bhushan N. ;   et al. | 2016-08-25 |
Methods For Thermally Forming A Selective Cobalt Layer App 20160133563 - AI; HUA ;   et al. | 2016-05-12 |
Method of enabling seamless cobalt gap-fill Grant 9,330,939 - Zope , et al. May 3, 2 | 2016-05-03 |
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten App 20160104624 - Fu; Xinyu ;   et al. | 2016-04-14 |
Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices Grant 9,230,835 - Gelatos , et al. January 5, 2 | 2016-01-05 |
Methods for depositing fluorine/carbon-free conformal tungsten Grant 9,230,815 - Fu , et al. January 5, 2 | 2016-01-05 |
Deposition of N-metal films comprising aluminum alloys Grant 9,145,612 - Gandikota , et al. September 29, 2 | 2015-09-29 |
Atomic layer deposition methods for metal gate electrodes Grant 9,082,702 - Lei , et al. July 14, 2 | 2015-07-14 |
Method Of Enabling Seamless Cobalt Gap-fill App 20150093891 - ZOPE; Bhushan N. ;   et al. | 2015-04-02 |
Methods for forming layers on a substrate Grant 8,993,434 - Yu , et al. March 31, 2 | 2015-03-31 |
Methods for manufacturing metal gates Grant 8,987,080 - Lu , et al. March 24, 2 | 2015-03-24 |
Method for removing native oxide and associated residue from a substrate Grant 8,951,913 - Zheng , et al. February 10, 2 | 2015-02-10 |
Methods for annealing a contact metal layer to form a metal silicidation layer Grant 8,927,423 - Fu , et al. January 6, 2 | 2015-01-06 |
Electromagnet array in a sputter reactor Grant 8,871,064 - Gung , et al. October 28, 2 | 2014-10-28 |
Method for segregating the alloying elements and reducing the residue resistivity of copper alloy layers Grant 8,852,674 - Fu , et al. October 7, 2 | 2014-10-07 |
Method For Removing Native Oxide And Associated Residue From A Substrate App 20140295665 - ZHENG; Bo ;   et al. | 2014-10-02 |
Integrated Platform For Fabricating N-type Metal Oxide Semiconductor (nmos) Devices App 20140273515 - GELATOS; AVGERINOS V. ;   et al. | 2014-09-18 |
Method for removing native oxide and associated residue from a substrate Grant 8,772,162 - Zheng , et al. July 8, 2 | 2014-07-08 |
Post deposition treatments for CVD cobalt films Grant 8,765,601 - Lei , et al. July 1, 2 | 2014-07-01 |
Methods For Depositing Fluorine/carbon-free Conformal Tungsten App 20140120723 - Fu; Xinyu ;   et al. | 2014-05-01 |
Method for metal deposition using hydrogen plasma Grant 8,637,410 - Subramani , et al. January 28, 2 | 2014-01-28 |
Deposition Of N-Metal Films Comprising Aluminum Alloys App 20140017408 - Gandikota; Srinivas ;   et al. | 2014-01-16 |
Post Deposition Treatments For Cvd Cobalt Films App 20140011354 - LEI; Yu ;   et al. | 2014-01-09 |
Method For Removing Native Oxide And Associated Residue From A Substrate App 20130316533 - ZHENG; Bo ;   et al. | 2013-11-28 |
Methods for forming a contact metal layer in semiconductor devices Grant 8,586,479 - Fu , et al. November 19, 2 | 2013-11-19 |
Plasma treatment of substrates prior to deposition Grant 8,580,354 - Fu , et al. November 12, 2 | 2013-11-12 |
Methods for forming a metal gate structure on a substrate Grant 8,580,630 - Lei , et al. November 12, 2 | 2013-11-12 |
Methods For Manufacturing Metal Gates App 20130295759 - Lu; Xinliang ;   et al. | 2013-11-07 |
Method Of Enabling Seamless Cobalt Gap-fill App 20130260555 - ZOPE; Bhushan N. ;   et al. | 2013-10-03 |
Post deposition treatments for CVD cobalt films Grant 8,524,600 - Lei , et al. September 3, 2 | 2013-09-03 |
Atomic Layer Deposition Methods For Metal Gate Electrodes App 20130221445 - Lei; Yu ;   et al. | 2013-08-29 |
Methods For Forming A Contact Metal Layer In Semiconductor Devices App 20130189840 - Fu; Xinyu ;   et al. | 2013-07-25 |
Methods For Annealing A Metal Contact Layer To Form A Metal Silicidation Layer App 20130157460 - Fu; Xinyu ;   et al. | 2013-06-20 |
Method for removing native oxide and associated residue from a substrate Grant 8,455,352 - Zheng , et al. June 4, 2 | 2013-06-04 |
Methods For Forming A Metal Gate Structure On A Substrate App 20130102144 - LEI; JIANXIN ;   et al. | 2013-04-25 |
Method for improving electromigration lifetime of copper interconnection by extended post anneal Grant 8,349,724 - Fu , et al. January 8, 2 | 2013-01-08 |
Method for Metal Deposition Using Hydrogen Plasma App 20120258602 - Subramani; Anantha K. ;   et al. | 2012-10-11 |
Post Deposition Treatments For Cvd Cobalt Films App 20120252207 - Lei; Yu ;   et al. | 2012-10-04 |
Method For Segregating The Alloying Elements And Reducing The Residue Resistivity Of Copper Alloy Layers App 20120121799 - Fu; Xinyu ;   et al. | 2012-05-17 |
Methods of forming a layer for barrier applications in an interconnect structure Grant 8,168,543 - Fu , et al. May 1, 2 | 2012-05-01 |
Methods For Forming Layers On A Substrate App 20120070982 - YU; JICK M. ;   et al. | 2012-03-22 |
Pre-clean Chamber With Reduced Ion Current App 20110315319 - FORSTER; JOHN C. ;   et al. | 2011-12-29 |
Plasma treatment of substrates prior to deposition App 20110300720 - Fu; Xinyu ;   et al. | 2011-12-08 |
Process Kit Shield For Improved Particle Reduction App 20110278165 - RASHEED; MUHAMMAD ;   et al. | 2011-11-17 |
Remote plasma source for pre-treatment of substrates prior to deposition Grant 8,021,514 - Fu , et al. September 20, 2 | 2011-09-20 |
Methods for reducing damage to substrate layers in deposition processes Grant 7,807,568 - Fu , et al. October 5, 2 | 2010-10-05 |
Method For Improving Electromigration Lifetime Of Copper Interconnection By Extended Post Anneal App 20100167526 - Fu; Xinyu ;   et al. | 2010-07-01 |
Electromagnet array in a sputter reactor App 20100155223 - GUNG; Tza-Jing ;   et al. | 2010-06-24 |
Methods For Reducing Damage To Substrate Layers In Deposition Processes App 20100105203 - FU; XINYU ;   et al. | 2010-04-29 |
Remote plasma pre-clean with low hydrogen pressure Grant 7,704,887 - Fu , et al. April 27, 2 | 2010-04-27 |
Method For Nitridation Pretreatment App 20100099251 - FU; XINYU ;   et al. | 2010-04-22 |
Water vapor passivation of a wall facing a plasma Grant 7,695,567 - Fu April 13, 2 | 2010-04-13 |
Multi-step process for forming a metal barrier in a sputter reactor Grant 7,686,926 - Gung , et al. March 30, 2 | 2010-03-30 |
Apparatus and a method for cleaning a dielectric film Grant 7,658,802 - Fu , et al. February 9, 2 | 2010-02-09 |
Methods Of Forming A Layer For Barrier Applications In An Interconnect Structure App 20100006425 - Fu; Xinyu ;   et al. | 2010-01-14 |
Methods of forming a layer for barrier applications in an interconnect structure Grant 7,618,893 - Fu , et al. November 17, 2 | 2009-11-17 |
Split magnet ring on a magnetron sputter chamber Grant 7,618,521 - Fu November 17, 2 | 2009-11-17 |
Method for forming metal interconnects and reducing metal seed layer overhang Grant 7,615,489 - Fu November 10, 2 | 2009-11-10 |
Methods Of Forming A Layer For Barrier Applications In An Interconnect Structure App 20090227105 - Fu; Xinyu ;   et al. | 2009-09-10 |
Remote Plasma Source for Pre-Treatment of Substrates Prior to Deposition App 20090017227 - FU; Xinyu ;   et al. | 2009-01-15 |
Resputtered Copper Seed Layer App 20080190760 - TANG; XIANMIN ;   et al. | 2008-08-14 |
Water vapor passivation of a wall facing a plasma App 20070190266 - Fu; Xinyu | 2007-08-16 |
Remote plasma pre-clean with low hydrogen pressure App 20070117397 - Fu; Xinyu ;   et al. | 2007-05-24 |
Apparatus and a method for cleaning a dielectric film App 20070113868 - Fu; Xinyu ;   et al. | 2007-05-24 |
Nude mouse model for human neoplastic disease Grant RE39,337 - Monosov , et al. October 10, 2 | 2006-10-10 |
Split magnet ring on a magnetron sputter chamber App 20060207873 - Fu; Xinyu | 2006-09-21 |
Multi-step process for forming a metal barrier in a sputter reactor App 20050263390 - Gung, Tza-Jing ;   et al. | 2005-12-01 |