| Patent | Date |
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System And Method For Cleaning An Euv Mask Within A Scanner
App 20220299882 - Huang; Yuru ; et al. | 2022-09-22 |
System And Method For Cleaning An Euv Mask
App 20220283521 - LI; Yen-Hui ; et al. | 2022-09-08 |
Light Source, Euv Lithography System, And Method For Performing Circuit Layout Patterning Process
App 20220276574 - YANG; Chi ; et al. | 2022-09-01 |
Method Of Lithography Process Using Reticle Container With Discharging Device
App 20220260901 - CHANG; Hsiao-Lun ; et al. | 2022-08-18 |
EUV radiation modification methods and systems
Grant 11,419,203 - Chang , et al. August 16, 2 | 2022-08-16 |
Euv Light Source And Apparatus For Lithography
App 20220191999 - CHIEN; Shang-Chieh ; et al. | 2022-06-16 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 11,333,983 - Yang , et al. May 17, 2 | 2022-05-17 |
Reticle with conductive material structure
Grant 11,320,733 - Chang , et al. May 3, 2 | 2022-05-03 |
EUV light source and apparatus for lithography
Grant 11,272,606 - Chien , et al. March 8, 2 | 2022-03-08 |
System and method for extreme ultraviolet source control
Grant 11,224,115 - Hsu , et al. January 11, 2 | 2022-01-11 |
EUV collector contamination prevention
Grant 11,219,115 - Wu , et al. January 4, 2 | 2022-01-04 |
Lithography System And Method
App 20210389685 - LAN; Hao-Yu ; et al. | 2021-12-16 |
Particle Removal Method
App 20210335597 - HUANG; Siao-Chian ; et al. | 2021-10-28 |
Method and apparatus for lithography in semiconductor fabrication
Grant 11,121,018 - Kuo , et al. September 14, 2 | 2021-09-14 |
Lithography system and method
Grant 11,106,146 - Lan , et al. August 31, 2 | 2021-08-31 |
EUV vessel inspection method and related system
Grant 11,092,555 - Chang , et al. August 17, 2 | 2021-08-17 |
Light Source For Lithography Exposure Process
App 20210243875 - HSIEH; Chieh ; et al. | 2021-08-05 |
Residual gain monitoring and reduction for EUV drive laser
App 20210235572 - Chang; Chun-Lin Louis ; et al. | 2021-07-29 |
Euv Lithography System And Method For Decreasing Debris In Euv Lithography System
App 20210223708 - YANG; Chi ; et al. | 2021-07-22 |
Particle removal apparatus, particle removal system and particle removal method
Grant 11,062,898 - Huang , et al. July 13, 2 | 2021-07-13 |
Euv Radiation Modification Methods And Systems
App 20210168923 - CHANG; Chun-Lin Louis ; et al. | 2021-06-03 |
Light source for lithography exposure process
Grant 10,993,308 - Hsieh , et al. April 27, 2 | 2021-04-27 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,980,100 - Chang , et al. April 13, 2 | 2021-04-13 |
Radiation source apparatus and method for decreasing debris in radiation source apparatus
Grant 10,955,762 - Yang , et al. March 23, 2 | 2021-03-23 |
System and Method for Extreme Ultraviolet Source Control
App 20210068241 - Hsu; Chun-Chia ; et al. | 2021-03-04 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20210055664 - YANG; Chi ; et al. | 2021-02-25 |
EUV radiation modification methods and systems
Grant 10,917,959 - Chang , et al. February 9, 2 | 2021-02-09 |
Reticle With Conductive Material Structure
App 20210026236 - CHANG; Hsiao-Lun ; et al. | 2021-01-28 |
Collector pellicle
Grant 10,880,981 - Chien , et al. December 29, 2 | 2020-12-29 |
System and method for extreme ultraviolet source control
Grant 10,842,009 - Hsu , et al. November 17, 2 | 2020-11-17 |
Euv Vessel Inspection Method And Related System
App 20200348241 - CHANG; Chun-Lin Louis ; et al. | 2020-11-05 |
Method And Apparatus For Lithography In Semiconductor Fabrication
App 20200350194 - KUO; Chueh-Chi ; et al. | 2020-11-05 |
Radiation Source Apparatus And Method For Decreasing Debris In Radiation Source Apparatus
App 20200348607 - YANG; Chi ; et al. | 2020-11-05 |
Light source, EUV lithography system, and method for generating EUV radiation
Grant 10,824,083 - Yang , et al. November 3, 2 | 2020-11-03 |
Method for discharging static charges on reticle
Grant 10,802,394 - Chang , et al. October 13, 2 | 2020-10-13 |
Lithography System And Method
App 20200310259 - LAN; Hao-Yu ; et al. | 2020-10-01 |
EUV Collector Contamination Prevention
App 20200236768 - Wu; Ming-Fa ; et al. | 2020-07-23 |
EUV vessel inspection method and related system
Grant 10,718,718 - Chang , et al. | 2020-07-21 |
Method and apparatus for lithography in semiconductor fabrication
Grant 10,714,371 - Kuo , et al. | 2020-07-14 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,712,676 - Yang , et al. | 2020-07-14 |
Lithography method
Grant 10,684,561 - Lan , et al. | 2020-06-16 |
Residual gain monitoring and reduction for EUV drive laser
App 20200146137 - Chang; Chun-Lin Louis ; et al. | 2020-05-07 |
Lithography Method
App 20200133143 - LAN; Hao-Yu ; et al. | 2020-04-30 |
EUV collector contamination prevention
Grant 10,631,392 - Wu , et al. | 2020-04-21 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20200073261 - YANG; Chi ; et al. | 2020-03-05 |
Light Source For Lithography Exposure Process
App 20200068696 - HSIEH; Chieh ; et al. | 2020-02-27 |
Particle Removal Apparatus, Particle Removal System And Particle Removal Method
App 20200035483 - HUANG; Siao-Chian ; et al. | 2020-01-30 |
Euv Radiation Modification Methods And Systems
App 20200026179 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Euv Vessel Inspection Method And Related System
App 20200025688 - CHANG; Chun-Lin Louis ; et al. | 2020-01-23 |
Residual gain monitoring and reduction for EUV drive laser
Grant 10,524,345 - Chang , et al. Dec | 2019-12-31 |
EUV source generation method and related system
Grant 10,506,698 - Chang , et al. Dec | 2019-12-10 |
Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system
Grant 10,495,987 - Yang , et al. De | 2019-12-03 |
Light source for lithography exposure process
Grant 10,477,663 - Hsieh , et al. Nov | 2019-11-12 |
EUV Collector Contamination Prevention
App 20190335571 - Wu; Ming-Fa ; et al. | 2019-10-31 |
EUV radiation modification methods and systems
Grant 10,429,729 - Chang , et al. O | 2019-10-01 |
EUV vessel inspection method and related system
Grant 10,429,314 - Chang , et al. October 1, 2 | 2019-10-01 |
System and Method for Extreme Ultraviolet Source Control
App 20190289706 - Hsu; Chun-Chia ; et al. | 2019-09-19 |
Method for lithographic process and lithographic system
Grant 10,361,134 - Lai , et al. | 2019-07-23 |
System and method for extreme ultraviolet source control
Grant 10,314,154 - Hsu , et al. | 2019-06-04 |
System and Method for Extreme Ultraviolet Source Control
App 20190166680 - Hsu; Chun-Chia ; et al. | 2019-05-30 |
Method For Discharging Static Charges On Reticle
App 20190155139 - CHANG; Hsiao-Lun ; et al. | 2019-05-23 |
Methods and Systems for Aligning Master Oscillator Power Amplifier Systems
App 20190157828 - Chang; Chun-Lin Louis ; et al. | 2019-05-23 |
Light Source For Lithography Exposure Process
App 20190150265 - HSIEH; Chieh ; et al. | 2019-05-16 |
Method And Apparatus For Lithography In Semiconductor Fabrication
App 20190148203 - KUO; Chueh-Chi ; et al. | 2019-05-16 |
Collector Pellicle
App 20190104604 - CHIEN; Shang-Chieh ; et al. | 2019-04-04 |
Radiation Source Apparatus, Euv Lithography System, And Method For Decreasing Debris In Euv Lithography System
App 20190094718 - YANG; Chi ; et al. | 2019-03-28 |
Light Source, Euv Lithography System, And Method For Generating Euv Radiation
App 20190094717 - YANG; Chi ; et al. | 2019-03-28 |
Method For Lithographic Process And Lithographic System
App 20190067132 - LAI; Wei-Chih ; et al. | 2019-02-28 |
Euv Vessel Inspection Method And Related System
App 20190033225 - CHANG; Chun-Lin Louis ; et al. | 2019-01-31 |
Euv Light Source And Apparatus For Lithography
App 20180376575 - CHIEN; Shang-Chieh ; et al. | 2018-12-27 |
Lithography process and system with enhanced overlay quality
Grant 10,146,141 - Hung , et al. De | 2018-12-04 |
Euv Source Generation Method And Related System
App 20180317309 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Residual Gain Monitoring and Reduction for EUV Drive Laser
App 20180317308 - Chang; Chun-Lin Louis ; et al. | 2018-11-01 |
Euv Radiation Modification Methods And Systems
App 20180314145 - CHANG; Chun-Lin Louis ; et al. | 2018-11-01 |
Method and apparatus for maintaining depth of focus
Grant 9,360,767 - Hsieh , et al. June 7, 2 | 2016-06-07 |
Lithography Process and System with Enhanced Overlay Quality
App 20160062250 - Hung; Chi-Cheng ; et al. | 2016-03-03 |
Semiconductor structure for extreme ultraviolet electrostatic chuck with reduced clamping effect
Grant 9,117,830 - Hsu , et al. August 25, 2 | 2015-08-25 |
Method and Apparatus For Maintaining Depth of Focus
App 20150220006 - Hsieh; Chang-Tsun ; et al. | 2015-08-06 |
Method and apparatus for maintaining depth of focus
Grant 9,025,130 - Hsieh , et al. May 5, 2 | 2015-05-05 |
Semiconductor Structure For Extreme Ultraviolet Electrostatic Chuck With Reduced Clamping Effect
App 20140284604 - Hsu; Chia-Hao ; et al. | 2014-09-25 |
Method for extreme ultraviolet electrostatic chuck with reduced clamp effect
Grant 8,765,582 - Hsu , et al. July 1, 2 | 2014-07-01 |
Method For Extreme Ultraviolet Electrostatic Chuck With Reduced Clamping Effect
App 20140061655 - Hsu; Chia-Hao ; et al. | 2014-03-06 |
Method and Apparatus for Maintaining Depth of Focus
App 20130314708 - Hsieh; Chang-Tsun ; et al. | 2013-11-28 |
Method and apparatus for maintaining depth of focus
Grant 8,520,189 - Hsieh , et al. August 27, 2 | 2013-08-27 |
System and method for improving immersion scanner overlay performance
Grant 8,199,314 - Peng , et al. June 12, 2 | 2012-06-12 |
System And Method For Improving Immersion Scanner Overlay Performance
App 20120045192 - PENG; Jui-Cheng ; et al. | 2012-02-23 |
System and method for improving immersion scanner overlay performance
Grant 8,068,208 - Peng , et al. November 29, 2 | 2011-11-29 |
Method And Apparatus For Maintaining Depth Of Focus
App 20110267593 - Hsieh; Chang-Tsun ; et al. | 2011-11-03 |
Method and apparatus for removing particles in immersion lithography
Grant 7,800,731 - Chang , et al. September 21, 2 | 2010-09-21 |
Method and system for closing plate take-over in immersion lithography
Grant 7,728,952 - Fu , et al. June 1, 2 | 2010-06-01 |
Hood for immersion lithography
Grant 7,675,604 - Chen , et al. March 9, 2 | 2010-03-09 |
Apparatus and method for particle monitoring in immersion lithography
Grant 7,602,471 - Fu , et al. October 13, 2 | 2009-10-13 |
Method and System for Closing Plate Take-Over in Immersion Lithography
App 20080182208 - Fu; Tzung-Chi ; et al. | 2008-07-31 |
System and Method For Improving Immersion Scanner Overlay Performance
App 20080129969 - Peng; Jui-Chung ; et al. | 2008-06-05 |
Method and Apparatus For Removing Particles in Immersion Lithography
App 20080106709 - Chang; Hsin ; et al. | 2008-05-08 |
Apparatus and Method for Particle Monitoring in Immersion Lithography
App 20070268469 - Fu; Tzung Chi ; et al. | 2007-11-22 |
Hood For Immersion Lithography
App 20070258060 - CHEN; Li-Jui ; et al. | 2007-11-08 |
Method and apparatus for dispensing resist solution
Grant 6,425,497 - Chu , et al. July 30, 2 | 2002-07-30 |
Apparatus and method for degassing and preventing gelation in a viscous liquid
App 20020083839 - Fu, Tzung-Chi ; et al. | 2002-07-04 |
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