Fu; Tao-Yi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Fu; Tao-Yi.The latest application filed is for "illumination system with time multiplexed sources for reticle inspection".

Company Profile

1.32.18

Fu; Tao-Yi - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and systems for monitoring a non-defect related characteristic of a patterned wafer Grant 10,324,046 - Fu , et al.	2019-06-18
Source multiplexing illumination for mask inspection Grant 9,625,810 - Wang , et al. April 18, 2	2017-04-18
Illumination system with time multiplexed sources for reticle inspection Grant 9,151,718 - Wang , et al. October 6, 2	2015-10-06
Illumination System with Time Multiplexed Sources for Reticle Inspection App 20130242295 - Wang; Daimian ; et al.	2013-09-19
Methods and systems for inspection of a specimen using different inspection parameters Grant 8,384,887 - Lange , et al. February 26, 2	2013-02-26
Systems configured to generate output corresponding to defects on a specimen Grant 8,355,140 - Hwang , et al. January 15, 2	2013-01-15
Source Multiplexing Illumination For Mask Inspection App 20120236281 - Wang; Daimian ; et al.	2012-09-20
Systems Configured to Generate Output Corresponding to Defects on a Specimen App 20110181891 - Hwang; Shiow-Hwei ; et al.	2011-07-28
Systems configured to generate output corresponding to defects on a specimen Grant 7,924,434 - Hwang , et al. April 12, 2	2011-04-12
Confocal wafer inspection system and method Grant 7,858,911 - Fairley , et al. December 28, 2	2010-12-28
Methods And Systems For Inspection Of A Specimen Using Different Inspection Parameters App 20100238433 - Lange; Steve R. ; et al.	2010-09-23
Methods and systems for inspection of a specimen using different inspection parameters Grant 7,738,089 - Lange , et al. June 15, 2	2010-06-15
High throughput brightfield/darkfield water inspection system using advanced optical techniques Grant 7,554,655 - Fairley , et al. June 30, 2	2009-06-30
Systems configured to inspect a specimen Grant 7,535,563 - Chen , et al. May 19, 2	2009-05-19
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,522,275 - Fairley , et al. April 21, 2	2009-04-21
Confocal wafer inspection system and method App 20080273196 - Fairley; Christopher R. ; et al.	2008-11-06
Dark field inspection apparatus and methods Grant 7,436,503 - Chen , et al. October 14, 2	2008-10-14
High throughput brightfield/darkfield water inspection system using advanced optical techniques App 20080225298 - Fairley; Christopher R. ; et al.	2008-09-18
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 7,399,950 - Fairley , et al. July 15, 2	2008-07-15
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,379,173 - Fairley , et al. May 27, 2	2008-05-27
System and method for coherent optical inspection Grant 7,327,464 - Hwang , et al. February 5, 2	2008-02-05
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20080007726 - Fairley; Christopher R. ; et al.	2008-01-10
Spatial light modulator fourier transform Grant 7,317,527 - Maciuca , et al. January 8, 2	2008-01-08
System And Method For Coherent Optical Inspection App 20070195332 - Hwang; Shiow-Hwei ; et al.	2007-08-23
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques Grant 7,259,844 - Fairley , et al. August 21, 2	2007-08-21
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques App 20070115461 - Fairley; Christopher R. ; et al.	2007-05-24
System and method for coherent optical inspection Grant 7,209,239 - Hwang , et al. April 24, 2	2007-04-24
Systems Configured to Generate Output Corresponding to Defects on a Specimen App 20070030477 - Hwang; Shiow-Hwei ; et al.	2007-02-08
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 7,164,475 - Fairley , et al. January 16, 2	2007-01-16
Confocal wafer inspection method and apparatus using fly lens arrangement App 20070007429 - Fairley; Christopher R. ; et al.	2007-01-11
Confocal wafer depth scanning inspection method Grant 7,109,458 - Fairley , et al. September 19, 2	2006-09-19
Method and apparatus using interferometric metrology for high aspect ratio inspection Grant 7,061,625 - Hwang , et al. June 13, 2	2006-06-13
Confocal wafer inspection method and apparatus App 20050156098 - Fairley, Christopher R. ; et al.	2005-07-21
High throughput brightfield/darkfield wafer inspection system using advanced optical techiques App 20050062962 - Fairley, Christopher R. ; et al.	2005-03-24
Confocal wafer inspection method and apparatus using fly lens arrangement Grant 6,867,406 - Fairley , et al. March 15, 2	2005-03-15
Methods and systems for inspection of a specimen using different inspection parameters App 20050052643 - Lange, Steve R. ; et al.	2005-03-10
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20040252297 - Fairley, Christopher R. ; et al.	2004-12-16
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,816,249 - Fairley , et al. November 9, 2	2004-11-09
System and method for coherent optical inspection App 20040130710 - Hwang, Shiow-Hwei ; et al.	2004-07-08
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques App 20020118359 - Fairley, Christopher R. ; et al.	2002-08-29
Automated photomask inspection apparatus App 20020054702 - Wihl, Mark Joseph ; et al.	2002-05-09
Automated photomask inspection apparatus Grant 6,363,166 - Wihl , et al. March 26, 2	2002-03-26
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques Grant 6,288,780 - Fairley , et al. September 11, 2	2001-09-11
Automated photomask inspection apparatus Grant 6,052,478 - Wihl , et al. April 18, 2	2000-04-18
Automated photomask inspection apparatus and method Grant 5,737,072 - Emery , et al. April 7, 1	1998-04-07
Automated photomask inspection apparatus Grant 5,572,598 - Wihl , et al. November 5, 1	1996-11-05
Automated photomask inspection apparatus and method Grant 5,563,702 - Emery , et al. October 8, 1	1996-10-08

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