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Patent applications and USPTO patent grants for Frum; Coriolan.The latest application filed is for "monitoring substrate processing with optical emission and polarized reflected radiation".
Patent | Date |
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Monitoring substrate processing with optical emission and polarized reflected radiation Grant 6,559,942 - Sui , et al. May 6, 2 | 2003-05-06 |
Monitoring substrate processing with optical emission and polarized reflected radiation App 20020048019 - Sui, Zhifeng ;   et al. | 2002-04-25 |
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