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Patent applications and USPTO patent grants for Frohlich; Heiko.The latest application filed is for "systems and methods for horizontal integration of acceleration sensor structures".
Patent | Date |
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Sensor structures, systems and methods with improved integration and optimized footprint Grant 9,546,923 - Kautzsch , et al. January 17, 2 | 2017-01-17 |
Systems and methods for horizontal integration of acceleration sensor structures Grant 9,330,929 - Kautzsch , et al. May 3, 2 | 2016-05-03 |
Systems And Methods For Horizontal Integration Of Acceleration Sensor Structures App 20160104625 - Kautzsch; Thoralf ;   et al. | 2016-04-14 |
Method and structure for creating cavities with extreme aspect ratios Grant 9,136,136 - Kautzsch , et al. September 15, 2 | 2015-09-15 |
Sensor Structures, Systems And Methods With Improved Integration And Optimized Footprint App 20150210533 - Kautzsch; Thoralf ;   et al. | 2015-07-30 |
Method And Structure For Creating Cavities With Extreme Aspect Ratios App 20150079787 - Kautzsch; Thoralf ;   et al. | 2015-03-19 |
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