| Patent | Date |
|---|
Methods for producing thin-film layers and microsystems having thin-film layers
Grant 11,414,320 - Sigl , et al. August 16, 2 | 2022-08-16 |
Method for manufacturing an opening structure and opening structure
Grant 11,223,904 - Friza January 11, 2 | 2022-01-11 |
Method for Processing a Layer Structure and Microelectromechanical Component
App 20210363002 - Brockmeier; Andre ; et al. | 2021-11-25 |
Method for processing a layer structure and microelectromechanical component
Grant 11,180,362 - Brockmeier , et al. November 23, 2 | 2021-11-23 |
Methods for Producing Thin-Film Layers and Microsystems Having Thin-Film Layers
App 20210017019 - Sigl; Alfred ; et al. | 2021-01-21 |
Methods for producing thin-film layers and microsystems having thin-film layers
Grant 10,889,492 - Sigl , et al. January 12, 2 | 2021-01-12 |
Method for processing a layer structure and microelectromechanical component
Grant 10,766,766 - Brockmeier , et al. Sep | 2020-09-08 |
Method for Processing a Layer Structure and Microelectromechanical Component
App 20200277183 - Brockmeier; Andre ; et al. | 2020-09-03 |
Method For Manufacturing An Opening Structure And Opening Structure
App 20200015017 - FRIZA; Wolfgang | 2020-01-09 |
Method for manufacturing an opening structure and opening structure
Grant 10,469,948 - Friza No | 2019-11-05 |
Semiconductor device, microphone and method for producing a semiconductor device
Grant 10,464,807 - Barzen , et al. No | 2019-11-05 |
Semiconductor Devices Having a Membrane Layer with Smooth Stress-Relieving Corrugations and Methods of Fabrication Thereof
App 20190297441 - Dehe; Alfons ; et al. | 2019-09-26 |
Semiconductor devices having a membrane layer with smooth stress-relieving corrugations and methods of fabrication thereof
Grant 10,405,118 - Dehe , et al. Sep | 2019-09-03 |
MEMS device and method for producing a MEMS device
Grant 10,405,099 - Jost , et al. Sep | 2019-09-03 |
Methods For Producing Thin-film Layers And Microsystems Having Thin-film Layers
App 20190241431 - Sigl; Alfred ; et al. | 2019-08-08 |
Method For Processing A Layer Structure And Microelectromechanical Component
App 20190071303 - Brockmeier; Andre ; et al. | 2019-03-07 |
Semiconductor Device, Microphone And Method For Producing A Semiconductor Device
App 20180170745 - Barzen; Stefan ; et al. | 2018-06-21 |
Mems Device And Method For Producing A Mems Device
App 20180152793 - JOST; Stefan ; et al. | 2018-05-31 |
Method for forming a microelectromechanical device
Grant 9,902,612 - Dehe , et al. February 27, 2 | 2018-02-27 |
Method For Forming A Microelectromechanical Device
App 20170297899 - Dehe; Alfons ; et al. | 2017-10-19 |
Microelectromechanical Device And Method For Forming A Microelectromechanical Device
App 20170247245 - Dehe; Alfons ; et al. | 2017-08-31 |
Microelectromechanical device and method for forming a microelectromechanical device
Grant 9,745,188 - Dehe , et al. August 29, 2 | 2017-08-29 |
Micro-electro-mechanical system devices
Grant 9,565,488 - Friza , et al. February 7, 2 | 2017-02-07 |
Micro-electro-mechanical System Devices
App 20160345084 - FRIZA; Wolfgang ; et al. | 2016-11-24 |
Capacitive microphone with insulated conductive plate
Grant 9,503,823 - Barzen , et al. November 22, 2 | 2016-11-22 |
Semiconductor devices and methods of forming thereof
Grant 9,458,009 - Dehe , et al. October 4, 2 | 2016-10-04 |
Capacitive Microphone With Insulated Conductive Plate
App 20160192086 - Barzen; Stefan ; et al. | 2016-06-30 |
Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
Grant 9,363,609 - Friza , et al. June 7, 2 | 2016-06-07 |
Method For Manufacturing An Opening Structure And Opening Structure
App 20150341726 - FRIZA; Wolfgang | 2015-11-26 |
Semiconductor Devices and Methods of Forming Thereof
App 20150321901 - Dehe; Alfons ; et al. | 2015-11-12 |
Semiconductor devices and methods of forming thereof
Grant 9,102,519 - Dehe , et al. August 11, 2 | 2015-08-11 |
Semiconductor Devices and Methods of Fabrication Thereof
App 20150145079 - Dehe; Alfons ; et al. | 2015-05-28 |
MEMS structure with adjustable ventilation openings
Grant 9,002,037 - Dehe , et al. April 7, 2 | 2015-04-07 |
Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions
Grant 8,975,107 - Dehe , et al. March 10, 2 | 2015-03-10 |
Semiconductor Devices and Methods of Forming Thereof
App 20140264651 - Dehe; Alfons ; et al. | 2014-09-18 |
Method for Fabricating a Cavity Structure, for Fabricating a Cavity Structure for a Semiconductor Structure and a Semiconductor Microphone Fabricated by the Same
App 20140037116 - Friza; Wolfgang ; et al. | 2014-02-06 |
Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same
Grant 8,575,037 - Friza , et al. November 5, 2 | 2013-11-05 |
Micromechanical sound transducer having a membrane support with tapered surface
Grant 8,461,655 - Klein , et al. June 11, 2 | 2013-06-11 |
Semiconductor Devices and Methods of Fabrication Thereof
App 20120319217 - Dehe; Alfons ; et al. | 2012-12-20 |
Micromechanical Sound Transducer Having a Membrane Support with Tapered Surface
App 20120248554 - Klein; Wolfgang ; et al. | 2012-10-04 |
Method for Fabricating a Cavity Structure, for Fabricating a Cavity Structure for a Semiconductor Structure and a Semiconductor Microphone Fabricated by the Same
App 20120161257 - Friza; Wolfgang ; et al. | 2012-06-28 |
Method for manufacturing a semiconductor component
Grant 6,649,459 - Deboy , et al. November 18, 2 | 2003-11-18 |
Method for manufacturing a semiconductor component
App 20010053568 - Deboy, Gerald ; et al. | 2001-12-20 |
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