Frihauf; Paul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Frihauf; Paul.The latest application filed is for "method of timing laser beam pulses to regulate extreme ultraviolet light dosing".
- Frihauf; Paul - La Jolla CA
| Patent | Date |
|---|---|
| EUV LPP source with improved dose control by combining pulse modulation and pulse control mode Grant 9,755,396 - Frihauf , et al. September 5, 2 | 2017-09-05 |
| Method of timing laser beam pulses to regulate extreme ultraviolet light dosing Grant 8,872,122 - Schafgans , et al. October 28, 2 | 2014-10-28 |
| Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing App 20140191132 - Schafgans; Alexander ; et al. | 2014-07-10 |
| System and Method To Optimize Extreme Ultraviolet Light Generation App 20130320244 - Frihauf; Paul ; et al. | 2013-12-05 |
| System and method to optimize extreme ultraviolet light generation Grant 8,598,552 - Frihauf , et al. December 3, 2 | 2013-12-03 |
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