Patent | Date |
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Modules having multiple optical channels including optical elements at different heights above the optoelectronic devices Grant 10,254,158 - Friese | 2019-04-09 |
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Grant 10,199,426 - Rudmann , et al. Fe | 2019-02-05 |
Optoelectronic Modules That Have Shielding To Reduce Light Leakage Or Stray Light, And Fabrication Methods For Such Modules App 20180102394 - Rudmann; Hartmut ;   et al. | 2018-04-12 |
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Grant 9,859,327 - Rudmann , et al. January 2, 2 | 2018-01-02 |
Magnetically drivable micromirror Grant 9,791,663 - Pinter , et al. October 17, 2 | 2017-10-17 |
Optoelectronic Modules That Have Shielding To Reduce Light Leakage Or Stray Light, And Fabrication Methods For Such Modules App 20170084663 - Rudmann; Hartmut ;   et al. | 2017-03-23 |
Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Grant 9,543,354 - Rudmann , et al. January 10, 2 | 2017-01-10 |
Modules Having Multiple Optical Channels Including Optical Elements At Different Heights Above The Optoelectronic Devices App 20160282176 - FRIESE; Christoph | 2016-09-29 |
Micromechanical component and method for producing a micromechanical component Grant 9,268,130 - Friese February 23, 2 | 2016-02-23 |
Cascaded micromechanical actuator structure Grant 9,195,054 - Pirk , et al. November 24, 2 | 2015-11-24 |
Micromechanical component and method for producing a micromechanical component Grant 9,045,331 - Nitsche , et al. June 2, 2 | 2015-06-02 |
Optoelectronic Modules That Have Shielding To Reduce Light Leakage Or Stray Light, And Fabrication Methods For Such Modules App 20150034975 - Rudmann; Hartmut ;   et al. | 2015-02-05 |
Micromechanical component and a method for operating a micromechanical component Grant 8,896,897 - Pinter , et al. November 25, 2 | 2014-11-25 |
Micromechanical component having an inclined structure and corresponding manufacturing method Grant 8,847,336 - Pirk , et al. September 30, 2 | 2014-09-30 |
Production method for a micromechanical component, and a micromechanical component Grant 8,699,115 - Pinter , et al. April 15, 2 | 2014-04-15 |
Magnetically Drivable Micromirror App 20140092458 - Pinter; Stefan ;   et al. | 2014-04-03 |
Method for manufacturing a micromechanical component, and micromechanical component Grant 8,687,255 - Finkbeiner , et al. April 1, 2 | 2014-04-01 |
Methods for operating an electrostatic drive, and electrostataic drives Grant 8,629,635 - Pirk , et al. January 14, 2 | 2014-01-14 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20130271807 - Nitsche; Heiko ;   et al. | 2013-10-17 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20130271806 - Friese; Christoph | 2013-10-17 |
Device for deflecting light beams Grant 8,503,054 - Friese August 6, 2 | 2013-08-06 |
Micromechanical assembly having a displaceable component Grant 8,384,975 - Pirk , et al. February 26, 2 | 2013-02-26 |
Method For Manufacturing A Micromechanical Component, And Micromechanical Component App 20110279919 - Finkbeiner; Stefan ;   et al. | 2011-11-17 |
Methods For Operating An Electrostatic Drive, And Electrostataic Drives App 20110260658 - Pirk; Tjalf ;   et al. | 2011-10-27 |
Micromechanical Component And A Method For Operating A Micromechanical Component App 20110261428 - Pinter; Stefan ;   et al. | 2011-10-27 |
Electrostatic Drive, Micromechanical Component, And Manufacturing Method For An Electrostatic Drive And A Micromechanical Component App 20110254404 - Pirk; Tjalf ;   et al. | 2011-10-20 |
Cascaded Micromechanical Actuator Structure App 20110248601 - Pirk; Tjalf ;   et al. | 2011-10-13 |
Magnetic Yoke, Micromechanical Component, And Method For The Manufacture Thereof App 20110199172 - Pirk; Tjalf ;   et al. | 2011-08-18 |
Micromechanical Component Having An Inclined Structure And Corresponding Manufacturing Method App 20110147862 - Pirk; Tjalf ;   et al. | 2011-06-23 |
Micromechanical assembly having a displaceable component App 20110090551 - PIRK; Tjalf ;   et al. | 2011-04-21 |
Device for deflecting light beams App 20100202032 - FRIESE; Christoph | 2010-08-12 |
Production Method For A Micromechnical Component, And A Micromechanical Component App 20100014147 - Pinter; Stefan ;   et al. | 2010-01-21 |