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Methods And Systems For Compact, Small Spot Size Soft X-Ray Scatterometry App 20220196576 - Wang; David Y. ;   et al. | 2022-06-23 |
Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction Grant 11,333,621 - Wack , et al. May 17, 2 | 2022-05-17 |
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Laser produced plasma illuminator with liquid sheet jet target Grant 11,259,394 - Chang , et al. February 22, 2 | 2022-02-22 |
System and method for pumping laser sustained plasma with interlaced pulsed illumination sources Grant 11,121,521 - Bezel , et al. September 14, 2 | 2021-09-14 |
Laser Produced Plasma Illuminator With Liquid Sheet Jet Target App 20210136901 - Chang; Chao ;   et al. | 2021-05-06 |
Laser Produced Plasma Illuminator With Low Atomic Number Cryogenic Target App 20210136902 - Chang; Chao ;   et al. | 2021-05-06 |
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Collecting And Recycling Rare Gases In Semiconductor Processing Equipment App 20200294774 - Chang; Chao ;   et al. | 2020-09-17 |
System and Method for Pumping Laser Sustained Plasma with Interlaced Pulsed Illumination Sources App 20200274314 - Bezel; Ilya ;   et al. | 2020-08-27 |
Variable Aperture Mask App 20200271569 - Blasenheim; Barry ;   et al. | 2020-08-27 |
Methods And Systems For Co-Located Metrology App 20200243400 - Wang; David Y. ;   et al. | 2020-07-30 |
Variable aperture mask Grant 10,663,392 - Blasenheim , et al. | 2020-05-26 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 10,451,412 - Adel , et al. Oc | 2019-10-22 |
Systems and methods for metrology beam stabilization Grant 10,365,211 - Blasenheim , et al. July 30, 2 | 2019-07-30 |
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Variable Aperture Mask App 20190049365 - Blasenheim; Barry ;   et al. | 2019-02-14 |
Methods And Systems For Semiconductor Metrology Based On Polychromatic Soft X-Ray Diffraction App 20190017946 - Wack; Daniel ;   et al. | 2019-01-17 |
Periodic patterns and technique to control misalignment between two layers Grant 10,151,584 - Abdulhalim , et al. Dec | 2018-12-11 |
X-Ray Zoom Lens For Small Angle X-Ray Scatterometry App 20180188192 - Artemiev; Nikolay ;   et al. | 2018-07-05 |
Periodic Patterns And Technique To Control Misalignment Between Two Layers App 20180100735 - Abdulhalim; Ibrahim ;   et al. | 2018-04-12 |
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Periodic patterns and techniques to control misalignment between two layers Grant 9,234,745 - Abdulhalim , et al. January 12, 2 | 2016-01-12 |
Periodic Patterns and Techniques to Control Misalignment Between Two Layers App 20150300815 - Abdulhalim; Ibrahim ;   et al. | 2015-10-22 |
Periodic patterns and technique to control misalignment between two layers Grant 9,103,662 - Abdulhalim , et al. August 11, 2 | 2015-08-11 |
Method and system for recommending Geo-tagged items Grant 8,793,248 - Friedmann , et al. July 29, 2 | 2014-07-29 |
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Periodic Patterns and Technique to Control Misalignment Between Two Layers App 20140022563 - Abdulhalim; Ibrahim ;   et al. | 2014-01-23 |
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Periodic patterns and technique to control misaligment between two layers Grant 8,525,994 - Abdulhalim , et al. September 3, 2 | 2013-09-03 |
Method And System For Recommending Geo-tagged Items App 20120303626 - Friedmann; Michael ;   et al. | 2012-11-29 |
Shared Image Database With Geographic Navigation App 20120129554 - FRIEDMANN; Michael | 2012-05-24 |
Shared Image Database With Geographic Navigation App 20110207480 - FRIEDMANN; Michael | 2011-08-25 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,933,016 - Mieher , et al. April 26, 2 | 2011-04-26 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,876,440 - Mieher , et al. January 25, 2 | 2011-01-25 |
Shared Image Database With Geographic Navigation App 20100323756 - FRIEDMANN; Michael | 2010-12-23 |
Shared image database with geographic navigation Grant 7,797,019 - Friedmann September 14, 2 | 2010-09-14 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20100091284 - Mieher; Walter D. ;   et al. | 2010-04-15 |
Periodic Patterns And Technique To Control Misalignment Between Two Layers App 20100073688 - Abdulhalim; Ibrahim ;   et al. | 2010-03-25 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,663,753 - Mieher , et al. February 16, 2 | 2010-02-16 |
Periodic patterns and technique to control misalignment between two layers Grant 7,656,528 - Abdulhalim , et al. February 2, 2 | 2010-02-02 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20090284744 - Mieher; Walter D. ;   et al. | 2009-11-19 |
Periodic Patterns And Technique To Control Misaligment Between Two Layers App 20090231584 - Abdulhalim; Ibrahim ;   et al. | 2009-09-17 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,564,557 - Mieher , et al. July 21, 2 | 2009-07-21 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,433,040 - Mieher , et al. October 7, 2 | 2008-10-07 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,385,699 - Mieher , et al. June 10, 2 | 2008-06-10 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,379,183 - Mieher , et al. May 27, 2 | 2008-05-27 |
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080094630 - Mieher; Walter D. ;   et al. | 2008-04-24 |
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Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20080024766 - Mieher; Walter D. ;   et al. | 2008-01-31 |
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Apparatus and methods for detecting overlay errors using scatterometry Grant 7,301,634 - Mieher , et al. November 27, 2 | 2007-11-27 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,298,481 - Mieher , et al. November 20, 2 | 2007-11-20 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,289,213 - Mieher , et al. October 30, 2 | 2007-10-30 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,280,212 - Mieher , et al. October 9, 2 | 2007-10-09 |
Shared image database with geographic navigation App 20070233368 - Friedmann; Michael | 2007-10-04 |
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals Grant 7,277,172 - Kandel , et al. October 2, 2 | 2007-10-02 |
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,242,477 - Mieher , et al. July 10, 2 | 2007-07-10 |
Periodic Patterns and Technique to Control Misalignment Between Two Layers App 20070127025 - Abdulhalim; Ibrahim ;   et al. | 2007-06-07 |
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals App 20060274310 - Kandel; Daniel ;   et al. | 2006-12-07 |
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Periodic patterns and technique to control misalignment between two layers App 20040229471 - Abdulhalim, Ibrahim ;   et al. | 2004-11-18 |
Apparatus and method for detecting overlay errors using scatterometry App 20040169861 - Mieher, Walter D. ;   et al. | 2004-09-02 |
Periodic patterns and technique to control misalignment between two layers App 20040061857 - Abdulhalim, Ibrahim ;   et al. | 2004-04-01 |
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