Freimann; Rolf

Patent Applications and Registrations

Patent applications and USPTO patent grants for Freimann; Rolf.The latest application filed is for "optical system".

Company Profile

7.45.49

Freimann; Rolf - Aalen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and assembly for analysing the wavefront effect of an optical system Grant 11,426,067 - Freimann August 30, 2	2022-08-30
Optical System App 20220236652 - Freimann; Rolf ; et al.	2022-07-28
Measuring Apparatus For Interferometrically Determining A Surface Shape App 20220221269 - SCHULTE; Stefan ; et al.	2022-07-14
Method For Producing Or Setting A Projection Exposure Apparatus App 20220043358 - Freimann; Rolf	2022-02-10
Wafer holding device and projection microlithography system Grant 10,948,833 - Freimann March 16, 2	2021-03-16
Method And Assembly For Analysing The Wavefront Effect Of An Optical System App 20210022602 - FREIMANN; Rolf	2021-01-28
Imaging optical system for microlithography Grant 10,754,132 - Rogalsky , et al. A	2020-08-25
Wafer Holding Device And Projection Microlithography System App 20200218163 - FREIMANN; Rolf	2020-07-09
Optical System App 20190354025 - Freimann; Rolf ; et al.	2019-11-21
Optical system Grant 10,386,733 - Freimann , et al. A	2019-08-20
Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,359,703 - Freimann , et al. July 23, 2	2019-07-23
Method for producing a lens for a lithography apparatus, and measurement system Grant 10,345,547 - Fritzsche , et al. July 9, 2	2019-07-09
Projection Exposure System For Microlithography With A Measurement Device App 20190129318 - Mueller; Ulrich ; et al.	2019-05-02
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20190049853 - FREIMANN; Rolf ; et al.	2019-02-14
Method for aligning a mirror of a microlithographic projection exposure apparatus Grant 10,101,667 - Freimann , et al. October 16, 2	2018-10-16
Projection exposure system for microlithography with a measurement device Grant 10,042,271 - Mueller , et al. August 7, 2	2018-08-07
Optical imaging device with image defect determination Grant 9,996,014 - Freimann , et al. June 12, 2	2018-06-12
Optical System App 20180101105 - Freimann; Rolf ; et al.	2018-04-12
Method For Producing A Lens For A Lithography Apparatus, And Measurement System App 20180074278 - Fritzsche; Steffen ; et al.	2018-03-15
Projection Exposure System For Microlithography With A Measurement Device App 20180024445 - Mueller; Ulrich ; et al.	2018-01-25
Optical Device App 20170284893 - FREIMANN; Rolf ; et al.	2017-10-05
Projection objective of a microlithographic projection exposure apparatus Grant 9,720,329 - Enkisch , et al. August 1, 2	2017-08-01
Projection exposure system for microlithography with a measurement device Grant 9,696,639 - Mueller , et al. July 4, 2	2017-07-04
Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective Grant 9,575,224 - Freimann , et al. February 21, 2	2017-02-21
Optical device Grant 9,568,394 - Freimann , et al. February 14, 2	2017-02-14
Method For Aligning A Mirror Of A Microlithographic Projection Exposure Apparatus App 20170023865 - FREIMANN; Rolf ; et al.	2017-01-26
Measuring system Grant 9,482,968 - Goeppert , et al. November 1, 2	2016-11-01
Optical Imaging Device With Image Defect Determination App 20160246182 - FREIMANN; Rolf ; et al.	2016-08-25
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20160195817 - Enkisch; Hartmut ; et al.	2016-07-07
Projection arrangement Grant 9,377,694 - Freimann , et al. June 28, 2	2016-06-28
Optical imaging device with image defect determination Grant 9,235,131 - Freimann , et al. January 12, 2	2016-01-12
Projection Exposure System For Microlithography With A Measurement Device App 20150212431 - Mueller; Ulrich ; et al.	2015-07-30
Projection exposure system for microlithography with a measurement device Grant 9,001,304 - Mueller , et al. April 7, 2	2015-04-07
Projection exposure system and use thereof Grant 8,908,149 - Freimann December 9, 2	2014-12-09
Projection exposure tool for microlithography with a radiation detector detecting radiation with high resolution over a two-dimensional area Grant 8,822,942 - Freimann September 2, 2	2014-09-02
Measuring System App 20140118712 - GOEPPERT; Markus ; et al.	2014-05-01
Projection Arrangement App 20140104587 - Freimann; Rolf ; et al.	2014-04-17
Method Of Measuring A Shape Of An Optical Surface Based On Computationally Combined Surface Region Measurements And Interferometric Measuring Device App 20140078513 - FREIMANN; Rolf ; et al.	2014-03-20
Optical system, in particular in a microlithographic projection exposure apparatus Grant 8,654,345 - Hof , et al. February 18, 2	2014-02-18
Optical Device App 20140023835 - FREIMANN; Rolf ; et al.	2014-01-23
Optical Imaging Device With Image Defect Determination App 20140016108 - FREIMANN; Rolf ; et al.	2014-01-16
Apparatus And Method For The Locally Resolved Measurement Of A Radiation Distribution Produced Using A Lithography Mask App 20130334426 - FREIMANN; Rolf	2013-12-19
Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Grant 8,593,642 - Freimann , et al. November 26, 2	2013-11-26
Mirror, Projection Objective With Such Mirror, And Projection Exposure Apparatus For Microlithography With Such Projection Objective App 20130286471 - FREIMANN; Rolf ; et al.	2013-10-31
Apparatus and method for the locally resolved measurement of a radiation distribution produced using a lithography mask Grant 8,541,752 - Freimann September 24, 2	2013-09-24
Projection objective of a microlithographic projection exposure apparatus designed forEUV and a method of optically adjusting a projection objective App 20130242278 - Enkisch; Hartmut ; et al.	2013-09-19
Optical imaging device with image defect determination Grant 8,537,333 - Freimann , et al. September 17, 2	2013-09-17
Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution Grant 8,537,332 - Freimann September 17, 2	2013-09-17
Imaging Optical System for Microlithography App 20130188246 - Rogalsky; Olaf ; et al.	2013-07-25
Apparatus And Method For The Locally Resolved Measurement Of A Radiation Distribution Produced Using A Lithography Mask App 20130105698 - FREIMANN; Rolf	2013-05-02
Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface Grant 8,345,262 - Schillke , et al. January 1, 2	2013-01-01
Measurement Of An Imaging Optical System By Superposition Of Patterns App 20120249985 - WISCHMEIER; Lars ; et al.	2012-10-04
Method Of Measuring A Shape Of An Optical Surface And Interferometric Measuring Device App 20120229814 - FREIMANN; Rolf ; et al.	2012-09-13
Projection illumination system Grant 8,228,485 - Freimann , et al. July 24, 2	2012-07-24
Optical System, In Particular In A Microlithographic Projection Exposure Apparatus App 20120140241 - Hof; Albrecht ; et al.	2012-06-07
Method And Apparatus For Determining A Deviation Of An Actual Shape From A Desired Shape Of An Optical Surface App 20120127481 - SCHILLKE; Frank ; et al.	2012-05-24
Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface Grant 8,104,905 - Schillke , et al. January 31, 2	2012-01-31
Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure Grant 8,089,634 - Hetzler , et al. January 3, 2	2012-01-03
Optical Imaging Device With Image Defect Determination App 20110164232 - FREIMANN; Rolf ; et al.	2011-07-07
Projection Exposure System For Microlithography With A Measurement Device App 20110013171 - Mueller; Ulrich ; et al.	2011-01-20
Optical Element And Method Of Calibrating A Measuring Apparatus Comprising A Wave Shaping Structure App 20100177321 - HETZLER; Jochen ; et al.	2010-07-15
Projection Exposure Tool For Microlithography With A Measuring Apparatus And Method For Measuring An Irradiation Strength Distribution App 20100020302 - Freimann; Rolf	2010-01-28
Method of aligning an optical system Grant 7,643,149 - Freimann , et al. January 5, 2	2010-01-05
Method of aligning an optical system App 20090231593 - Freimann; Rolf ; et al.	2009-09-17
Method of manufacturing an optical component Grant 7,581,305 - Geuppert , et al. September 1, 2	2009-09-01
Method And Apparatus For Determining A Deviation Of An Actual Shape From A Desired Shape Of An Optical Surface App 20090128829 - Schillke; Frank ; et al.	2009-05-21
Projection Exposure System And Use Thereof App 20090097000 - Freimann; Rolf	2009-04-16
Projection exposure system and method of manufacturing a miniaturized device Grant 7,508,488 - Freimann , et al. March 24, 2	2009-03-24
Projection Illumination System App 20090002663 - FREIMANN; Rolf ; et al.	2009-01-01
Method and means for determining the shape of a rough surface of an object Grant 7,403,290 - Freimann July 22, 2	2008-07-22
Refractive projection objective Grant 7,382,540 - Rostalski , et al. June 3, 2	2008-06-03
Illumination Device And Mask For Microlithography Projection Exposure System, And Related Methods App 20080094600 - Freimann; Rolf	2008-04-24
Method of processing an optical element using an interferometer having an aspherical lens that transforms a first spherical beam type into a second spherical beam type Grant 7,342,667 - Freimann , et al. March 11, 2	2008-03-11
Refractive projection objective App 20070247722 - Rostalski; Hans-Juergen ; et al.	2007-10-25
Refractive projection objective Grant 7,190,527 - Rostalski , et al. March 13, 2	2007-03-13
Method for calibrating a radius test bench Grant 7,154,612 - Freimann December 26, 2	2006-12-26
Method of manufacturing an optical system Grant 7,133,225 - Freimann , et al. November 7, 2	2006-11-07
Method for calibrating an interferometer apparatus, for qualifying an optical surface, and for manufacturing a substrate having an optical surface Grant 7,050,175 - Freimann , et al. May 23, 2	2006-05-23
Projection exposure system and method of manufacturing a miniaturized device App 20060098210 - Freimann; Rolf ; et al.	2006-05-11
Method of calibrating an interferometer and method of manufacturing an optical element App 20050275849 - Freimann, Rolf ; et al.	2005-12-15
Refractive projection objective App 20050231813 - Rostalski, Hans-Juergen ; et al.	2005-10-20
Method for measuring and manufacturing an optical element and optical apparatus App 20050225774 - Freimann, Rolf ; et al.	2005-10-13
Method of manufacturing an optical component and optical system using the same App 20050223539 - Geuppert, Bernhard ; et al.	2005-10-13
Method for absolute calibration of an interferometer Grant 6,940,607 - Freimann , et al. September 6, 2	2005-09-06
System for interferometric fit testing App 20040174531 - Freimann, Rolf	2004-09-09
Method for calibrating a radius test bench App 20030223081 - Freimann, Rolf	2003-12-04
Method for absolute calibration of an interferometer App 20030025915 - Freimann, Rolf ; et al.	2003-02-06

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