Freeman; Dean W.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Freeman; Dean W..The latest application filed is for "method for deposition of silicon oxide on a wafer".
- Freeman; Dean W. - Plano TX
- Freeman; Dean W. - San Diego CA
- Freeman; Dean W. - Garland TX
| Patent | Date |
|---|---|
| Method for deposition of silicon oxide on a wafer Grant 4,988,533 - Freeman , et al. January 29, 1 | 1991-01-29 |
| Plasma and plasma UV deposition of SiO.sub.2 Grant 4,916,091 - Freeman , et al. April 10, 1 | 1990-04-10 |
| Processing apparatus and method Grant 4,911,103 - Davis , et al. March 27, 1 | 1990-03-27 |
| Processing apparatus and method Grant 4,910,043 - Freeman , et al. March 20, 1 | 1990-03-20 |
| Method for wafer treating Grant 4,906,328 - Freeman , et al. March 6, 1 | 1990-03-06 |
| Deposition of polysilicon using a remote plasma and in situ generation of UV light. Grant 4,882,299 - Freeman , et al. November 21, 1 | 1989-11-21 |
| In situ doped polysilicon using tertiary butyl phosphine Grant 4,877,753 - Freeman October 31, 1 | 1989-10-31 |
| Method and apparatus for cleaning integrated circuit wafers Grant 4,863,561 - Freeman , et al. September 5, 1 | 1989-09-05 |
| Processing apparatus and method Grant 4,822,450 - Davis , et al. April 18, 1 | 1989-04-18 |
| Oxide deposition method Grant 4,810,673 - Freeman March 7, 1 | 1989-03-07 |
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