Franzen; Paul

Patent Applications and Registrations

Patent applications and USPTO patent grants for Franzen; Paul.The latest application filed is for "method and apparatus for rf compensation in plasma assisted atomic layer deposition".

Company Profile

0.9.4

Franzen; Paul - West Linn OR
Franzen; Paul - Gilbert AZ
Franzen; Paul - Grevenbroich DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for RF compensation in plasma assisted atomic layer deposition Grant 9,624,578 - Qian , et al. April 18, 2	2017-04-18
Method And Apparatus For Rf Compensation In Plasma Assisted Atomic Layer Deposition App 20160090650 - Qian; Jun ; et al.	2016-03-31
Methods for monitoring thickness of a conductive layer Grant 9,007,059 - Lahiri , et al. April 14, 2	2015-04-14
Methods And Apparatuses For Determining Thickness Of A Conductive Layer App 20120129277 - Lahiri; Sudeep Kumar ; et al.	2012-05-24
Methods and apparatuses for determining thickness of a conductive layer Grant 8,106,651 - Lahiri , et al. January 31, 2	2012-01-31
High throughput servo load cup with integrated wet chemistry delivery Grant 7,811,153 - Blank , et al. October 12, 2	2010-10-12
Methods And Apparatuses For Determining Thickness Of A Conductive Layer App 20090263918 - Lahiri; Sudeep Kumar ; et al.	2009-10-22
Method for monitoring edge exclusion during chemical mechanical planarization Grant 7,428,470 - Brown , et al. September 23, 2	2008-09-23
Method For Monitoring Edge Exclusion During Chemical Mechanical Planarization App 20080200099 - Brown; Brian ; et al.	2008-08-21
Methods for monitoring a chemical mechanical planarization process of a metal layer using an in-situ eddy current measuring system Grant 7,264,537 - Laursen , et al. September 4, 2	2007-09-04
Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization Grant 7,115,017 - Laursen , et al. October 3, 2	2006-10-03
Centrifuge with two withdrawal chambers Grant 4,895,666 - Franzen , et al. January 23, 1	1990-01-23

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