Franken; Walter

Patent Applications and Registrations

Patent applications and USPTO patent grants for Franken; Walter.The latest application filed is for "cvd or pvd reactor for coating large-area substrates".

Company Profile

1.6.16

Franken; Walter - Eschweiler DE
FRANKEN; Walter - Eschweile DE
Franken; Walter - Eschwiler DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
CVD or PVD reactor for coating large-area substrates Grant 10,822,701 - Franken , et al. November 3, 2	2020-11-03
Transport module for a semiconductor fabrication device or coupling device Grant 9,847,241 - Freundt , et al. December 19, 2	2017-12-19
Cvd Or Pvd Reactor For Coating Large-area Substrates App 20170314134 - FRANKEN; Walter ; et al.	2017-11-02
Transport Module For A Semiconductor Fabrication Device Or Coupling Device App 20160079104 - FREUNDT; Martin ; et al.	2016-03-17
Shadow mask held magnetically on a substrate support Grant 9,045,818 - Gersdorff , et al. June 2, 2	2015-06-02
Coating Device And Method For Operating A Coating Device Having A Shielding Plate App 20130040054 - Strauch; Gerhard Karl ; et al.	2013-02-14
Device for the temperature control of the surface temperatures of substrates in a CVD reactor Grant 8,308,867 - Franken , et al. November 13, 2	2012-11-13
Mocvd Reactor Having A Ceiling Panel Coupled Locally Differently To A Heat Dissipation Member App 20120003389 - Brien; Daniel ; et al.	2012-01-05
Shadow Mask Held Magnetically On A Substrate Support App 20110174217 - Gersdorff; Markus ; et al.	2011-07-21
Device For The Temperature Control Of The Surface Temperatures Of Substrates In A Cvd Reactor App 20100170435 - Franken; Walter ; et al.	2010-07-08
Source Container Of A Vpe Reactor App 20090183682 - Franken; Walter ; et al.	2009-07-23
Apparatus and Method for Controlling the Surface Temperature of a Substrate in a Process Chamber App 20090110805 - Kaeppeler; Johannes ; et al.	2009-04-30
Cvd-Reactor with Slidingly Mounted Susceptor Holder App 20080251020 - Franken; Walter ; et al.	2008-10-16
CVD reactor with stabilized process chamber height App 20070074661 - Franken; Walter ; et al.	2007-04-05
Mask-retaining device App 20060124055 - Franken; Walter ; et al.	2006-06-15
Reaction chamber with at least one HF feedthrough Grant 7,056,388 - Franken , et al. June 6, 2	2006-06-06
Device for depositing thin layers with a wireless detection of process parameters App 20050092246 - Baumann, Peter ; et al.	2005-05-05
Process and device for depositing in particular crystalline layers on in particular crystalline substrates App 20050000441 - Kaeppeler, Johannes ; et al.	2005-01-06
Process chamber with a base with sectionally different rotational drive and layer deposition method in such a process chamber App 20040231599 - Schwambera, Markus ; et al.	2004-11-25
Reaction chamber with at least one HF feedthrough App 20030111015 - Franken, Walter ; et al.	2003-06-19

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