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Patent applications and USPTO patent grants for Franken; Robert.The latest application filed is for "method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier".
Patent | Date |
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Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier Grant 8,208,118 - Burry , et al. June 26, 2 | 2012-06-26 |
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system Grant 7,869,022 - Van Boxmeer , et al. January 11, 2 | 2011-01-11 |
Method for Determining Exposure Settings, Lithographic Exposure Apparatus, Computer Program and Data Carrier App 20090201473 - BURRY; David Warren ;   et al. | 2009-08-13 |
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system App 20090021708 - Boxmeer; Johan Maria Van ;   et al. | 2009-01-22 |
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