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Patent applications and USPTO patent grants for FRANKE; Joern-Holger.The latest application filed is for "method and apparatus for photolithographic imaging".
Patent | Date |
---|---|
Method And Apparatus For Photolithographic Imaging App 20220236645 - FRANKE; Joern-Holger ;   et al. | 2022-07-28 |
Extreme ultraviolet lithography device Grant 11,360,380 - Franke , et al. June 14, 2 | 2022-06-14 |
Lithography scanner Grant 11,181,818 - Gallagher , et al. November 23, 2 | 2021-11-23 |
Extreme Ultraviolet Lithography Device App 20210011370 - Franke; Joern-Holger ;   et al. | 2021-01-14 |
Lithography Scanner App 20200209737 - Gallagher; Emily ;   et al. | 2020-07-02 |
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