Fragner; Heinrich
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fragner; Heinrich.The latest application filed is for "global point spreading function in multi-beam patterning".
- Fragner; Heinrich - Vienna AT
| Patent | Date |
|---|---|
| Global point spreading function in multi-beam patterning Grant 8,278,635 - Platzgummer , et al. October 2, 2 | 2012-10-02 |
| Compensation of dose inhomogeneity and image distortion Grant 8,258,488 - Platzgummer , et al. September 4, 2 | 2012-09-04 |
| Method for maskless particle-beam exposure Grant 8,222,621 - Fragner , et al. July 17, 2 | 2012-07-17 |
| Method for producing a multi-beam deflector array device having electrodes Grant 8,198,601 - Platzgummer , et al. June 12, 2 | 2012-06-12 |
| Constant current multi-beam patterning Grant 8,057,972 - Fragner , et al. November 15, 2 | 2011-11-15 |
| Global Point Spreading Function in Multi-Beam Patterning App 20100224790 - Platzgummer; Elmar ; et al. | 2010-09-09 |
| Method for maskless particle-beam exposure Grant 7,777,201 - Fragner , et al. August 17, 2 | 2010-08-17 |
| Method For Producing A Multi-beam Deflector Array Device Having Electrodes App 20100187434 - Platzgummer; Elmar ; et al. | 2010-07-29 |
| Method For Maskless Particle-beam Exposure App 20100127185 - Fragner; Heinrich ; et al. | 2010-05-27 |
| Constant Current Multi-beam Patterning App 20100124722 - Fragner; Heinrich ; et al. | 2010-05-20 |
| Compensation Of Dose Inhomogeneity And Image Distortion App 20100038554 - Platzgummer; Elmar ; et al. | 2010-02-18 |
| Method For Maskless Particle-beam Exposure App 20080237460 - Fragner; Heinrich ; et al. | 2008-10-02 |
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