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Patent applications and USPTO patent grants for Forstner; Hali J. L..The latest application filed is for "multi-step anneal of thin films for film densification and improved gap-fill".
Patent | Date |
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Multi-step anneal of thin films for film densification and improved gap-fill Grant 7,642,171 - Ingle , et al. January 5, 2 | 2010-01-05 |
Multi-step Anneal Of Thin Films For Film Densification And Improved Gap-fill App 20070212847 - Ingle; Nitin K. ;   et al. | 2007-09-13 |
Multi-step Anneal Of Thin Films For Film Densification And Improved Gap-fill App 20070000897 - Ingle; Nitin K. ;   et al. | 2007-01-04 |
Multi-step anneal of thin films for film densification and improved gap-fill App 20060030165 - Ingle; Nitin K. ;   et al. | 2006-02-09 |
Point-of-use Exhaust By-product Reactor App 20010008618 - COMITA, PAUL B. ;   et al. | 2001-07-19 |
Method of cleaning CVD cold-wall chamber and exhaust lines Grant 6,042,654 - Comita , et al. March 28, 2 | 2000-03-28 |
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