Fomenkov; Igor Vladimirovich
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fomenkov; Igor Vladimirovich.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".
- Fomenkov; Igor Vladimirovich - San Diego CA
| Patent | Date |
|---|---|
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al. | 2022-09-15 |
| Oxygen-loss Resistant Top Coating For Optical Elements App 20220260756 - Ma; Yue ; et al. | 2022-08-18 |
| Laser System For Source Material Conditioning In An Euv Light Source App 20220192000 - Fomenkov; Igor Vladimirovich ; et al. | 2022-06-16 |
| Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2 | 2022-05-24 |
| System For Monitoring A Plasma App 20220151052 - Purvis; Michael Anthony ; et al. | 2022-05-12 |
| System for monitoring a plasma Grant 11,266,002 - Purvis , et al. March 1, 2 | 2022-03-01 |
| Laser System For Target Metrology And Alteration In An Euv Light Source App 20210263422 - Rafac; Robert Jay ; et al. | 2021-08-26 |
| Guiding Device And Associated System App 20210141311 - LABETSKI; Dzmitry ; et al. | 2021-05-13 |
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al. | 2021-04-15 |
| Guiding device and associated system Grant 10,955,749 - Labetski , et al. March 23, 2 | 2021-03-23 |
| System For Monitoring A Plasma App 20200344868 - Purvis; Michael Anthony ; et al. | 2020-10-29 |
| Wavelength-based optical filtering Grant 10,663,866 - Schafgans , et al. | 2020-05-26 |
| Guiding Device And Associated System App 20200089124 - LABETSKI; Dzmitry ; et al. | 2020-03-19 |
| Wavelength-based Optical Filtering App 20180081280 - Schafgans; Alexander Anthony ; et al. | 2018-03-22 |
| Target for extreme ultraviolet light source Grant 9,462,668 - Tao , et al. October 4, 2 | 2016-10-04 |
| Target For Extreme Ultraviolet Light Source App 20160029471 - Tao; Yezheng ; et al. | 2016-01-28 |
| Excimer laser with greater spectral bandwidth and beam stability Grant 5,898,725 - Fomenkov , et al. April 27, 1 | 1999-04-27 |
| Aerodynamic chamber design for high pulse repetition rate excimer lasers Grant 5,771,258 - Morton , et al. June 23, 1 | 1998-06-23 |
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