Fomenkov; Igor V.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fomenkov; Igor V..The latest application filed is for "method of controlling debris in an euv light source".
Company Profile
3.157.128
- Fomenkov; Igor V. - San Diego CA
- Fomenkov; Igor V - San Diego CA
Patent Activity
| Patent | Date |
|---|---|
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 10,966,308 - Partlo , et al. March 30, 2 | 2021-03-30 |
| Faceted EUV optical element Grant 10,635,002 - Brandt , et al. | 2020-04-28 |
| Method of controlling debris in an EUV light source Grant 10,490,313 - Ershov , et al. Nov | 2019-11-26 |
| Method Of Controlling Debris In An Euv Light Source App 20190080811 - ERSHOV; Alexander I. ; et al. | 2019-03-14 |
| Apparatus For And Method Of Controlling Debris In An Euv Light Source App 20180330841 - Ershov; Alexander I. ; et al. | 2018-11-15 |
| Apparatus for and method of controlling debris in an EUV light source Grant 10,128,017 - Ershov , et al. November 13, 2 | 2018-11-13 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180184509 - Partlo; William N. ; et al. | 2018-06-28 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20180020532 - Partlo; William N. ; et al. | 2018-01-18 |
| EUV LPP source with dose control and laser stabilization using variable width laser pulses Grant 9,832,852 - Fomenkov , et al. November 28, 2 | 2017-11-28 |
| Drive laser for EUV light source Grant 9,735,535 - Ershov , et al. August 15, 2 | 2017-08-15 |
| Laser produced plasma EUV light source Grant 9,713,239 - Hansson , et al. July 18, 2 | 2017-07-18 |
| Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material Grant 9,669,334 - Fomenkov , et al. June 6, 2 | 2017-06-06 |
| Faceted Euv Optical Element App 20170097572 - Brandt; David C. ; et al. | 2017-04-06 |
| Faceted EUV optical element Grant 9,541,840 - Brandt , et al. January 10, 2 | 2017-01-10 |
| Systems and methods for buffer gas flow stabilization in a laser produced plasma light source Grant 9,516,730 - Fleurov , et al. December 6, 2 | 2016-12-06 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 9,390,827 - Partlo , et al. July 12, 2 | 2016-07-12 |
| Faceted Euv Optical Element App 20160179012 - BRANDT; David C. ; et al. | 2016-06-23 |
| Beam position control for an extreme ultraviolet light source Grant 9,167,679 - Fleurov , et al. October 20, 2 | 2015-10-20 |
| Target for extreme ultraviolet light source Grant 9,155,179 - Tao , et al. October 6, 2 | 2015-10-06 |
| Beam Position Control For An Extreme Ultraviolet Light Source App 20150257246 - Fleurov; Vladimir B. ; et al. | 2015-09-10 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 9,119,278 - Chrobak , et al. August 25, 2 | 2015-08-25 |
| Filter For Material Supply Apparatus Of An Extreme Ultraviolet Light Source App 20150209701 - Fomenkov; Igor V. ; et al. | 2015-07-30 |
| Filter for material supply apparatus of an extreme ultraviolet light source Grant 9,029,813 - Fomenkov , et al. May 12, 2 | 2015-05-12 |
| Systems and methods for optics cleaning in an EUV light source Grant 9,000,404 - Bykanov , et al. April 7, 2 | 2015-04-07 |
| Beam position control for an extreme ultraviolet light source Grant 9,000,405 - Fleurov , et al. April 7, 2 | 2015-04-07 |
| Target For Extreme Ultraviolet Light Source App 20150076374 - Tao; Yezheng ; et al. | 2015-03-19 |
| Master oscillator--power amplifier drive laser with pre-pulse for EUV light source Grant 8,958,143 - Hou , et al. February 17, 2 | 2015-02-17 |
| Target for extreme ultraviolet light source Grant 8,912,514 - Tao , et al. December 16, 2 | 2014-12-16 |
| EUV optics Grant 8,907,310 - Bowering , et al. December 9, 2 | 2014-12-09 |
| Laser system Grant 8,908,735 - Ershov , et al. December 9, 2 | 2014-12-09 |
| System and method for laser beam focus control for extreme ultraviolet laser produced plasma source Grant 8,872,144 - Fomenkov October 28, 2 | 2014-10-28 |
| Extreme ultraviolet light source Grant 8,866,110 - Tao , et al. October 21, 2 | 2014-10-21 |
| Target For Extreme Ultraviolet Light Source App 20140299791 - Tao; Yezheng ; et al. | 2014-10-09 |
| System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror Grant 8,847,183 - Partlo , et al. September 30, 2 | 2014-09-30 |
| Beam Position Control For An Extreme Ultraviolet Light Source App 20140264091 - Fleurov; Vladimir B. ; et al. | 2014-09-18 |
| Extreme Ultraviolet Light Source App 20140264092 - Tao; Yezheng ; et al. | 2014-09-18 |
| Target for extreme ultraviolet light source Grant 8,791,440 - Tao , et al. July 29, 2 | 2014-07-29 |
| Laser-produced-plasma EUV light source Grant 8,785,892 - Ershov , et al. July 22, 2 | 2014-07-22 |
| Euv Optics App 20140176926 - BOWERING; Norbert R. ; et al. | 2014-06-26 |
| Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EUV Light Source App 20140146387 - Hou; Kai-Chung ; et al. | 2014-05-29 |
| EUV Light Source With Subsystem(s) For Maintaining LPP Drive Laser Output During EUV Non-Output Periods App 20140145096 - Partlo; William N. ; et al. | 2014-05-29 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20140110609 - Bykanov; Alexander N. ; et al. | 2014-04-24 |
| Laser produced plasma EUV light source Grant 8,704,200 - Bykanov , et al. April 22, 2 | 2014-04-22 |
| System, Method and Apparatus for Aligning and Synchronizing Target Material for Optimum Extreme Ultraviolet Light Output App 20140103229 - Chroback; Christopher C. ; et al. | 2014-04-17 |
| Extreme ultraviolet light source Grant 8,680,495 - Tao , et al. March 25, 2 | 2014-03-25 |
| System, Method and Apparatus for Laser Produced Plasma Extreme Ultraviolet Chamber with Hot Walls and Cold Collector Mirror App 20140048099 - Partlo; William N. ; et al. | 2014-02-20 |
| Master oscillator-power amplifier drive laser with pre-pulse for EUV light source Grant 8,654,438 - Hou , et al. February 18, 2 | 2014-02-18 |
| System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output Grant 8,653,491 - Partlo , et al. February 18, 2 | 2014-02-18 |
| EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods Grant 8,653,437 - Partlo , et al. February 18, 2 | 2014-02-18 |
| Systems and methods for optics cleaning in an EUV light source Grant 8,633,459 - Bykanov , et al. January 21, 2 | 2014-01-21 |
| Drive Laser For Euv Light Source App 20130321901 - Ershov; Alexander I. ; et al. | 2013-12-05 |
| EUV optics Grant 8,598,549 - Bowering , et al. December 3, 2 | 2013-12-03 |
| System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror Grant 8,575,575 - Partlo , et al. November 5, 2 | 2013-11-05 |
| Drive laser for EUV light source Grant 8,514,486 - Ershov , et al. August 20, 2 | 2013-08-20 |
| Oscillator-amplifier drive laser with seed protection for an EUV light source Grant 8,462,425 - Hou , et al. June 11, 2 | 2013-06-11 |
| LPP EUV light source drive laser system Grant 8,461,560 - Ershov , et al. June 11, 2 | 2013-06-11 |
| Systems And Methods For Buffer Gas Flow Stabilization In A Laser Produced Plasma Light Source App 20120313016 - Fleurov; Vladimir B. ; et al. | 2012-12-13 |
| Laser-Produced-Plasma EUV Light Source App 20120305810 - Ershov; Alexander I. ; et al. | 2012-12-06 |
| Filter for Material Supply Apparatus App 20120292527 - Fomenkov; Igor V. ; et al. | 2012-11-22 |
| EUV light source components and methods for producing, using and refurbishing same Grant 8,314,398 - Bowering , et al. November 20, 2 | 2012-11-20 |
| EUV light producing system and method utilizing an alignment laser Grant 8,304,752 - Fomenkov , et al. November 6, 2 | 2012-11-06 |
| Systems and methods for drive laser beam delivery in an EUV light source Grant 8,283,643 - Partlo , et al. October 9, 2 | 2012-10-09 |
| Systems and methods for target material delivery protection in a laser produced plasma EUV light source Grant 8,263,953 - Fomenkov , et al. September 11, 2 | 2012-09-11 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20120223256 - Bykanov; Alexander N. ; et al. | 2012-09-06 |
| Bandwidth control device Grant 8,259,764 - Fomenkov , et al. September 4, 2 | 2012-09-04 |
| Laser Produced Plasma Euv Light Source App 20120193547 - Hansson; Bjorn A. M. ; et al. | 2012-08-02 |
| Gas management system for a laser-produced-plasma EUV light source Grant 8,198,615 - Bykanov , et al. June 12, 2 | 2012-06-12 |
| Beam transport system for extreme ultraviolet light source Grant 8,173,985 - Bergstedt , et al. May 8, 2 | 2012-05-08 |
| Laser system Grant 8,170,078 - Ershov , et al. May 1, 2 | 2012-05-01 |
| Oscillator-amplifier Drive Laser With Seed Protection For An Euv Light Source App 20120092746 - Hou; Kai-Chung ; et al. | 2012-04-19 |
| Euv Light Source With Subsystem(s) For Maintaining Lpp Drive Laser Output During Euv Non-output Periods App 20120080584 - Partlo; William N. ; et al. | 2012-04-05 |
| System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber Grant 8,138,487 - Vaschenko , et al. March 20, 2 | 2012-03-20 |
| Laser System App 20120002687 - Ershov; Alexander I. ; et al. | 2012-01-05 |
| Master Oscillator-power Amplifier Drive Laser With Pre-pulse For Euv Light Source App 20110317256 - Hou; Kai-Chung ; et al. | 2011-12-29 |
| EUV collector debris management Grant 8,075,732 - Partlo , et al. December 13, 2 | 2011-12-13 |
| Systems And Methods For Target Material Delivery Protection In A Laser Produced Plasma Euv Light Source App 20110248191 - Fomenkov; Igor V. ; et al. | 2011-10-13 |
| Laser produced plasma EUV light source Grant 8,035,092 - Bykanov , et al. October 11, 2 | 2011-10-11 |
| Drive laser delivery systems for EUV light source Grant 8,017,924 - Bykanov , et al. September 13, 2 | 2011-09-13 |
| Metrology for extreme ultraviolet light source Grant 8,000,212 - Senekerimyan , et al. August 16, 2 | 2011-08-16 |
| Laser system Grant 7,999,915 - Ershov , et al. August 16, 2 | 2011-08-16 |
| LPP EUV Light Source Drive Laser System App 20110192995 - Ershov; Alexander I. ; et al. | 2011-08-11 |
| Beam Transport System for Extreme Ultraviolet Light Source App 20110140008 - Bergstedt; Robert A. ; et al. | 2011-06-16 |
| Metrology for Extreme Ultraviolet Light Source App 20110141865 - Senekerimyan; Vahan ; et al. | 2011-06-16 |
| Laser System App 20110102759 - Ershov; Alexander I. ; et al. | 2011-05-05 |
| LPP EUV light source drive laser system Grant 7,928,417 - Ershov , et al. April 19, 2 | 2011-04-19 |
| Laser produced plasma EUV light source Grant 7,928,416 - Fomenkov April 19, 2 | 2011-04-19 |
| Laser produced plasma EUV light source App 20110079736 - Hansson; Bjorn A. M. ; et al. | 2011-04-07 |
| EUV Optics App 20110075253 - Bowering; Norbert R. ; et al. | 2011-03-31 |
| Drive laser for EUV light source App 20110058588 - Ershov; Alexander I. ; et al. | 2011-03-10 |
| Laser system Grant 7,885,309 - Ershov , et al. February 8, 2 | 2011-02-08 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source Grant 7,872,245 - Vaschenko , et al. January 18, 2 | 2011-01-18 |
| Alignment Laser App 20100327192 - Fomenkov; Igor V. ; et al. | 2010-12-30 |
| Method and apparatus for EUV plasma source target delivery Grant 7,838,854 - Algots , et al. November 23, 2 | 2010-11-23 |
| Laser system Grant 7,822,092 - Ershov , et al. October 26, 2 | 2010-10-26 |
| System, Method And Apparatus For Laser Produced Plasma Extreme Ultraviolet Chamber With Hot Walls And Cold Collector Mirror App 20100258749 - Partlo; William N. ; et al. | 2010-10-14 |
| System, Method And Apparatus For Droplet Catcher For Prevention Of Backsplash In A Euv Generation Chamber App 20100258748 - Vaschenko; Georgiy O. ; et al. | 2010-10-14 |
| System, Method And Apparatus For Aligning And Synchronizing Target Material For Optimum Extreme Ultraviolet Light Output App 20100258750 - Partlo; William N. ; et al. | 2010-10-14 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus Grant 7,812,329 - Bykanov , et al. October 12, 2 | 2010-10-12 |
| Laser system Grant 7,778,302 - Ershov , et al. August 17, 2 | 2010-08-17 |
| Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ; et al. | 2010-07-15 |
| Laser system Grant 7,746,913 - Ershov , et al. June 29, 2 | 2010-06-29 |
| Spectral purity filters and methods therefor Grant 7,741,626 - Bykanov , et al. June 22, 2 | 2010-06-22 |
| Gas management system for a laser-produced-plasma EUV light source App 20100140514 - Bykanov; Alexander N. ; et al. | 2010-06-10 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Grant 7,732,793 - Ershov , et al. June 8, 2 | 2010-06-08 |
| Systems and methods for drive laser beam delivery in an euv light source App 20100127191 - Partlo; William N. ; et al. | 2010-05-27 |
| Laser produced plasma EUV light source App 20100127186 - Bykanov; Alexander N. ; et al. | 2010-05-27 |
| Laser system App 20100108913 - Ershov; Alexander I. ; et al. | 2010-05-06 |
| Immersion lithography laser light source with pulse stretcher App 20100074295 - Partlo; William N. ; et al. | 2010-03-25 |
| Spectral Purity Filters And Methods Therefor App 20100066989 - BYKANOV; ALEXANDER N. ; et al. | 2010-03-18 |
| Laser produced plasma EUV light source Grant 7,671,349 - Bykanov , et al. March 2, 2 | 2010-03-02 |
| Gas management system for a laser-produced-plasma EUV light source Grant 7,655,925 - Bykanov , et al. February 2, 2 | 2010-02-02 |
| Immersion lithography laser light source with pulse stretcher Grant 7,643,528 - Partlo , et al. January 5, 2 | 2010-01-05 |
| Systems and methods for collector mirror temperature control using direct contact heat transfer Grant 7,641,349 - Chrobak , et al. January 5, 2 | 2010-01-05 |
| Extreme ultraviolet light source Grant 7,642,533 - Partio , et al. January 5, 2 | 2010-01-05 |
| Laser system Grant 7,630,424 - Ershov , et al. December 8, 2 | 2009-12-08 |
| Drive laser delivery systems for euv light source App 20090267005 - Bykanov; Alexander N. ; et al. | 2009-10-29 |
| System and methods for filtering out-of-band radiation in EUV exposure tools App 20090250637 - Akins; Robert P. ; et al. | 2009-10-08 |
| Systems and methods for target material delivery in a laser produced plasma EUV light source App 20090230326 - Vaschenko; Georgiy O. ; et al. | 2009-09-17 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,567,607 - Knowles , et al. July 28, 2 | 2009-07-28 |
| EUV light source components and methods for producing, using and refurbishing same App 20090159808 - Bowering; Norbert R. ; et al. | 2009-06-25 |
| System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus App 20090154642 - Bykanov; Alexander N. ; et al. | 2009-06-18 |
| Laser system App 20090122825 - Ershov; Alexander I. ; et al. | 2009-05-14 |
| LPP EUV light source drive laser system App 20090095925 - Ershov; Alexander I. ; et al. | 2009-04-16 |
| Drive laser for EUV light source Grant 7,518,787 - Bykanov , et al. April 14, 2 | 2009-04-14 |
| Immersion lithography laser light source with pulse stretcher App 20090080476 - Partlo; William N. ; et al. | 2009-03-26 |
| Gas management system for a laser-produced-plasma EUV light source App 20090057567 - Bykanov; Alexander N. ; et al. | 2009-03-05 |
| Drive laser delivery systems for EUV light source Grant 7,491,954 - Bykanov , et al. February 17, 2 | 2009-02-17 |
| LPP EUV light source drive laser system Grant 7,482,609 - Ershov , et al. January 27, 2 | 2009-01-27 |
| Gas discharge laser output light beam parameter control Grant 7,471,708 - Besaucele , et al. December 30, 2 | 2008-12-30 |
| Alternative fuels for EUV light source Grant 7,465,946 - Bowering , et al. December 16, 2 | 2008-12-16 |
| Method and apparatus for EUV plasma source target delivery App 20080283776 - Algots; J. Martin ; et al. | 2008-11-20 |
| EUV light source Grant 7,449,704 - Fomenkov , et al. November 11, 2 | 2008-11-11 |
| Laser system App 20080267242 - Ershov; Alexander I. ; et al. | 2008-10-30 |
| LPP EUV light source drive laser system Grant 7,439,530 - Ershov , et al. October 21, 2 | 2008-10-21 |
| Laser system App 20080225908 - Ershov; Alexander I. ; et al. | 2008-09-18 |
| High repetition rate laser produced plasma EUV light source App 20080197297 - Akins; Robert P. ; et al. | 2008-08-21 |
| EUV light source Grant 7,411,203 - Fomenkov , et al. August 12, 2 | 2008-08-12 |
| Laser produced plasma EUV light source App 20080179548 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Method and apparatus for EUV plasma source target delivery Grant 7,405,416 - Algots , et al. July 29, 2 | 2008-07-29 |
| Laser system App 20080165337 - Ershov; Alexander I. ; et al. | 2008-07-10 |
| Laser produced plasma EUV light source App 20080149862 - Hansson; Bjorn A. M. ; et al. | 2008-06-26 |
| Laser system App 20080144671 - Ershov; Alexander I. ; et al. | 2008-06-19 |
| EUV light source Grant 7,388,220 - Fomenkov , et al. June 17, 2 | 2008-06-17 |
| Laser spectral engineering for lithographic process Grant 7,382,815 - Spangler , et al. June 3, 2 | 2008-06-03 |
| Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
| EUV light source collector lifetime improvements Grant 7,365,349 - Partlo , et al. April 29, 2 | 2008-04-29 |
| High repetition rate laser produced plasma EUV light source Grant 7,361,918 - Akins , et al. April 22, 2 | 2008-04-22 |
| Drive laser delivery systems for EUV light source App 20080087847 - Bykanov; Alexander N. ; et al. | 2008-04-17 |
| EUV optics App 20080043321 - Bowering; Norbert R. ; et al. | 2008-02-21 |
| Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ; et al. | 2008-01-31 |
| EUV light source Grant 7,323,703 - Oliver , et al. January 29, 2 | 2008-01-29 |
| EUV light source App 20080017801 - Fomenkov; Igor V. ; et al. | 2008-01-24 |
| LPP EUV light source Grant 7,317,196 - Partlo , et al. January 8, 2 | 2008-01-08 |
| Bandwidth control device App 20070297467 - Fomenkov; Igor V. ; et al. | 2007-12-27 |
| Drive laser for EUV light source App 20070291350 - Ershov; Alexander I. ; et al. | 2007-12-20 |
| Laser spectral engineering for lithographic process Grant 7,298,770 - Spangler , et al. November 20, 2 | 2007-11-20 |
| Discharge produced plasma EUV light source Grant 7,291,853 - Fomenkov , et al. November 6, 2 | 2007-11-06 |
| Collector for EUV light source Grant 7,288,778 - Partio , et al. October 30, 2 | 2007-10-30 |
| Collector for EUV light source Grant 7,288,777 - Partlo , et al. October 30, 2 | 2007-10-30 |
| High power gas discharge laser with helium purged line narrowing unit Grant 7,277,466 - Partlo , et al. October 2, 2 | 2007-10-02 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20070187627 - Ershov; Alexander I. ; et al. | 2007-08-16 |
| EUV light source App 20070158596 - Oliver; I. Roger ; et al. | 2007-07-12 |
| EUV light source App 20070158597 - Fomenkov; Igor V. ; et al. | 2007-07-12 |
| EUV light source App 20070125970 - Fomenkov; Igor V. ; et al. | 2007-06-07 |
| Collector for EUV light source App 20070114468 - Partlo; William N. ; et al. | 2007-05-24 |
| Collector for EUV light source App 20070114469 - Partlo; William N. ; et al. | 2007-05-24 |
| Line selected F.sub.2 two chamber laser system Grant 7,218,661 - Knowles , et al. May 15, 2 | 2007-05-15 |
| Collector for EUV light source Grant 7,217,940 - Partlo , et al. May 15, 2 | 2007-05-15 |
| EUV light source collector erosion mitigation Grant 7,180,083 - Partlo , et al. February 20, 2 | 2007-02-20 |
| High repetition rate laser produced plasma EUV light source App 20070029511 - Akins; Robert P. ; et al. | 2007-02-08 |
| EUV light source collector lifetime improvements App 20070023705 - Partlo; William N. ; et al. | 2007-02-01 |
| Discharge produced plasma EUV light source App 20070023711 - Fomenkov; Igor V. ; et al. | 2007-02-01 |
| EUV light source Grant 7,164,144 - Partlo , et al. January 16, 2 | 2007-01-16 |
| Systems and methods for EUV light source metrology App 20070008517 - Fomenkov; Igor V. ; et al. | 2007-01-11 |
| LPP EUV light source drive laser system App 20070001131 - Ershov; Alexander I. ; et al. | 2007-01-04 |
| Euv Light Source Collector Erosion Mitigation App 20060289808 - Partlo; William N. ; et al. | 2006-12-28 |
| Laser output beam wavefront splitter for bandwidth spectrum control Grant 7,154,928 - Sandstrom , et al. December 26, 2 | 2006-12-26 |
| EUV light source collector erosion mitigation Grant 7,141,806 - Partlo , et al. November 28, 2 | 2006-11-28 |
| Laser spectral engineering for lithographic process Grant 7,139,301 - Kroyan , et al. November 21, 2 | 2006-11-21 |
| Alternative fuels for EUV light source App 20060249699 - Bowering; Norbert R. ; et al. | 2006-11-09 |
| Gas discharge laser output light beam parameter control App 20060227839 - Besaucele; Herve A. ; et al. | 2006-10-12 |
| Method and apparatus for EUV plasma source target delivery App 20060192154 - Algots; J. Martin ; et al. | 2006-08-31 |
| LPP EUV light source drive laser system App 20060192152 - Ershov; Alexander I. ; et al. | 2006-08-31 |
| High repetition rate laser produced plasma EUV light source Grant 7,087,914 - Akins , et al. August 8, 2 | 2006-08-08 |
| Bandwidth control technique for a laser Grant 7,079,556 - Fomenkov , et al. July 18, 2 | 2006-07-18 |
| LLP EUV drive laser App 20060146906 - Brown; Daniel J.W. ; et al. | 2006-07-06 |
| Collector for EUV light source App 20060131515 - Partlo; William N. ; et al. | 2006-06-22 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system App 20060126697 - Knowles; David S. ; et al. | 2006-06-15 |
| Very narrow band, two chamber, high rep-rate gas discharge laser system Grant 7,061,961 - Knowles , et al. June 13, 2 | 2006-06-13 |
| Line selected F2 two chamber laser system Grant 7,058,107 - Knowles , et al. June 6, 2 | 2006-06-06 |
| EUV collector debris management App 20060091109 - Partlo; William N. ; et al. | 2006-05-04 |
| Very narrow band, two chamber, high reprate gas discharge laser system Grant 6,985,508 - Knowles , et al. January 10, 2 | 2006-01-10 |
| Laser output beam wavefront splitter for bandwidth spectrum control App 20050286598 - Sandstrom, Richard L. ; et al. | 2005-12-29 |
| Very Narrow Band, Two Chamber, High Rep-rate Gas Discharge Laser System App 20050271109 - Knowles, David S. ; et al. | 2005-12-08 |
| Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source App 20050269529 - Ershov, Alexander I. ; et al. | 2005-12-08 |
| Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
| Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ; et al. | 2005-10-20 |
| High repetition rate laser produced plasma EUV light source App 20050205810 - Akins, Robert P. ; et al. | 2005-09-22 |
| LPP EUV light source App 20050205811 - Partlo, William N. ; et al. | 2005-09-22 |
| EUV light source App 20050199829 - Partlo, William N. ; et al. | 2005-09-15 |
| Four KHz gas discharge laser system Grant 6,882,674 - Wittak , et al. April 19, 2 | 2005-04-19 |
| Laser spectral engineering for lithographic process App 20050068997 - Spangler, Ronald L. ; et al. | 2005-03-31 |
| Laser spectral engineering for lithographic process App 20050041701 - Spangler, Ronald L. ; et al. | 2005-02-24 |
| Laser spectral engineering for lithographic process Grant 6,853,653 - Spangler , et al. February 8, 2 | 2005-02-08 |
| Line selected F2 two chamber laser system App 20040258122 - Knowles, David S. ; et al. | 2004-12-23 |
| Plasma focus light source with improved pulse power system Grant 6,815,700 - Melnychuk , et al. November 9, 2 | 2004-11-09 |
| Line selected F2 two chamber laser system Grant 6,801,560 - Knowles , et al. October 5, 2 | 2004-10-05 |
| High power gas discharge laser with helium purged line narrowing unit App 20040190578 - Partlo, William N. ; et al. | 2004-09-30 |
| Line selected F2 two chamber laser system App 20040174919 - Knowles, David S. ; et al. | 2004-09-09 |
| Discharge produced plasma EUV light source App 20040160155 - Partlo, William N. ; et al. | 2004-08-19 |
| High power gas discharge laser with helium purged line narrowing unit Grant 6,778,584 - Partlo , et al. August 17, 2 | 2004-08-17 |
| Laser spectral engineering for lithographic process App 20040146082 - Kroyan, Armen ; et al. | 2004-07-29 |
| Four KHz gas discharge laser Grant 6,757,316 - Newman , et al. June 29, 2 | 2004-06-29 |
| Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ; et al. | 2004-06-10 |
| Pulse power system for extreme ultraviolet and x-ray sources Grant 6,744,060 - Ness , et al. June 1, 2 | 2004-06-01 |
| Bandwidth control technique for a laser Grant 6,721,340 - Fomenkov , et al. April 13, 2 | 2004-04-13 |
| High resolution spectral measurement device Grant 6,713,770 - Sandstrom , et al. March 30, 2 | 2004-03-30 |
| Bandwidth control technique for a laser App 20040057474 - Fomenkov, Igor V. ; et al. | 2004-03-25 |
| Very narrow band, two chamber, high reprate gas discharge laser system App 20040047385 - Knowles, David S. ; et al. | 2004-03-11 |
| Laser spectral engineering for lithographic process Grant 6,671,294 - Kroyan , et al. December 30, 2 | 2003-12-30 |
| Laser wavelength control unit with piezoelectric driver Grant 6,650,666 - Spangler , et al. November 18, 2 | 2003-11-18 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,625,191 - Knowles , et al. September 23, 2 | 2003-09-23 |
| Electric discharge laser with active wavelength chirp correction Grant 6,621,846 - Sandstrom , et al. September 16, 2 | 2003-09-16 |
| Virtual laser operator Grant 6,618,425 - Carlesi , et al. September 9, 2 | 2003-09-09 |
| Plasma focus light source with active and buffer gas control Grant 6,586,757 - Melnychuk , et al. July 1, 2 | 2003-07-01 |
| Four KHz gas discharge laser system App 20030118072 - Wittak, Christian J. ; et al. | 2003-06-26 |
| Plasma focus light source with improved pulse power system Grant 6,566,667 - Partlo , et al. May 20, 2 | 2003-05-20 |
| Very narrow band, two chamber, high rep rate gas discharge laser system Grant 6,567,450 - Myers , et al. May 20, 2 | 2003-05-20 |
| Plasma focus light source with tandem ellipsoidal mirror units Grant 6,566,668 - Rauch , et al. May 20, 2 | 2003-05-20 |
| Line narrowed laser with spatial filter Grant 6,556,612 - Ershov , et al. April 29, 2 | 2003-04-29 |
| Plasma pinch high energy with debris collector Grant 6,541,786 - Partlo , et al. April 1, 2 | 2003-04-01 |
| High resolution etalon-grating spectrometer Grant 6,538,737 - Sandstrom , et al. March 25, 2 | 2003-03-25 |
| Laser wavelength control unit with piezoelectric driver Grant 6,532,247 - Spangler , et al. March 11, 2 | 2003-03-11 |
| Fast wavelength correction technique for a laser Grant 6,529,531 - Everage , et al. March 4, 2 | 2003-03-04 |
| Plasma focus light source with improved pulse power system App 20030006383 - Melnychuk, Stephan T. ; et al. | 2003-01-09 |
| Laser spectral engineering for lithographic process App 20020167975 - Spangler, Ronald L. ; et al. | 2002-11-14 |
| Pulse power system for extreme ultraviolet and x-ray sources App 20020163313 - Ness, Richard M. ; et al. | 2002-11-07 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020154668 - Knowles, David S. ; et al. | 2002-10-24 |
| Line selected F2 two chamber laser system App 20020154671 - Knowles, David S. ; et al. | 2002-10-24 |
| Laser wavelength control unit with piezoelectric driver App 20020154669 - Spangler, Ronald L. ; et al. | 2002-10-24 |
| Gas discharge laser long life electrodes Grant 6,466,602 - Fleurov , et al. October 15, 2 | 2002-10-15 |
| Plasma focus high energy photon source with blast shield Grant 6,452,199 - Partlo , et al. September 17, 2 | 2002-09-17 |
| High resolution spectral measurement device App 20020121608 - Sandstrom, Richard L. ; et al. | 2002-09-05 |
| High resolution etalon-grating spectrometer App 20020101589 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| High resolution etalon-grating monochromator App 20020101588 - Sandstrom, Richard L. ; et al. | 2002-08-01 |
| Plasma Focus High Energy Photon Source With Blast Shield App 20020100882 - PARTLO, WILLIAM N. ; et al. | 2002-08-01 |
| Laser spectral engineering for lithographic process App 20020048288 - Kroyan, Armen ; et al. | 2002-04-25 |
| Very narrow band, two chamber, high rep rate gas discharge laser system App 20020044586 - Myers, David W. ; et al. | 2002-04-18 |
| Line Narrowed Laser With Spatial Filter App 20020034209 - ERSHOV, ALEXANDER I. ; et al. | 2002-03-21 |
| Four KHz gas discharge laser App 20020021728 - Newman, Peter C. ; et al. | 2002-02-21 |
| Plasma focus light source with active and buffer gas control App 20020014598 - Melnychuk, Stephan T. ; et al. | 2002-02-07 |
| Plasma focus light source with tandem ellipsoidal mirror units App 20020014599 - Rauch, John E. ; et al. | 2002-02-07 |
| Laser wavelength control unit with piezoelectric driver App 20020006149 - Spangler, Ronald L. ; et al. | 2002-01-17 |
| Electric discharge laser with acoustic chirp correction Grant 6,317,447 - Partlo , et al. November 13, 2 | 2001-11-13 |
| Narrow band laser with fine wavelength control Grant 6,192,064 - Algots , et al. February 20, 2 | 2001-02-20 |
| Reliable modular production quality narrow-band high REP rate excimer laser Grant 6,128,323 - Myers , et al. October 3, 2 | 2000-10-03 |
| Grating assembly with bi-directional bandwidth control Grant 6,094,448 - Fomenkov , et al. July 25, 2 | 2000-07-25 |
| Wavelength shift correction technique for a laser Grant 6,078,599 - Everage , et al. June 20, 2 | 2000-06-20 |
| Laser-illuminated stepper or scanner with energy sensor feedback Grant 6,067,306 - Sandstrom , et al. May 23, 2 | 2000-05-23 |
| Plasma focus high energy photon source Grant 6,064,072 - Partlo , et al. May 16, 2 | 2000-05-16 |
| Gas discharge laser with gas temperature control Grant 6,034,978 - Ujazdowski , et al. March 7, 2 | 2000-03-07 |
| Gas discharge laser with roller bearings and stable magnetic axial positioning Grant 6,026,103 - Oliver , et al. February 15, 2 | 2000-02-15 |
| Laser having baffled enclosure Grant 6,021,150 - Partio , et al. February 1, 2 | 2000-02-01 |
| Pulse energy control for excimer laser Grant 6,005,879 - Sandstrom , et al. December 21, 1 | 1999-12-21 |
| Reliable. modular, production quality narrow-band KRF excimer laser Grant 5,991,324 - Knowles , et al. November 23, 1 | 1999-11-23 |
| Laser having improved beam quality and reduced operating cost Grant 5,748,656 - Watson , et al. May 5, 1 | 1998-05-05 |
| Pulse power generating circuit with energy recovery Grant 5,729,562 - Birx , et al. March 17, 1 | 1998-03-17 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 