Fomenkov; Igor
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fomenkov; Igor.The latest application filed is for "thermal monitor for an extreme ultraviolet light source".
- Fomenkov; Igor - San Diego CA
| Patent | Date |
|---|---|
| Thermal monitor for an extreme ultraviolet light source Grant 9,148,941 - Fleurov , et al. September 29, 2 | 2015-09-29 |
| Energy sensors for light beam alignment Grant 8,993,976 - Graham , et al. March 31, 2 | 2015-03-31 |
| Thermal Monitor For An Extreme Ultraviolet Light Source App 20140203195 - Fleurov; Vladimir ; et al. | 2014-07-24 |
| Energy Sensors for Light Beam Alignment App 20130043401 - Graham; Matthew ; et al. | 2013-02-21 |
| Wavelength reference for excimer laser Grant 5,978,391 - Das , et al. November 2, 1 | 1999-11-02 |
| Method and apparatus for calibrating a laser wavelength control mechanism Grant 5,450,207 - Fomenkov September 12, 1 | 1995-09-12 |
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