Foca; Eugen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Foca; Eugen.The latest application filed is for "contact area size determination between 3d structures in an integrated semiconductor sample".

Company Profile

5.6.11

Foca; Eugen - Ellwangen DE
Foca; Eugen - Lauchheim DE
Foca; Eugen - Radebeul DE
Foca; Eugen - Radeseul DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and devices for determining metrology sites Grant 11,436,506 - Srikantha , et al. September 6, 2	2022-09-06
Contact Area Size Determination Between 3d Structures In An Integrated Semiconductor Sample App 20220230899 - Buxbaum; Alex ; et al.	2022-07-21
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures App 20220223445 - Avishai; Amir ; et al.	2022-07-14
Cross Section Imaging With Improved 3d Volume Image Reconstruction Accuracy App 20220138973 - Korb; Thomas ; et al.	2022-05-05
Root Cause Analysis For Fabrication Processes Of Semiconductor Structures App 20210097673 - Neumann; Jens Timo ; et al.	2021-04-01
Method And Devices For Determining Metrology Sites App 20200285976 - Srikantha; Abhilash ; et al.	2020-09-10
Vacuum system, in particular EUV lithography system, and optical element Grant 10,599,052 - Roos , et al.	2020-03-24
Projection exposure apparatus and method for measuring a projection lens Grant 10,585,356 - Foca , et al.	2020-03-10
Vacuum System, In Particular Euv Lithography System, And Optical Element App 20190196344 - ROOS; Matthias ; et al.	2019-06-27
Vacuum system, in particular EUV lithography system, and optical element Grant 10,241,421 - Roos , et al.	2019-03-26
Projection Exposure Apparatus And Method For Measuring A Projection Lens App 20180373163 - FOCA; Eugen ; et al.	2018-12-27
Vacuum linear feed-through and vacuum system having said vacuum linear feed-through Grant 9,952,519 - Roos , et al. April 24, 2	2018-04-24
Vacuum Linear Feed-through And Vacuum System Having Said Vacuum Linear Feed-through App 20170212428 - Roos; Matthias ; et al.	2017-07-27
Vacuum System, in Particular EUV Lithography System, and Optical Element App 20170168402 - Roos; Matthias ; et al.	2017-06-15
Particle beam writing method, particle beam writing apparatus and maintenance method for same Grant 8,257,888 - Sczyrba , et al. September 4, 2	2012-09-04
Reducing Ion Migration Of Absorber Materials Of Lithography Masks By Chromium Passivation App 20110027699 - Tchikoulaeva; Anna ; et al.	2011-02-03
Particle Beam Writing Method, Particle Beam Writing Apparatus and Maintenance Method for Same App 20100104961 - Sczyrba; Martin ; et al.	2010-04-29

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