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Patent applications and USPTO patent grants for Flietner; Bertrand.The latest application filed is for "self aligned buried plate".
Patent | Date |
---|---|
Self aligned buried plate Grant 6,699,794 - Flietner , et al. March 2, 2 | 2004-03-02 |
Spatially uniform gas supply and pump configuration for large wafer diameters Grant 6,537,418 - Muller , et al. March 25, 2 | 2003-03-25 |
Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications Grant 6,140,208 - Agahi , et al. October 31, 2 | 2000-10-31 |
In-situ measurement method and apparatus for semiconductor processing Grant 6,140,833 - Flietner , et al. October 31, 2 | 2000-10-31 |
Reduced pad erosion Grant 6,124,206 - Flietner , et al. September 26, 2 | 2000-09-26 |
Method of forming deep trench capacitors Grant 6,103,585 - Michaelis , et al. August 15, 2 | 2000-08-15 |
Process for depositing a surface-wide layer through a mask and optionally closing said mask Grant 5,786,235 - Eisele , et al. July 28, 1 | 1998-07-28 |
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