Fleurov; Vladimir B.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fleurov; Vladimir B..The latest application filed is for "beam position control for an extreme ultraviolet light source".
- Fleurov; Vladimir B. - Escondido CA US
| Patent | Date |
|---|---|
| Systems and methods for buffer gas flow stabilization in a laser produced plasma light source Grant 9,516,730 - Fleurov , et al. December 6, 2 | 2016-12-06 |
| Methods and apparatus for laser produced plasma EUV light source Grant 9,271,381 - Fleurov February 23, 2 | 2016-02-23 |
| Beam position control for an extreme ultraviolet light source Grant 9,167,679 - Fleurov , et al. October 20, 2 | 2015-10-20 |
| Beam Position Control For An Extreme Ultraviolet Light Source App 20150257246 - Fleurov; Vladimir B. ; et al. | 2015-09-10 |
| Methods And Apparatus For Laser Produced Plasma Euv Light Source App 20150230325 - Fleurov; Vladimir B. | 2015-08-13 |
| Beam position control for an extreme ultraviolet light source Grant 9,000,405 - Fleurov , et al. April 7, 2 | 2015-04-07 |
| Systems and methods for optics cleaning in an EUV light source Grant 9,000,404 - Bykanov , et al. April 7, 2 | 2015-04-07 |
| 6 KHz and above gas discharge laser system Grant 8,855,166 - Ujazdowski , et al. October 7, 2 | 2014-10-07 |
| Beam Position Control For An Extreme Ultraviolet Light Source App 20140264091 - Fleurov; Vladimir B. ; et al. | 2014-09-18 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20140110609 - Bykanov; Alexander N. ; et al. | 2014-04-24 |
| Systems and methods for optics cleaning in an EUV light source Grant 8,633,459 - Bykanov , et al. January 21, 2 | 2014-01-21 |
| Systems And Methods For Buffer Gas Flow Stabilization In A Laser Produced Plasma Light Source App 20120313016 - Fleurov; Vladimir B. ; et al. | 2012-12-13 |
| Systems And Methods For Optics Cleaning In An Euv Light Source App 20120223256 - Bykanov; Alexander N. ; et al. | 2012-09-06 |
| 6 Khz And Above Gas Discharge Laser System App 20120120974 - Ujazdowski; Richard C. ; et al. | 2012-05-17 |
| Immersion lithography laser light source with pulse stretcher App 20100074295 - Partlo; William N. ; et al. | 2010-03-25 |
| Immersion lithography laser light source with pulse stretcher Grant 7,643,528 - Partlo , et al. January 5, 2 | 2010-01-05 |
| Immersion lithography laser light source with pulse stretcher App 20090080476 - Partlo; William N. ; et al. | 2009-03-26 |
| 6 Khz and above gas discharge laser system App 20060222034 - Ujazdowski; Richard C. ; et al. | 2006-10-05 |
| LLP EUV drive laser App 20060146906 - Brown; Daniel J.W. ; et al. | 2006-07-06 |
| Four KHz gas discharge laser Grant 6,757,316 - Newman , et al. June 29, 2 | 2004-06-29 |
| Automatic gas control system for a gas discharge laser App 20040022293 - Rule, John A. ; et al. | 2004-02-05 |
| ArF laser with low pulse energy and high rep rate Grant 6,553,049 - Besaucele , et al. April 22, 2 | 2003-04-22 |
| Gas discharge laser long life electrodes Grant 6,466,602 - Fleurov , et al. October 15, 2 | 2002-10-15 |
| Four KHz gas discharge laser App 20020021728 - Newman, Peter C. ; et al. | 2002-02-21 |
| Electric discharge laser with acoustic chirp correction Grant 6,317,447 - Partlo , et al. November 13, 2 | 2001-11-13 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 