Patent | Date |
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Micromachined cutting blade formed from {211}-oriented silicon Grant 7,992,309 - Fleming , et al. August 9, 2 | 2011-08-09 |
Microfabricated bulk wave acoustic bandgap device Grant 7,836,566 - Olsson , et al. November 23, 2 | 2010-11-23 |
Microfabricated bulk wave acoustic bandgap device Grant 7,733,198 - Olsson , et al. June 8, 2 | 2010-06-08 |
Microelectromechanical tunable inductor Grant 7,710,232 - Stalford , et al. May 4, 2 | 2010-05-04 |
Contour mode resonators with acoustic reflectors Grant 7,385,334 - Olsson , et al. June 10, 2 | 2008-06-10 |
Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom Grant 7,339,454 - Fleming March 4, 2 | 2008-03-04 |
Tensile-stressed microelectromechanical apparatus and tiltable micromirrors formed therefrom Grant 7,159,397 - Fleming January 9, 2 | 2007-01-09 |
Microfabricated ion trap array Grant 7,154,088 - Blain , et al. December 26, 2 | 2006-12-26 |
Use of a photonic crystal for optical amplifier gain control Grant 7,079,309 - Lin , et al. July 18, 2 | 2006-07-18 |
Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom Grant 7,046,411 - Fleming May 16, 2 | 2006-05-16 |
Method for fabricating a photonic crystal Grant 6,869,330 - Gee , et al. March 22, 2 | 2005-03-22 |
Method to fabricate layered material compositions Grant 6,812,482 - Fleming , et al. November 2, 2 | 2004-11-02 |
Microfabricated bragg waveguide Grant 6,807,353 - Fleming , et al. October 19, 2 | 2004-10-19 |
Photonic crystal light source Grant 6,768,256 - Fleming , et al. July 27, 2 | 2004-07-27 |
Micromachined cutting blade formed from {211}-oriented silicon App 20030208911 - Fleming, James G. ;   et al. | 2003-11-13 |
Micromachined cutting blade formed from {211}-oriented silicon Grant 6,615,496 - Fleming , et al. September 9, 2 | 2003-09-09 |
Photonically engineered incandescent emitter Grant 6,611,085 - Gee , et al. August 26, 2 | 2003-08-26 |
Photonically engineered incandescent emitter App 20030132705 - Gee, James M. ;   et al. | 2003-07-17 |
Thermophotovoltaic energy conversion using photonic bandgap selective emitters Grant 6,583,350 - Gee , et al. June 24, 2 | 2003-06-24 |
Method to fabricate layered material compositions App 20030104700 - Fleming, James G. ;   et al. | 2003-06-05 |
Lithographic fabrication of nanoapertures Grant 6,503,409 - Fleming January 7, 2 | 2003-01-07 |
Media for control of thermal emission and methods of applications thereof Grant 6,414,332 - Lin , et al. July 2, 2 | 2002-07-02 |
Method to fabricate layered material compositions Grant 6,358,854 - Fleming , et al. March 19, 2 | 2002-03-19 |
Tungsten coating for improved wear resistance and reliability of microelectromechanical devices Grant 6,290,859 - Fleming , et al. September 18, 2 | 2001-09-18 |
Method for forming suspended micromechanical structures Grant 6,020,272 - Fleming February 1, 2 | 2000-02-01 |
Use of chemical-mechanical polishing for fabricating photonic bandgap structures Grant 5,998,298 - Fleming , et al. December 7, 1 | 1999-12-07 |
Synthesis of W-Si-N films by chemical vapor deposition using WF.sub.6, SiH.sub.4 and NH.sub.3 Grant 5,997,949 - Nicolet , et al. December 7, 1 | 1999-12-07 |
Method for integrating microelectromechanical devices with electronic circuitry Grant 5,963,788 - Barron , et al. October 5, 1 | 1999-10-05 |
Chemical vapor deposition of W-Si-N and W-B-N Grant 5,916,634 - Fleming , et al. June 29, 1 | 1999-06-29 |
Bistable microelectromechanical actuator Grant 5,867,302 - Fleming February 2, 1 | 1999-02-02 |