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Patent applications and USPTO patent grants for Flanner, III; Philip D..The latest application filed is for "calculated electrical performance metrics for process monitoring and yield management".
Patent | Date |
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Calculated electrical performance metrics for process monitoring and yield management Grant 10,079,183 - Gao , et al. September 18, 2 | 2018-09-18 |
Techniques for optimized scatterometry Grant 9,127,927 - Iloreta , et al. September 8, 2 | 2015-09-08 |
Calculated Electrical Performance Metrics For Process Monitoring And Yield Management App 20150006097 - Gao; Xiang ;   et al. | 2015-01-01 |
High throughput thin film characterization and defect detection Grant 8,711,349 - Gao , et al. April 29, 2 | 2014-04-29 |
High Throughput Thin Film Characterization And Defect Detection App 20130083320 - Gao; Xiang ;   et al. | 2013-04-04 |
Film measurement using reflectance computation Grant 7,362,686 - Aoyagi , et al. April 22, 2 | 2008-04-22 |
Film measurement Grant 7,345,761 - Aoyagi , et al. March 18, 2 | 2008-03-18 |
Film measurement Grant 7,190,453 - Aoyagi , et al. March 13, 2 | 2007-03-13 |
Method and system for calibrating an ellipsometer Grant 5,581,350 - Chen , et al. December 3, 1 | 1996-12-03 |
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