Flanigan; Michael Allen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Flanigan; Michael Allen.The latest application filed is for "shield for a substrate processing chamber".
- Flanigan; Michael Allen - Dutch Flat CA
| Patent | Date |
|---|---|
| Shield For A Substrate Processing Chamber App 20190267220 - Scheible; Kathleen ; et al. | 2019-08-29 |
| Holding assembly for substrate processing chamber Grant 10,347,475 - Scheible , et al. July 9, 2 | 2019-07-09 |
| Holding Assembly For Substrate Processing Chamber App 20150380223 - Scheible; Kathleen ; et al. | 2015-12-31 |
| Process kit and target for substrate processing chamber Grant 9,127,362 - Scheible , et al. September 8, 2 | 2015-09-08 |
| Homing device for magnetron rotating on two arms Grant 8,900,427 - Miller , et al. December 2, 2 | 2014-12-02 |
| Homing device for magnetron rotating on two arms App 20110297538 - Miller; Keith A. ; et al. | 2011-12-08 |
| Coaxial shafts for radial positioning of rotating magnetron Grant 8,021,527 - Miller , et al. September 20, 2 | 2011-09-20 |
| Coaxial Shafts for Radial Positioning of Rotating Magnetron App 20080060938 - MILLER; Keith A. ; et al. | 2008-03-13 |
| Process Kit And Target For Substrate Processing Chamber App 20070102286 - Scheible; Kathleen ; et al. | 2007-05-10 |
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