Flanigan, Allen
Patent Applications and Registrations
Patent applications and USPTO patent grants for Flanigan, Allen.The latest application filed is for "thermal exchanger for a wafer chuck".
- Flanigan, Allen - San Jose CA
| Patent | Date |
|---|---|
| Thermal exchanger for a wafer chuck App 20020100282 - Flanigan, Allen | 2002-08-01 |
| Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck App 20010030124 - Flanigan, Allen | 2001-10-18 |
| Method and apparatus for fabricating a wafer spacing mask on a substrate support chuck Grant 6,258,227 - Flanigan July 10, 2 | 2001-07-10 |
| Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system Grant 6,081,414 - Flanigan , et al. June 27, 2 | 2000-06-27 |
| Electrostatic chuck with improved spacing mask and workpiece detection device Grant D425,919 - Burkhart , et al. May 30, 2 | 2000-05-30 |
| Interlock safety device Grant 6,053,756 - Flanigan , et al. April 25, 2 | 2000-04-25 |
| Electrostatic chuck with improved spacing and charge migration reduction mask Grant D420,022 - Burkhart , et al. February 1, 2 | 2000-02-01 |
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